Dhas; Arul N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Dhas; Arul N..The latest application filed is for "plasma enhanced wafer soak for thin film deposition".

Company Profile

0.5.4

Dhas; Arul N. - Sherwood OR
Dhas; Arul N. - Tualatin OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma Enhanced Wafer Soak For Thin Film Deposition App 20210366705 - Dhas; Arul N. ; et al.	2021-11-25
Continuous Plasma For Film Deposition And Surface Treatment App 20210335606 - Dhas; Arul N. ; et al.	2021-10-28
Method and apparatus to minimize seam effect during TEOS oxide film deposition Grant 9,570,289 - Dhas February 14, 2	2017-02-14
Method And Apparatus To Minimize Seam Effect During Teos Oxide Film Deposition App 20160260603 - Dhas; Arul N.	2016-09-08
Method for the reduction of defectivity in vapor deposited films Grant 9,328,416 - Dhas , et al. May 3, 2	2016-05-03
Method And Apparatus For The Reduction Of Defectivity In Vapor Deposited Films App 20150203967 - Dhas; Arul N. ; et al.	2015-07-23
Method of eliminating small bin defects in high throughput TEOS films Grant 8,034,725 - Henri , et al. October 11, 2	2011-10-11
Method and apparatus to reduce defects in liquid based PECVD films Grant 8,017,527 - Dhas , et al. September 13, 2	2011-09-13
Method of eliminating small bin defects in high throughput TEOS films Grant 7,704,894 - Henri , et al. April 27, 2	2010-04-27

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