deVilliers; Anton

Patent Applications and Registrations

Patent applications and USPTO patent grants for deVilliers; Anton.The latest application filed is for "method for recessing a fill material within openings formed on a patterned substrate".

Company Profile

13.76.74

deVilliers; Anton - Clifton Park NY
deVilliers; Anton - Albany NY
deVilliers; Anton - Boise ID US
deVilliers; Anton - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor apparatus having stacked devices and method of manufacture thereof Grant 11,450,671 - Liebmann , et al. September 20, 2	2022-09-20
Method for forming and using stress-tuned silicon oxide films in semiconductor device patterning Grant 11,443,953 - Tapily , et al. September 13, 2	2022-09-13
Compact 3D stacked-CFET architecture for complex logic cells Grant 11,437,376 - Liebmann , et al. September 6, 2	2022-09-06
Multiple patterning processes Grant 11,417,526 - O'Meara , et al. August 16, 2	2022-08-16
Method for planarization of organic films Grant 11,393,694 - Devilliers , et al. July 19, 2	2022-07-19
Point-of-use dynamic concentration delivery system with high flow and high uniformity Grant 11,383,211 - Nasman , et al. July 12, 2	2022-07-12
Critical dimension correction via calibrated trim dosing Grant 11,360,388 - deVilliers , et al. June 14, 2	2022-06-14
Method for Recessing a Fill Material Within Openings Formed on a Patterned Substrate App 20220172991 - deVilliers; Anton ; et al.	2022-06-02
3D directed self-assembly for nanostructures Grant 11,342,427 - deVilliers , et al. May 24, 2	2022-05-24
Reverse contact and silicide process for three-dimensional semiconductor devices Grant 11,322,401 - Smith , et al. May 3, 2	2022-05-03
Method Of 3d Logic Fabrication To Sequentially Decrease Processing Temperature And Maintain Material Thermal Thresholds App 20220122892 - SMITH; Jeffrey ; et al.	2022-04-21
Method Of Making 3d Circuits With Integrated Stacked 3d Metal Lines For High Density Circuits App 20220115271 - GARDNER; Mark I. ; et al.	2022-04-14
Method of making 3D circuits with integrated stacked 3D metal lines for high density circuits Grant 11,251,080 - Gardner , et al. February 15, 2	2022-02-15
Planarization of Spin-On Films App 20210296121 - Schepis; Anthony R. ; et al.	2021-09-23
Multiple Patterning Processes App 20210242020 - O'Meara; David L. ; et al.	2021-08-05
Efficient Three-dimensional Design For Logic Applications Using Variable Voltage Threshold Three-dimensional Cmos Devices App 20210242351 - GARDNER; MARK I. ; et al.	2021-08-05
Method and process for forming memory hole patterns Grant 11,049,721 - Wada , et al. June 29, 2	2021-06-29
Method Of Making 3d Circuits With Integrated Stacked 3d Metal Lines For High Density Circuits App 20210166975 - GARDNER; Mark I. ; et al.	2021-06-03
Method for controlling transistor delay of nanowire or nanosheet transistor devices Grant 10,991,626 - Smith , et al. April 27, 2	2021-04-27
Power Delivery Network For Cfet With Buried Power Rails App 20210118798 - LIEBMANN; Lars ; et al.	2021-04-22
Method Of Making A Charge Trap Tfet Semiconductor Device For Advanced Logic Operations App 20210118879 - GARDNER; Mark I. ; et al.	2021-04-22
Semiconductor Apparatus Having Stacked Devices And Method Of Manufacture Thereof App 20210118799 - Liebmann; Lars ; et al.	2021-04-22
3D Directed Self-Assembly for Nanostructures App 20210104609 - deVilliers; Anton ; et al.	2021-04-08
Reverse Contact And Silicide Process For Three-dimensional Semiconductor Devices App 20210098294 - SMITH; Jeffrey ; et al.	2021-04-01
Patterning A Substrate App 20210088907 - GRZESKOWIAK; Jodi ; et al.	2021-03-25
Semiconductor Apparatus Having Stacked Devices And Method Of Manufacture Thereof App 20210043630 - Liebmann; Lars ; et al.	2021-02-11
Apparatus And Method For Simultaneous Formation Of Diffusion Break, Gate Cut, And Independent N And P Gates For 3d Transistor Devices App 20210043522 - CHANEMOUGAME; Daniel ; et al.	2021-02-11
Method of forming gate spacer for nanowire FET device Grant 10,916,637 - Smith , et al. February 9, 2	2021-02-09
Highly Regular Logic Design For Efficient 3d Integration App 20210035967 - Liebmann; Lars ; et al.	2021-02-04
Method and Process for Forming Memory Hole Patterns App 20210035981 - Wada; Toshiharu ; et al.	2021-02-04
Compact 3d Stacked-cfet Architecture For Complex Logic Cells App 20200381430 - Liebmann; Lars ; et al.	2020-12-03
Point-of-use Dynamic Concentration Delivery System With High Flow And High Uniformity App 20200338510 - NASMAN; Ronald W. ; et al.	2020-10-29
Method For Controlling Transistor Delay Of Nanowire Or Nanosheet Transistor Devices App 20200303256 - SMITH; Jeffrey ; et al.	2020-09-24
Three-dimensional device and method of forming the same Grant 10,770,479 - Smith , et al. Sep	2020-09-08
Replacement Buried Power Rail In Backside Power Delivery App 20200266169 - KANG; Hoyoung ; et al.	2020-08-20
Method and device for incorporating single diffusion break into nanochannel structures of FET devices Grant 10,734,224 - Smith , et al.	2020-08-04
Method for controlling transistor delay of nanowire or nanosheet transistor devices Grant 10,714,391 - Smith , et al.	2020-07-14
Method of preventing bulk silicon charge transfer for nanowire and nanoslab processing Grant 10,665,672 - Smith , et al.	2020-05-26
Method For Planarization Of Organic Films App 20200152472 - DEVILLIERS; Anton ; et al.	2020-05-14
Method For Forming And Using Stress-tuned Silicon Oxide Films In Semiconductor Device Patterning App 20200152473 - Tapily; Kandabara N. ; et al.	2020-05-14
Architecture For Monolithic 3d Integration Of Semiconductor Devices App 20200135718 - Liebmann; Lars ; et al.	2020-04-30
Amelioration of global wafer distortion based on determination of localized distortions of a semiconductor wafer Grant 10,622,233 - Hooge , et al.	2020-04-14
Method of liquid filter wetting Grant 10,525,416 - Kang , et al. J	2020-01-07
Method of preventing bulk silicon charge transfer for nanowire and nanoslab processing Grant 10,490,630 - Smith , et al. Nov	2019-11-26
Three-dimensional semiconductor device including integrated circuit, transistors and transistor components and method of fabrication Grant 10,453,850 - Smith , et al. Oc	2019-10-22
Method Of Forming Gate Spacer For Nanowire Fet Device App 20190296128 - SMITH; Jeffrey ; et al.	2019-09-26
Three-dimensional Device And Method Of Forming The Same App 20190288004 - SMITH; Jeffrey ; et al.	2019-09-19
Critical Dimension Correction Via Calibrated Trim Dosing App 20190287795 - deVilliers; Anton ; et al.	2019-09-19
Method and device for incorporating single diffusion break into nanochannel structures of FET devices Grant 10,388,519 - Smith , et al. A	2019-08-20
Method For Controlling Transistor Delay Of Nanowire Or Nanosheet Transistor Devices App 20190172751 - SMITH; Jeffrey ; et al.	2019-06-06
Method Of Preventing Bulk Silicon Charge Transfer For Nanowire And Nanoslab Processing App 20190140050 - SMITH; Jeffrey ; et al.	2019-05-09
Method and device for incorporating single diffusion break into nanochannel structures of fet devices App 20190057867 - Smith; Jeffrey ; et al.	2019-02-21
Method and device for incorporating single diffusion break into nanochannel structures of fet devices App 20190058036 - Smith; Jeffrey ; et al.	2019-02-21
Methods of forming structures supported by semiconductor substrates Grant 10,151,981 - deVilliers Dec	2018-12-11
Amelioration Of Global Wafer Distortion Based On Determination Of Localized Distortions Of A Semiconductor Wafer App 20180342410 - Hooge; Joshua ; et al.	2018-11-29
Method Of Liquid Filter Wetting App 20180333680 - Kang; Hoyoung ; et al.	2018-11-22
Three-dimensional Semiconductor Device And Method Of Fabrication App 20180240802 - SMITH; Jeffrey ; et al.	2018-08-23
Three-dimensional semiconductor device and method of fabrication Grant 9,997,598 - Smith , et al. June 12, 2	2018-06-12
Three-dimensional Semiconductor Device And Method Of Fabrication App 20180040695 - Smith; Jeffrey ; et al.	2018-02-08
Three-dimensional Semiconductor Device And Method Of Fabrication App 20180026042 - SMITH; Jeffrey ; et al.	2018-01-25
Textured devices Grant 9,842,965 - deVilliers , et al. December 12, 2	2017-12-12
Inline dispense capacitor Grant 9,718,082 - deVilliers , et al. August 1, 2	2017-08-01
Methods of fabricating substrates Grant 9,653,315 - Sills , et al. May 16, 2	2017-05-16
Epitaxial Devices App 20160315223 - deVilliers; Anton ; et al.	2016-10-27
Epitaxial devices Grant 9,385,276 - deVilliers , et al. July 5, 2	2016-07-05
Substrate backside texturing Grant 9,281,251 - Fonseca , et al. March 8, 2	2016-03-08
Method for self-aligned double patterning without atomic layer deposition Grant 9,263,297 - deVilliers February 16, 2	2016-02-16
Lens heating compensation in photolithography Grant 9,235,134 - He , et al. January 12, 2	2016-01-12
Epitaxial Devices App 20150349204 - deVilliers; Anton ; et al.	2015-12-03
Lithography methods, methods for forming patterning tools and patterning tools Grant 9,176,385 - Zhou , et al. November 3, 2	2015-11-03
Methods of forming a pattern on a substrate Grant 9,153,458 - Light , et al. October 6, 2	2015-10-06
Epitaxial devices Grant 9,112,104 - deVilliers , et al. August 18, 2	2015-08-18
Inline Dispense Capacitor App 20150209818 - deVilliers; Anton ; et al.	2015-07-30
Method For Self-Aligned Double Patterning Without Atomic Layer Deposition App 20150214070 - deVilliers; Anton	2015-07-30
Substrate Backside Texturing App 20150044785 - FONSECA; Carlos A. ; et al.	2015-02-12
Methods of Fabricating Substrates App 20140335694 - Sills; Scott ; et al.	2014-11-13
Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns Grant 8,883,372 - Light , et al. November 11, 2	2014-11-11
Methods of forming a masking pattern for integrated circuits Grant 8,871,646 - DeVilliers October 28, 2	2014-10-28
Patterning mask and method of formation of mask using step double patterning Grant 8,871,407 - Devilliers , et al. October 28, 2	2014-10-28
Reticles, and methods of mitigating asymmetric lens heating in photolithography Grant 8,845,908 - Light , et al. September 30, 2	2014-09-30
Methods For Epitaxial Devices App 20140284614 - deVilliers; Anton ; et al.	2014-09-25
Lithography Wave-front Control System And Method App 20140247476 - He; Yuan ; et al.	2014-09-04
Methods of forming patterns on substrates Grant 8,815,747 - deVilliers , et al. August 26, 2	2014-08-26
Methods of fabricating substrates Grant 8,796,155 - Sills , et al. August 5, 2	2014-08-05
Method for epitaxial devices Grant 8,748,321 - deVilliers , et al. June 10, 2	2014-06-10
Lithography wave-front control system and method Grant 8,736,814 - He , et al. May 27, 2	2014-05-27
Methods of fabricating substrates Grant 8,703,570 - Sills , et al. April 22, 2	2014-04-22
Lithography Methods, Methods For Forming Patterning Tools And Patterning Tools App 20140106280 - Zhou; Jianming ; et al.	2014-04-17
Reticle design for the reduction of lens heating phenomenon Grant 8,691,477 - Zhou , et al. April 8, 2	2014-04-08
Methods of forming a pattern in a material and methods of forming openings in a material to be patterned Grant 8,685,630 - DeVilliers , et al. April 1, 2	2014-04-01
Anti Spacer Process And Semiconductor Structure Generated By The Anti Spacer Process App 20140054756 - HYATT; MICHAEL ; et al.	2014-02-27
Methods Of Forming a Pattern on a Substrate App 20140051251 - Light; Scott L. ; et al.	2014-02-20
Illumination design for lens heating mitigation Grant 8,625,078 - Zhou , et al. January 7, 2	2014-01-07
Lithography methods, methods for forming patterning tools and patterning tools Grant 8,609,302 - Zhou , et al. December 17, 2	2013-12-17
Methods of fabricating substrates Grant 8,603,884 - Sills , et al. December 10, 2	2013-12-10
Reticle With Composite Polarizer And Method Of Simultaneous Optimization Of Imaging Of A Set Of Different Patterns App 20130323628 - LIGHT; SCOTT ; et al.	2013-12-05
Methods Of Forming A Pattern In A Material And Methods Of Forming Openings In A Material To Be Patterned App 20130323924 - DeVilliers; Anton ; et al.	2013-12-05
Methods Of Forming A Masking Pattern For Integrated Circuits App 20130309871 - DeVilliers; Anton	2013-11-21
Epitaxial Devices App 20130256692 - deVilliers; Anton ; et al.	2013-10-03
Reticle Design For The Reduction Of Lens Heating Phenomenon App 20130216795 - Zhou; Jianming ; et al.	2013-08-22
Methods of forming a pattern in a material and methods of forming openings in a material to be patterned Grant 8,512,938 - DeVilliers , et al. August 20, 2	2013-08-20
Methods of forming contact openings and methods of increasing contact area in only one of X and Y axes in the fabrication of integrated circuitry Grant 8,507,380 - Kiehlbauch , et al. August 13, 2	2013-08-13
Methods of forming a masking pattern for integrated circuits Grant 8,492,282 - DeVilliers July 23, 2	2013-07-23
Epitaxial devices Grant 8,450,776 - deVilliers , et al. May 28, 2	2013-05-28
Methods of forming a photoresist-comprising pattern on a substrate Grant 8,409,457 - Zhang , et al. April 2, 2	2013-04-02
Lithography Methods, Methods For Forming Patterning Tools And Patterning Tools App 20130052566 - Zhou; Jianming ; et al.	2013-02-28
Methods of Forming Patterned Masks App 20130004889 - Zhang; Zishu ; et al.	2013-01-03
Methods of Fabricating Substrates App 20120322269 - Sills; Scott ; et al.	2012-12-20
Methods of Fabricating Substrates App 20120295445 - Sills; Scott ; et al.	2012-11-22
Methods of forming patterned masks Grant 8,288,083 - Zhang , et al. October 16, 2	2012-10-16
Illumination Design For Lens Heating Mitigation App 20120257177 - ZHOU; JIANMING ; et al.	2012-10-11
Epitaxial Growth Method And Devices App 20120256191 - deVilliers; Anton ; et al.	2012-10-11
Methods of fabricating substrates Grant 8,273,634 - Sills , et al. September 25, 2	2012-09-25
Methods of fabricating substrates Grant 8,247,302 - Sills , et al. August 21, 2	2012-08-21
Epitaxial growth method Grant 8,216,943 - deVilliers , et al. July 10, 2	2012-07-10
Patterning Mask And Method Of Formation Of Mask Using Step Double Patterning App 20120164566 - Devilliers; Anton ; et al.	2012-06-28
Methods Of Forming Patterned Masks App 20120115074 - Zhang; Zishu ; et al.	2012-05-10
Patterning mask and method of formation of mask using step double patterning Grant 8,153,522 - Devilliers , et al. April 10, 2	2012-04-10
Lens Heating Compensation In Photolithography App 20120038895 - He; Yuan ; et al.	2012-02-16
Epitaxial Growth Method And Devices App 20110316021 - deVilliers; Anton ; et al.	2011-12-29
Methods Of Forming A Pattern In A Material And Methods Of Forming Openings In A Material To Be Patterned App 20110305997 - DeVilliers; Anton ; et al.	2011-12-15
Methods Of Forming Contact Openings And Methods Of Increasing Contact Area In Only One Of X and Y Axes In The Fabrication Of Integrated Circuitry App 20110306206 - Kiehlbauch; Mark ; et al.	2011-12-15
Patterning Mask And Method Of Formation Of Mask Using Step Double Patterning App 20110217843 - Devilliers; Anton ; et al.	2011-09-08
Methods of Fabricating Substrates App 20100144151 - Sills; Scott ; et al.	2010-06-10
Methods of Fabricating Substrates App 20100144153 - Sills; Scott ; et al.	2010-06-10
Methods Of Forming A Masking Pattern For Integrated Circuits App 20100130016 - DeVilliers; Anton	2010-05-27
Methods Of Forming A Photoresist-Comprising Pattern On A Substrate App 20100055913 - Zhang; Zishu ; et al.	2010-03-04
Methods Of Forming Structures Supported By Semiconductor Substrates App 20090291397 - deVilliers; Anton	2009-11-26

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