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Patent applications and USPTO patent grants for Detweiler; Shangting.The latest application filed is for "by-die-exposure for patterning of holes in edge die".
Patent | Date |
---|---|
By-die-exposure for patterning of holes in edge die Grant 8,273,523 - Detweiler , et al. September 25, 2 | 2012-09-25 |
Method to reduce photoresist poisoning Grant 7,887,875 - Friedmann , et al. February 15, 2 | 2011-02-15 |
By-die-exposure For Patterning Of Holes In Edge Die App 20080160779 - Detweiler; Shangting ;   et al. | 2008-07-03 |
System and method for exposure of partial edge die Grant 7,374,866 - Atkinson , et al. May 20, 2 | 2008-05-20 |
System and method for exposure of partial edge die App 20060078828 - Atkinson; Chris D. ;   et al. | 2006-04-13 |
Method to reduce photoresist poisoning App 20040062867 - Friedmann, James B. ;   et al. | 2004-04-01 |
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