| Patent | Date |
|---|
Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes
Grant 8,293,657 - Detry October 23, 2 | 2012-10-23 |
Optical component design for silicon optical bench
Grant 8,270,100 - Detry , et al. September 18, 2 | 2012-09-18 |
Apparatus And Method For Providing Isolation Between Components In Microfabricated Devices
App 20120219760 - Detry; James F. ; et al. | 2012-08-30 |
Sacraficial Layers Made From Aerogel For Microelectromechanical Systems (mems) Device Fabriaction Processes
App 20120115269 - Detry; James F. | 2012-05-10 |
System and method for free space micro machined optical bench
Grant 8,121,487 - Detry February 21, 2 | 2012-02-21 |
Interferometric fiber optic gyroscope with silicon optical bench front-end
Grant 8,103,140 - Strandjord , et al. January 24, 2 | 2012-01-24 |
Mirror Design For Silicon Optical Bench
App 20110102894 - Detry; James F. ; et al. | 2011-05-05 |
Interferometric Fiber Optic Gyroscope With Silicon Optical Bench Front-end
App 20100301352 - Strandjord; Lee ; et al. | 2010-12-02 |
Systems and methods for micromachined cylindrical lenses
Grant 7,817,344 - Detry , et al. October 19, 2 | 2010-10-19 |
System and method for fiber based resonator coupling
Grant 7,802,928 - Strabley , et al. September 28, 2 | 2010-09-28 |
Systems And Methods For Micromachined Cylindrical Lenses
App 20100053769 - Detry; James F. ; et al. | 2010-03-04 |
Fiber Optic Gyroscope
App 20100027022 - Thorland; Rodney H. ; et al. | 2010-02-04 |
RF MEMS Switch
App 20100001355 - Peczalski; Andrzej ; et al. | 2010-01-07 |
High-q Disk Nano Resonator Device And Method Of Fabricating The Same
App 20090315644 - Sheedy; Sabrina C. ; et al. | 2009-12-24 |
Mems Device And Method Of Making Same
App 20090212386 - Ridley; Jeff A. ; et al. | 2009-08-27 |
System And Method For Free Space Micro Machined Optical Bench
App 20090196623 - Detry; James F. | 2009-08-06 |
Boron doped shell for MEMS device
Grant 7,563,720 - Detry July 21, 2 | 2009-07-21 |
System And Method For Fiber Based Resonator Coupling
App 20090175578 - Strabley; Jennifer S. ; et al. | 2009-07-09 |
Boron Doped Shell For Mems Device
App 20090026559 - Detry; James F. | 2009-01-29 |
Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
Grant 7,358,722 - Peczalski , et al. April 15, 2 | 2008-04-15 |
Integrated Three-Dimensional Magnetic Sensing Device and Method to Fabricate an Integrated Three-Dimensional Magnetic Sensing Device
App 20070035294 - Peczalski; Andrzej ; et al. | 2007-02-15 |
Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
Grant 7,126,330 - Peczalski , et al. October 24, 2 | 2006-10-24 |
Functionalized field effect transistor sensor with self checking
App 20060174683 - Bonne; Ulrich ; et al. | 2006-08-10 |
Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
App 20050270020 - Peczalski, Andrzej ; et al. | 2005-12-08 |
Equipment and process for creating a custom sloped etch in a substrate
App 20050133479 - Youngner, Dan W. ; et al. | 2005-06-23 |
MEMS frequency standard for devices such as atomic clock
Grant 6,900,702 - Youngner , et al. May 31, 2 | 2005-05-31 |
Phased VII micro fluid analyzer having a modular structure
App 20050063865 - Bonne, Ulrich ; et al. | 2005-03-24 |
MEMS frequency standard for devices such as atomic clock
App 20040084395 - Youngner, Dan W. ; et al. | 2004-05-06 |
Integrated heterostructure acoustic charge transport (HACT) and heterostructure insulated gate field effects transistor (HIGFET) devices
Grant 5,298,772 - Peczalski , et al. March 29, 1 | 1994-03-29 |
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