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Deposition tool for combinatorial thin film material libraries Grant 10,363,537 - Detavernier , et al. | 2019-07-30 |
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Atomic Layer Deposition Powder Coating App 20110200822 - Detavernier; Christophe ;   et al. | 2011-08-18 |
Enhancing Catalytic Activity Of Nanoporous Materials App 20110137093 - Martens; Johan ;   et al. | 2011-06-09 |
Self-aligned metal to form contacts to Ge containing substrates and structure formed thereby Grant 7,682,968 - Cabral, Jr. , et al. March 23, 2 | 2010-03-23 |
Metal carbide gate structure and method of fabrication Grant 7,667,278 - Cabral, Jr. , et al. February 23, 2 | 2010-02-23 |
Stabilization of Ni monosilicide thin films in CMOS devices using implantation of ions before silicidation Grant 7,517,795 - Carruthers , et al. April 14, 2 | 2009-04-14 |
STABILIZATION OF Ni MONOSILICIDE THIN FILMS IN CMOS DEVICES USING IMPLANTATION OF IONS BEFORE SILICIDATION App 20080299720 - Carruthers; Roy A. ;   et al. | 2008-12-04 |
Self-aligned metal to form contacts to Ge containing substrates and structure formed thereby Grant 7,449,782 - Cabral, Jr. , et al. November 11, 2 | 2008-11-11 |
REDUCTION OF SILICIDE FORMATION TEMPERATURE ON SiGe CONTAINING SUBSTRATES App 20080246120 - Cabral; Cyril ;   et al. | 2008-10-09 |
SELF-ALIGNED METAL TO FORM CONTACTS TO Ge CONTAINING SUBSTRATES AND STRUCTURE FORMED THEREBY App 20080227283 - Cabral; Cyril ;   et al. | 2008-09-18 |
SELF-ALIGNED METAL TO FORM CONTACTS TO Ge CONTAINING SUBSTRATES AND STRUCTURE FORMED THEREBY App 20080220606 - Cabral; Cyril ;   et al. | 2008-09-11 |
ELIMINATING METAL-RICH SILICIDES USING AN AMORPHOUS Ni ALLOY SILICIDE STRUCTURE App 20080217781 - Detavernier; Christophe ;   et al. | 2008-09-11 |
ELIMINATING METAL-RICH SILICIDES USING AN AMORPHOUS Ni ALLOY SILICIDE STRUCTURE App 20080217780 - Detavernier; Christophe ;   et al. | 2008-09-11 |
Eliminating metal-rich silicides using an amorphous Ni alloy silicide structure Grant 7,419,907 - Detavernier , et al. September 2, 2 | 2008-09-02 |
Reduction of silicide formation temperature on SiGe containing substrates Grant 7,384,868 - Cabral, Jr. , et al. June 10, 2 | 2008-06-10 |
Retarding agglomeration of Ni monosilicide using Ni alloys Grant 7,271,486 - Cabral, Jr. , et al. September 18, 2 | 2007-09-18 |
STABILIZATION OF Ni MONOSILICIDE THIN FILMS IN CMOS DEVICES USING IMPLANTATION OF IONS BEFORE SILICIDATION App 20070042586 - Carruthers; Roy A. ;   et al. | 2007-02-22 |
Eliminating metal-rich silicides using an amorphous Ni alloy silicide structure App 20070004205 - Detavernier; Christophe ;   et al. | 2007-01-04 |
Stabilization of Ni monosilicide thin films in CMOS devices using implantation of ions before silicidation Grant 7,119,012 - Carruthers , et al. October 10, 2 | 2006-10-10 |
Metal carbide gate structure and method of fabrication App 20060186490 - Cabral; Cyril JR. ;   et al. | 2006-08-24 |
Metal carbide gate structure and method of fabrication Grant 7,064,050 - Cabral, Jr. , et al. June 20, 2 | 2006-06-20 |
Stabilization of Ni monosilicide thin films in CMOS devices using implantation of ions before silicidation App 20050250319 - Carruthers, Roy A. ;   et al. | 2005-11-10 |
Self-aligned metal to form contacts to Ge containing substrates and structure formed thereby App 20050250301 - Cabral, Cyril JR. ;   et al. | 2005-11-10 |
Retarding agglomeration of Ni monosilicide using Ni alloys App 20050176247 - Cabral, Cyril JR. ;   et al. | 2005-08-11 |
Retarding agglomeration of Ni monosilicide using Ni alloys Grant 6,905,560 - Cabral, Jr. , et al. June 14, 2 | 2005-06-14 |
Metal carbide gate structure and method of fabrication App 20050116230 - Cabral, Cyril JR. ;   et al. | 2005-06-02 |
Reduction of silicide formation temperature on SiGe containing substrates App 20050059242 - Cabral, Cyril JR. ;   et al. | 2005-03-17 |
Retarding agglomeration of Ni monosilicide using Ni alloys App 20040123922 - Cabral, Cyril JR. ;   et al. | 2004-07-01 |
Method of forming polycrystalline CoSi2 salicide and products obtained thereof App 20020151170 - Maex, Karen ;   et al. | 2002-10-17 |