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Gas Storage And Dispensing Container And A Method Of Dispensing Therefrom App 20220290812 - Jones; Edward E. ;   et al. | 2022-09-15 |
Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System App 20220186358 - Byl; Oleg ;   et al. | 2022-06-16 |
Adsorbent-type Storage And Delivery Vessels With High Purity Delivery Of Gas, And Related Methods App 20220128196 - DESPRES; Joseph R. ;   et al. | 2022-04-28 |
Germanium tetraflouride and hydrogen mixtures for an ion implantation system Grant 11,299,802 - Byl , et al. April 12, 2 | 2022-04-12 |
Ion Implantation System with Mixture of Arc Chamber Materials App 20210398773 - TANG; Ying ;   et al. | 2021-12-23 |
Gas Supply Packages, Adsorbents, And Related Methods App 20210370259 - Dubois; Lawrence H. ;   et al. | 2021-12-02 |
Regulator Assembly And Test Method App 20210341106 - JONES; Edward E. ;   et al. | 2021-11-04 |
Valve system with position indicator Grant 11,143,329 - Scannell , et al. October 12, 2 | 2021-10-12 |
Ion implantation system with mixture of arc chamber materials Grant 11,139,145 - Tang , et al. October 5, 2 | 2021-10-05 |
Germanium Tetraflouride And Hydrogen Mixtures For An Ion Implantation System App 20210189550 - BYL; Oleg ;   et al. | 2021-06-24 |
Ion Implantation System With Mixture Of Arc Chamber Materials App 20210020402 - TANG; Ying ;   et al. | 2021-01-21 |
Ion implantation processes and apparatus using gallium Grant 10,892,137 - Sweeney , et al. January 12, 2 | 2021-01-12 |
Valve Assemblies And Fluid Storage And Dispensing Packages Comprising Same App 20200248873 - Kind Code | 2020-08-06 |
Adsorbents And Fluid Supply Packages And Apparatus Comprising Same App 20200206717 - Dubois; Lawrence H. ;   et al. | 2020-07-02 |
Fluorine Ion Implantation System With Non-tungsten Materials And Methods Of Using App 20200194265 - TANG; Ying ;   et al. | 2020-06-18 |
Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation Grant 10,622,192 - Yedave , et al. | 2020-04-14 |
Valve System With Position Indicator App 20200088318 - SCANNELL; Christopher ;   et al. | 2020-03-19 |
Ion Implantation Processes And Apparatus Using Gallium App 20200083015 - SWEENEY; Joseph D. ;   et al. | 2020-03-12 |
Methods And Assemblies Using Flourine Containing And Inert Gasses For Plasma Flood Gun (pfg) Operation App 20190189402 - YEDAVE; Sharad N. ;   et al. | 2019-06-20 |
Smart package Grant 10,247,363 - Sweeney , et al. | 2019-04-02 |
Anti-spike Pressure Management Of Pressure-regulated Fluid Storage And Delivery Vessels App 20180180225 - Despres; Joseph R. ;   et al. | 2018-06-28 |
Gas Cabinets App 20180149315 - DESPRES; Joseph R. ;   et al. | 2018-05-31 |
Valve Assemblies And Fluid Storage And Dispensing Packages Comprising Same App 20180119888 - ELZER; Daneil ;   et al. | 2018-05-03 |
Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels Grant 9,897,257 - Despres , et al. February 20, 2 | 2018-02-20 |
Pressure-regulated Gas Supply Vessel App 20170248275 - Despres; Joseph R. ;   et al. | 2017-08-31 |
Endpoint determination for capillary-assisted flow control Grant 9,631,778 - Sweeney , et al. April 25, 2 | 2017-04-25 |
Tpir Apparatus For Monitoring Tungsten Hexafluoride Processing To Detect Gas Phase Nucleation, And Method And System Utilizing Same App 20160281238 - Arno; Jose I. ;   et al. | 2016-09-29 |
Remote Delivery Of Chemical Reagents App 20160172164 - Sweeney; Joseph D. ;   et al. | 2016-06-16 |
TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same Grant 9,340,878 - Arno , et al. May 17, 2 | 2016-05-17 |
Endpoint Determination For Capillary-assisted Flow Control App 20150308626 - Sweeney; Joseph D. ;   et al. | 2015-10-29 |
Anti-spike Pressure Management Of Pressure-regulated Fluid Storage And Delivery Vessels App 20150247605 - Despres; Joseph R. ;   et al. | 2015-09-03 |
Endpoint determination for capillary-assisted flow control Grant 9,109,755 - Sweeney , et al. August 18, 2 | 2015-08-18 |
Ion Implanter System Including Remote Dopant Source, And Method Comprising Same App 20130251913 - Olander; W. Karl ;   et al. | 2013-09-26 |
Endpoint Determination For Capillary-assisted Flow Control App 20130125999 - Sweeney; Joseph D. ;   et al. | 2013-05-23 |
Ion Implantation Tool Cleaning Apparatus And Method App 20120111374 - Despres; Joseph R. ;   et al. | 2012-05-10 |
Tpir Apparatus For Monitoring Tungsten Hexafluoride Processing To Detect Gas Phase Nucleation, And Method And System Utilizing Same App 20120114836 - Arno; Jose I. ;   et al. | 2012-05-10 |