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Contamination Trap App 20220197158 - DERKS; Sander Catharina Reinier ;   et al. | 2022-06-23 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Temperature sensing probe, burl plate, lithographic apparatus and method Grant RE48,668 - Laurent , et al. August 3, 2 | 2021-08-03 |
Lithographic apparatus Grant 10,935,895 - Koevoets , et al. March 2, 2 | 2021-03-02 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20200371447 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-11-26 |
Lithographic apparatus and method Grant 10,775,707 - Sept | 2020-09-15 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,747,126 - Kunnen , et al. A | 2020-08-18 |
Lithographic apparatus Grant 10,747,127 - Van Der Meulen , et al. A | 2020-08-18 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Lithographic Apparatus and Method App 20200041916 - NAK BOGLU; Gunes ;   et al. | 2020-02-06 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Lithographic Apparatus App 20190369508 - KOEVOETS; Adrianus Hendrik ;   et al. | 2019-12-05 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190294056 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2019-09-26 |
Lithographic apparatus Grant 10,416,574 - Koevoets , et al. Sept | 2019-09-17 |
Lithographic Apparatus App 20190227445 - VAN DER MEULEN; Frits ;   et al. | 2019-07-25 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,324,382 - Kunnen , et al. | 2019-06-18 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180239265 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2018-08-23 |
Lithographic Apparatus App 20180173116 - KOEVOETS; Adrianus Hendrik ;   et al. | 2018-06-21 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,971,252 - Kunnen , et al. May 15, 2 | 2018-05-15 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170351187 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2017-12-07 |
Apparatus, a device and a device manufacturing method Grant 9,778,574 - Derks , et al. October 3, 2 | 2017-10-03 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,740,110 - Kunnen , et al. August 22, 2 | 2017-08-22 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170176872 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2017-06-22 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,575,419 - Kunnen , et al. February 21, 2 | 2017-02-21 |
An Apparatus, a Device and a Device Manufacturing Method App 20160282723 - DERKS; Sander Catharina Reinier ;   et al. | 2016-09-29 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method Grant 9,280,063 - Kunnen , et al. March 8, 2 | 2016-03-08 |
Support Structure, Method of Controlling the Temperature Of The Same, and Apparatuses Including the Same App 20160035605 - SCHMITZ; Roger Wilhelmus Antonius Henricus ;   et al. | 2016-02-04 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150277243 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2015-10-01 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,970,822 - Kunnen , et al. March 3, 2 | 2015-03-03 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20130094005 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2013-04-18 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Substrate Table Assembly, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20130038854 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2013-02-14 |
Temperature Sensing Probe, Burl Plate, Lithographic Apparatus And Method App 20120307216 - LAURENT; Thibault Simon Mathieu ;   et al. | 2012-12-06 |