Dengel; Guenther

Patent Applications and Registrations

Patent applications and USPTO patent grants for Dengel; Guenther.The latest application filed is for "blocking element for protecting optical elements in projection exposure apparatuses".

Company Profile

0.10.12

Dengel; Guenther - Heidenheim DE
Dengel; Guenther - Heidenheim an der Brenz DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Blocking element for protecting optical elements in projection exposure apparatuses Grant 9,684,243 - Hartjes , et al. June 20, 2	2017-06-20
Method and cooling system for cooling an optical element for EUV applications Grant 9,671,584 - Dengel , et al. June 6, 2	2017-06-06
Blocking Element For Protecting Optical Elements In Projection Exposure Apparatuses App 20150177626 - HARTJES; Joachim ; et al.	2015-06-25
Optical arrangement, in particular in a projection exposure apparatus for EUV lithography Grant 9,041,905 - Ehm , et al. May 26, 2	2015-05-26
Method And Cooling System For Cooling An Optical Element For Euv Applications App 20150103426 - Dengel; Guenther ; et al.	2015-04-16
Mirror with a mirror carrier and projection exposure apparatus Grant 8,831,170 - Wevers , et al. September 9, 2	2014-09-09
Microlithography illumination systems, components and methods Grant 8,643,825 - Warm , et al. February 4, 2	2014-02-04
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20130100426 - Warm; Berndt ; et al.	2013-04-25
Optical Arrangement, In Particular In A Projection Exposure Apparatus For Euv Lithography App 20120224153 - EHM; Dirk Heinrich ; et al.	2012-09-06
Microlithography Illumination Systems, Components And Methods App 20110255067 - Warm; Berndt ; et al.	2011-10-20
Illumination Optics For Euv Microlithography App 20110235015 - Dengel; Guenther ; et al.	2011-09-29
Microlithography illumination systems, components and methods Grant 7,990,520 - Warm , et al. August 2, 2	2011-08-02
Illumination optics for projection microlithography Grant 7,858,957 - Warm , et al. December 28, 2	2010-12-28
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20100007866 - Warm; Berndt ; et al.	2010-01-14
Apparatus for the manipulation and/or adjustment of an optical element App 20090002670 - Melzer; Frank ; et al.	2009-01-01
Facet mirror comprising a multiplicity of mirror segments App 20080266686 - Dengel; Guenther	2008-10-30
Microlithography Illumination Systems, Components And Methods App 20080212059 - Warm; Berndt ; et al.	2008-09-04
Mirror With A Mirror Carrier And Projection Exposure Apparatus App 20080144202 - Wevers; Rutger ; et al.	2008-06-19
Illumination Optics For Projection Microlithography App 20080123807 - Warm; Berndt ; et al.	2008-05-29

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