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Patent applications and USPTO patent grants for Den; Shoji.The latest application filed is for "radical generator and molecular beam epitaxy apparatus".
Patent | Date |
---|---|
Radical generator and molecular beam epitaxy apparatus Grant 10,577,719 - Hori , et al. | 2020-03-03 |
Radical Generator And Molecular Beam Epitaxy Apparatus App 20160355946 - HORI; Masaru ;   et al. | 2016-12-08 |
Radical generator and molecular beam epitaxy apparatus Grant 9,447,518 - Hori , et al. September 20, 2 | 2016-09-20 |
Radical Generator And Molecular Beam Epitaxy Apparatus App 20130220223 - Hori; Masaru ;   et al. | 2013-08-29 |
Light source Grant 8,310,673 - Hori , et al. November 13, 2 | 2012-11-13 |
Particle density measuring probe and particle density measuring equipment Grant 7,782,463 - Hori , et al. August 24, 2 | 2010-08-24 |
Light Source App 20100201978 - Hori; Masaru ;   et al. | 2010-08-12 |
Plasma source and plasma processing apparatus Grant 7,632,379 - Goto , et al. December 15, 2 | 2009-12-15 |
Particle density measuring probe and particle density measuring equipment App 20090237667 - Hori; Masanu ;   et al. | 2009-09-24 |
Plasma Generator App 20080029030 - Goto; Toshio ;   et al. | 2008-02-07 |
Surface treating method and surface-treating apparatus App 20070034601 - Goto; Toshio ;   et al. | 2007-02-15 |
Plasma source and plasma processing apparatus App 20070017636 - Goto; Toshio ;   et al. | 2007-01-25 |
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