DEN BOEF; Arie Jeffrey Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for DEN BOEF; Arie Jeffrey Maria.The latest application filed is for "method and apparatus for angular-resolved spectroscopic lithography characterization".

Company Profile

2.15.10

DEN BOEF; Arie Jeffrey Maria - Waalre NL
Den Boef; Arie Jeffrey Maria - Waaire N/A NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20190170657 - DEN BOEF; Arie Jeffrey Maria ; et al.	2019-06-06
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,241,055 - Den Boef , et al.	2019-03-26
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2	2017-01-10
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2	2015-10-06
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2	2015-07-14
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140233025 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-08-21
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140055788 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-02-27
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,553,230 - Den Boef , et al. October 8, 2	2013-10-08
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2	2013-07-09
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ; et al.	2012-11-01
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20120038929 - Den Boef; Arie Jeffrey Maria ; et al.	2012-02-16
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ; et al.	2011-11-24
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ; et al.	2011-11-17
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,054,467 - Den Boef , et al. November 8, 2	2011-11-08
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Grant 7,961,309 - Plug , et al. June 14, 2	2011-06-14
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20110007314 - Den Boef; Arie Jeffrey Maria ; et al.	2011-01-13
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ; et al.	2011-01-13
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,732 - Den Boef , et al. September 7, 2	2010-09-07
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2	2007-05-08
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ; et al.	2005-12-01

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