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Patent applications and USPTO patent grants for Demmel; James.The latest application filed is for "integrated mems metrology device using complementary measuring combs".
Patent | Date |
---|---|
Integrated MEMS metrology device using complementary measuring combs Grant 8,079,246 - Garmire , et al. December 20, 2 | 2011-12-20 |
Integrated Mems Metrology Device Using Complementary Measuring Combs App 20090322365 - Garmire; David ;   et al. | 2009-12-31 |
Method for fabricating vertically-offset interdigitated comb actuator device Grant 7,573,022 - Choo , et al. August 11, 2 | 2009-08-11 |
CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications App 20070026614 - Choo; Hyuck ;   et al. | 2007-02-01 |
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