| Patent | Date |
|---|
Protection Of Optical Materials Of Optical Components From Radiation Degradation
App 20220066071 - Butaeva; Evgeniia ; et al. | 2022-03-03 |
System and method for protecting optics from vacuum ultraviolet light
Grant 11,262,664 - Derstine , et al. March 1, 2 | 2022-03-01 |
Fluorine-doped Optical Materials For Optical Components
App 20220049345 - Delgado; Gildardo ; et al. | 2022-02-17 |
Material Recovery Systems For Optical Components
App 20220044905 - Delgado; Gildardo ; et al. | 2022-02-10 |
System And Method For Protecting Optics From Vacuum Ultraviolet Light
App 20210149315 - Derstine; Matthew ; et al. | 2021-05-20 |
Ionic Liquids as Lubricants in Optical Systems
App 20210132506 - Marks; Zefram ; et al. | 2021-05-06 |
System and method for cleaning optical surfaces of an extreme ultraviolet optical system
Grant 10,953,441 - Delgado , et al. March 23, 2 | 2021-03-23 |
System and method for photocathode illumination inspection
Grant 10,840,055 - Delgado , et al. November 17, 2 | 2020-11-17 |
Neutral atom imaging system
Grant 10,714,307 - Bezel , et al. | 2020-07-14 |
System and method for providing a clean environment in an electron-optical system
Grant 10,692,692 - Schultz , et al. | 2020-06-23 |
Neutral Atom Imaging System
App 20190378684 - Bezel; Ilya ; et al. | 2019-12-12 |
Back-illuminated sensor with boron layer
Grant 10,446,696 - Chern , et al. Oc | 2019-10-15 |
System and Method for Photocathode Illumination Inspection
App 20190295804 - Delgado; Gildardo ; et al. | 2019-09-26 |
Back-illuminated Sensor With Boron Layer
App 20190131465 - Chern; Jehn-Huar ; et al. | 2019-05-02 |
Back-illuminated sensor with boron layer
Grant 10,121,914 - Chern , et al. November 6, 2 | 2018-11-06 |
System and method for rejuvenating an imaging sensor degraded by exposure to extreme ultraviolet or deep ultraviolet light
Grant 10,096,478 - Delgado , et al. October 9, 2 | 2018-10-09 |
Back-Illuminated Sensor With Boron Layer
App 20180047857 - Chern; Jehn-Huar ; et al. | 2018-02-15 |
Method and system for gas flow mitigation of molecular contamination of optics
Grant 9,874,512 - Delgado , et al. January 23, 2 | 2018-01-23 |
Method and system for imaging of a photomask through a pellicle
Grant 9,842,724 - Schultz , et al. December 12, 2 | 2017-12-12 |
Back-illuminated sensor with boron layer
Grant 9,818,887 - Chern , et al. November 14, 2 | 2017-11-14 |
System and method for cleaning EUV optical elements
Grant 9,810,991 - Chilese , et al. November 7, 2 | 2017-11-07 |
Apparatus and method for cross-flow purge for optical components in a chamber
Grant 9,662,688 - Rose , et al. May 30, 2 | 2017-05-30 |
System and Method for Providing a Clean Environment in an Electron-Optical System
App 20160358741 - Schultz; William G. ; et al. | 2016-12-08 |
Back-illuminated sensor with boron layer
Grant 9,496,425 - Chern , et al. November 15, 2 | 2016-11-15 |
Back-Illuminated Sensor With Boron Layer
App 20160290932 - Chern; Jehn-Huar ; et al. | 2016-10-06 |
Method and System for Imaging of a Photomask Through a Pellicle
App 20160225582 - Schultz; William G. ; et al. | 2016-08-04 |
Open Plasma Lamp for Forming a Light-Sustained Plasma
App 20160163516 - Wilson; Lauren ; et al. | 2016-06-09 |
Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation
Grant 9,335,637 - Delgado , et al. May 10, 2 | 2016-05-10 |
Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection
Grant 9,335,279 - Delgado May 10, 2 | 2016-05-10 |
Open plasma lamp for forming a light-sustained plasma
Grant 9,263,238 - Wilson , et al. February 16, 2 | 2016-02-16 |
Protective fluorine-doped silicon oxide film for optical components
Grant 9,188,544 - Delgado November 17, 2 | 2015-11-17 |
Open Plasma Lamp for Forming a Light-Sustained Plasma
App 20150279628 - Wilson; Lauren ; et al. | 2015-10-01 |
System and Method for Cleaning EUV Optical Elements
App 20150253675 - Chilese; Frank ; et al. | 2015-09-10 |
Method And System For Gas Flow Mitigation Of Molecular Contamination Of Optics
App 20140362366 - Delgado; Gildardo ; et al. | 2014-12-11 |
System and Method for Cleaning Optical Surfaces of an Extreme Ultraviolet Optical System
App 20140261568 - Delgado; Gildardo ; et al. | 2014-09-18 |
Apparatus for purifying a controlled-pressure environment
Grant 8,790,603 - Zhuang , et al. July 29, 2 | 2014-07-29 |
Apparatus And Method For Multiplexed Multiple Discharge Plasma Produced Sources
App 20140197733 - Delgado; Gildardo | 2014-07-17 |
Carbon As Grazing Incidence Euv Mirror And Spectral Purity Filter
App 20140168758 - Rose; Garry ; et al. | 2014-06-19 |
Optical Component With Blocking Surface And Method Thereof
App 20140158914 - Klebanoff; Leonard E. ; et al. | 2014-06-12 |
Apparatus And Method For Cross-flow Purge For Optical Components In A Chamber
App 20140007910 - Rose; Garry ; et al. | 2014-01-09 |
Apparatus For Purifying A Controlled-pressure Environment
App 20140004025 - Zhuang; Guorong V. ; et al. | 2014-01-02 |
System and Method for Rejuvenating an Imaging Sensor Degraded by Exposure to Extreme Ultraviolet or Deep Ultraviolet Light
App 20130295695 - Delgado; Gildardo ; et al. | 2013-11-07 |
Smart Memory Alloys For An Extreme Ultra-violet (euv) Reticle Inspection Tool
App 20130270461 - Delgado; Gildardo ; et al. | 2013-10-17 |
Indexing Optics For An Actinic Extreme Ultra-violet (euv) Reticle Inspection Tool
App 20130271827 - Delgado; Gildardo ; et al. | 2013-10-17 |
Back-Illuminated Sensor With Boron Layer
App 20130264481 - Chern; Jehn-Huar ; et al. | 2013-10-10 |
Protective Fluorine-Doped Silicon Oxide Film For Optical Components
App 20130265572 - Delgado; Gildardo | 2013-10-10 |
System And Method For Cleaning Surfaces And Components Of Mask And Wafer Inspection Systems Based On The Positive Column Of A Glow Discharge Plasma
App 20130255717 - Rose; Garry ; et al. | 2013-10-03 |
System and Method for Particle Control Near A Reticle
App 20130235357 - Delgado; Gildardo ; et al. | 2013-09-12 |
Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping
Grant 8,414,688 - Delgado , et al. April 9, 2 | 2013-04-09 |
Laser-produced Plasma Euv Source With Reduced Debris Generation
App 20130063803 - Delgado; Gildardo ; et al. | 2013-03-14 |
Pre And Post Cleaning Of Mask, Wafer, Optical Surfaces For Prevention Of Contamination Prior To And After Inspection
App 20120274924 - Delgado; Gildardo | 2012-11-01 |
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