Del Puerto; Santiago E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Del Puerto; Santiago E..The latest application filed is for "lithographic apparatus and method".

Company Profile

0.26.19

Del Puerto; Santiago E. - Milton NY US
Del Puerto; Santiago E - Milton NY
del Puerto; Santiago E. - Wappingers Falls

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pneumatic bearing with bonded polymer film wear surface and production method thereof Grant 10,267,360 - Pariza , et al.	2019-04-23
Lithographic apparatus and method Grant 10,001,713 - Del Puerto , et al. June 19, 2	2018-06-19
Determining position and curvature information directly from a surface of a patterning device Grant 9,377,700 - Schuster , et al. June 28, 2	2016-06-28
Reticle support that reduces reticle slippage Grant 9,229,341 - Del Puerto , et al. January 5, 2	2016-01-05
Lithographic Apparatus and Method App 20150370180 - DEL PUERTO; Santiago E. ; et al.	2015-12-24
Determining Position And Curvature Information Directly From A Surface Of A Patterning Device App 20140307246 - Schuster; Mark Josef ; et al.	2014-10-16
Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing method Grant 8,625,070 - Farnsworth , et al. January 7, 2	2014-01-07
Optically compensated unidirectional reticle bender Grant 8,553,207 - Del Puerto October 8, 2	2013-10-08
Pneumatic Bearing with Bonded Polymer Film Wear Surface and Production Method thereof App 20130108203 - Pariza; Dragos ; et al.	2013-05-02
Compensation techniques for fluid and magnetic bearings Grant 7,894,140 - Wiener , et al. February 22, 2	2011-02-22
Reticle Support that Reduces Reticle Slippage App 20100195081 - DEL PUERTO; Santiago E. ; et al.	2010-08-05
Optically Compensated Unidirectional Reticle Bender App 20100167189 - DEL PUERTO; Santiago E.	2010-07-01
Resonant scanning mirror Grant 7,697,115 - del Puerto April 13, 2	2010-04-13
Lithographic Apparatus, Projection System And Damper for Use in a Lithographic Apparatus and Device Manufacturing Method App 20090180091 - FARNSWORTH; Windy Lynn ; et al.	2009-07-16
Compensation Techniques for Fluid and Magnetic Bearings App 20080151386 - Wiener; Roberto B. ; et al.	2008-06-26
Compensation techniques for fluid and magnetic bearings App 20080111977 - del Puerto; Santiago E. ; et al.	2008-05-15
Wafer handling method for use in lithography patterning Grant 7,298,459 - del Puerto , et al. November 20, 2	2007-11-20
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator Grant 7,290,931 - Wardman , et al. November 6, 2	2007-11-06
System and method for reticle protection and transport Grant 7,249,925 - del Puerto , et al. July 31, 2	2007-07-31
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator App 20070014494 - Wardman; Geoffrey B. ; et al.	2007-01-18
System and method for reticle protection and transport App 20060078407 - del Puerto; Santiago E. ; et al.	2006-04-13
System and method of measuring thermal expansion Grant 7,025,498 - del Puerto April 11, 2	2006-04-11
Bearing arrangement for reaction mass in a controlled environment Grant 7,009,685 - del Puerto March 7, 2	2006-03-07
Foam core chuck for the scanning stage of a lithography system Grant 7,009,359 - del Puerto March 7, 2	2006-03-07
System and method for reticle protection and transport Grant 6,991,416 - del Puerto , et al. January 31, 2	2006-01-31
Wafer handling method for use in lithography patterning App 20050264791 - del Puerto, Santiago E. ; et al.	2005-12-01
Bearing arrangement for reaction mass in a controlled environment App 20050248742 - del Puerto, Santiago E.	2005-11-10
Bearing arrangement for reaction mass in a controlled environment Grant 6,947,125 - del Puerto September 20, 2	2005-09-20
Wafer handling method for use in lithography patterning Grant 6,927,842 - del Puerto , et al. August 9, 2	2005-08-09
Bearing arrangement for reaction mass in a controlled environment App 20050046820 - del Puerto, Santiago E.	2005-03-03
Foam core chuck for the scanning stage of a lithography system App 20050029981 - del Puerto, Santiago E.	2005-02-10
Wafer handling method for use in lithography patterning App 20040257554 - del Puerto, Santiago E. ; et al.	2004-12-23
Stage with thermal expansion compensation App 20040240513 - del Puerto, Santiago E.	2004-12-02
Wafer handling system for use in lithography patterning Grant 6,778,258 - del Puerto , et al. August 17, 2	2004-08-17
Wafer handling system and method for use in lithography patterning App 20030082466 - del Puerto, Santiago E. ; et al.	2003-05-01
System and method for reticle protection and transport App 20030082030 - del Puerto, Santiago E. ; et al.	2003-05-01
Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography Grant 6,369,874 - del Puerto April 9, 2	2002-04-09
Liquid film interface cooling chuck for semiconductor wafer processing Grant 5,186,238 - del Puerto , et al. February 16, 1	1993-02-16
Liquid film interface cooling system for semiconductor wafer processing Grant 5,088,006 - del Puerto , et al. February 11, 1	1992-02-11
Dry interface thermal chuck temperature control system for semiconductor wafer testing Grant 5,001,423 - Abrami , et al. March 19, 1	1991-03-19

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