| Patent | Date |
|---|
Mems-based Photoacoustic Cell
App 20220299427 - Dehe; Alfons ; et al. | 2022-09-22 |
System and method for a MEMS device
Grant 11,387,747 - Tumpold , et al. July 12, 2 | 2022-07-12 |
Apparatus And Method For In-situ Calibration Of A Photoacoustic Sensor
App 20220155261 - Kolb; Stefan ; et al. | 2022-05-19 |
Support structure and method of forming a support structure
Grant 11,292,097 - Dehe , et al. April 5, 2 | 2022-04-05 |
Apparatus and method for in-situ calibration of a photoacoustic sensor
Grant 11,275,059 - Kolb , et al. March 15, 2 | 2022-03-15 |
Low profile transducer module
Grant 11,267,698 - Theuss , et al. March 8, 2 | 2022-03-08 |
Modulation Of A Movable Ir Emitter Through A Diaphragm Structure
App 20220057320 - Dehe; Alfons ; et al. | 2022-02-24 |
Modeling The Emission Intensity Of An Ir Emitter By Varying The Emission Surface
App 20220042852 - Dehe; Alfons ; et al. | 2022-02-10 |
Sensor element, particle sensor device and method for detecting a particulate matter density
Grant 11,237,090 - Schneider , et al. February 1, 2 | 2022-02-01 |
System and method for a transducer in an EWLB package
Grant 11,211,298 - Pindl , et al. December 28, 2 | 2021-12-28 |
Double-membrane MEMS component and production method for a double-membrane MEMS component
Grant 11,161,735 - Strasser , et al. November 2, 2 | 2021-11-02 |
MEMS-Sensor
App 20210323813 - Lorenz; Gunar ; et al. | 2021-10-21 |
Wafer Arrangement For Gas Sensor
App 20210285866 - KOLB; Stefan ; et al. | 2021-09-16 |
MEMS-sensor
Grant 11,117,798 - Lorenz , et al. September 14, 2 | 2021-09-14 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 11,115,755 - Dehe , et al. September 7, 2 | 2021-09-07 |
Wafer arrangement for gas sensor
Grant 11,092,538 - Kolb , et al. August 17, 2 | 2021-08-17 |
Photoacoustic gas sensor
Grant 11,067,542 - Dehe , et al. July 20, 2 | 2021-07-20 |
MEMS component and production method for a MEMS component
Grant 11,053,117 - Fueldner , et al. July 6, 2 | 2021-07-06 |
Microelectromechanical transducer
Grant 10,926,999 - Bretthauer , et al. February 23, 2 | 2021-02-23 |
Membrane components and method for forming a membrane component
Grant 10,927,002 - Dehe February 23, 2 | 2021-02-23 |
Thin MEMS Pump
App 20210040942 - Seidl; Martin ; et al. | 2021-02-11 |
Method for sealing an access opening to a cavity and MEMS component comprising a sealing element
Grant 10,913,656 - Metzger-Brueckl , et al. February 9, 2 | 2021-02-09 |
Device for detecting acoustic waves
Grant 10,880,629 - Dehe , et al. December 29, 2 | 2020-12-29 |
Wafer Arrangement For Gas Sensor
App 20200355602 - KOLB; Stefan ; et al. | 2020-11-12 |
Fluid sensor and method for providing same
Grant 10,830,691 - Glacer , et al. November 10, 2 | 2020-11-10 |
MEMS device and method of manufacturing a MEMS device
Grant 10,829,368 - Dehe , et al. November 10, 2 | 2020-11-10 |
Apparatus For Analysing The Particulate Matter Content Of An Aerosol
App 20200340904 - DEHE; Alfons ; et al. | 2020-10-29 |
Sensor Element, Particle Sensor Device And Method For Detecting A Particulate Matter Density
App 20200309665 - Schneider; Michael ; et al. | 2020-10-01 |
MEMS device
Grant 10,779,101 - Dehe , et al. Sept | 2020-09-15 |
Apparatus for analysing the particulate matter content of an aerosol
Grant 10,761,005 - Dehe , et al. Sep | 2020-09-01 |
Wafer arrangement
Grant 10,753,858 - Kolb , et al. A | 2020-08-25 |
MEMS sensors, methods for providing same and method for operating a MEMS sensor
Grant 10,737,935 - Dehe , et al. A | 2020-08-11 |
Double-membrane MEMS Component and Production Method for a Double-membrane MEMS Component
App 20200239302 - Strasser; Johann ; et al. | 2020-07-30 |
MEMS Device
App 20200236485 - Dehe; Alfons ; et al. | 2020-07-23 |
System and method for an optical MEMS transducer
Grant 10,715,930 - Bartl , et al. | 2020-07-14 |
Mems Component And Production Method For A Mems Component
App 20200216309 - Fueldner; Marc ; et al. | 2020-07-09 |
MEMS component and production method for a MEMS component
Grant 10,689,250 - Fueldner , et al. | 2020-06-23 |
Acoustic wave sensor
Grant 10,684,163 - Dehe , et al. | 2020-06-16 |
MEMS component and production method for a MEMS component
Grant 10,676,346 - Walther , et al. | 2020-06-09 |
Double-membrane MEMS component and production method for a double-membrane MEMS component
Grant 10,669,151 - Strasser , et al. | 2020-06-02 |
Sound Transducer Structure And Method For Manufacturing A Sound Transducer Structure
App 20200169819 - Dehe; Alfons ; et al. | 2020-05-28 |
MEMS sensors, methods for providing same and method for measuring a fluid constituent
Grant 10,641,626 - Bretthauer , et al. | 2020-05-05 |
Microelectromechanical transducer
Grant 10,626,007 - Bretthauer , et al. | 2020-04-21 |
Apparatus And Method For In-situ Calibration Of A Photoacoustic Sensor
App 20200103376 - KOLB; Stefan ; et al. | 2020-04-02 |
MEMS device
Grant 10,602,290 - Dehe , et al. | 2020-03-24 |
MEMS microphone
Grant 10,589,990 - Dehe , et al. | 2020-03-17 |
Photoacoustic Gas Sensor
App 20200080972 - Dehe; Alfons ; et al. | 2020-03-12 |
Diaphragm element arrangement and related method
Grant 10,582,304 - Dehe , et al. | 2020-03-03 |
Capacitive MEMS device, capacitive MEMS sound transducer, method for forming a capacitive MEMS device, and method for operating a capacitive MEMS device
Grant 10,582,306 - Dehe | 2020-03-03 |
Microelectromechanical microphone
Grant 10,575,101 - Walther , et al. Feb | 2020-02-25 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 10,567,886 - Dehe , et al. Feb | 2020-02-18 |
System And Method For A Transducer In An Ewlb Package
App 20200051824 - Pindl; Stephan ; et al. | 2020-02-13 |
Microelectromechanical microphone
Grant 10,560,771 - Dehe , et al. Feb | 2020-02-11 |
System and method for a transducer in an eWLB package
Grant 10,546,752 - Pindl , et al. Ja | 2020-01-28 |
Apparatus and method for in-situ calibration of a photoacoustic sensor
Grant 10,527,589 - Kolb , et al. J | 2020-01-07 |
Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
Grant 10,516,943 - Dorfmeister , et al. Dec | 2019-12-24 |
Field emission devices and methods of making thereof
Grant 10,504,772 - Dehe , et al. Dec | 2019-12-10 |
Microelectromechanical Transducer
App 20190367355 - Bretthauer; Christian ; et al. | 2019-12-05 |
Photoacoustic gas sensor device and a method for analyzing gas
Grant 10,495,612 - Dehe , et al. De | 2019-12-03 |
Gas analyzer including a radiation source comprising a black-body radiator with at least one through-hole and a collimator
Grant 10,466,174 - Glacer , et al. No | 2019-11-05 |
Fluid Sensor And Method For Providing Same
App 20190331531 - Glacer; Christoph ; et al. | 2019-10-31 |
MEMS Device and Method of Manufacturing a MEMS Device
App 20190330057 - Dehe; Alfons ; et al. | 2019-10-31 |
Microelectromechanical loudspeaker
Grant 10,462,580 - Dehe , et al. Oc | 2019-10-29 |
Wafer Arrangement
App 20190323947 - Kolb; Stefan ; et al. | 2019-10-24 |
Acoustic wave detector
Grant 10,451,589 - Tumpold , et al. Oc | 2019-10-22 |
Sensitivity compensation for capacitive MEMS device
Grant 10,433,070 - Dehe , et al. O | 2019-10-01 |
Semiconductor Devices Having a Membrane Layer with Smooth Stress-Relieving Corrugations and Methods of Fabrication Thereof
App 20190297441 - Dehe; Alfons ; et al. | 2019-09-26 |
Sensitivity Compensation for Capacitive MEMS Device
App 20190273993 - Dehe; Alfons ; et al. | 2019-09-05 |
MEMS-Sensor
App 20190270639 - Lorenz; Gunar ; et al. | 2019-09-05 |
Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof
Grant 10,405,118 - Dehe , et al. Sep | 2019-09-03 |
Gas analysis apparatus
Grant 10,393,658 - Dehe , et al. A | 2019-08-27 |
Microelectromechanical microphone
Grant 10,397,709 - Dehe A | 2019-08-27 |
Dynamic pressure sensor
Grant 10,393,606 - Wiesbauer , et al. A | 2019-08-27 |
Support Structure And Method Of Forming A Support Structure
App 20190255669 - Dehe; Alfons ; et al. | 2019-08-22 |
Membrane Components and Method for Forming a Membrane Component
App 20190256351 - Dehe; Alfons | 2019-08-22 |
MEMS device and method of manufacturing a MEMS device
Grant 10,384,934 - Dehe , et al. A | 2019-08-20 |
Microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device
Grant 10,370,242 - Dehe , et al. | 2019-08-06 |
System and method for a variable flow transducer
Grant 10,367,430 - Tumpold , et al. July 30, 2 | 2019-07-30 |
Gas sensor
Grant 10,365,208 - Kolb , et al. July 30, 2 | 2019-07-30 |
Gas analyzer
Grant 10,352,910 - Glacer , et al. July 16, 2 | 2019-07-16 |
Membrane components and method for forming a membrane component
Grant 10,336,607 - Dehe | 2019-07-02 |
Comb MEMS Device and Method of Making a Comb MEMS Device
App 20190185315 - Dehe; Alfons | 2019-06-20 |
Support structure and method of forming a support structure
Grant 10,322,481 - Dehe , et al. | 2019-06-18 |
System and Method for a MEMS Device
App 20190181776 - Tumpold; David ; et al. | 2019-06-13 |
Photoacoustic gas detector
Grant 10,302,599 - Tumpold , et al. | 2019-05-28 |
Acoustic wave detector
Grant 10,302,554 - Tumpold , et al. | 2019-05-28 |
System and Method for a Transducer in an eWLB Package
App 20190148253 - Pindl; Stephan ; et al. | 2019-05-16 |
Diaphragm Element Arrangement And Related Method
App 20190149926 - Dehe; Alfons ; et al. | 2019-05-16 |
Device For Detecting Acoustic Waves
App 20190132661 - Dehe; Alfons ; et al. | 2019-05-02 |
Method For Sealing An Access Opening To A Cavity And Mems Component Comprising A Sealing Element
App 20190112182 - Metzger-Brueckl; Gerhard ; et al. | 2019-04-18 |
Plate, transducer and methods for making and operating a transducer
Grant 10,263,542 - Dehe | 2019-04-16 |
Comb MEMS device and method of making a comb MEMS device
Grant 10,259,701 - Dehe | 2019-04-16 |
MEMS Device
App 20190098424 - Dehe; Alfons ; et al. | 2019-03-28 |
Mems Component And Production Method For A Mems Component
App 20190092624 - Walther; Arnaud ; et al. | 2019-03-28 |
Photo-acoustic gas sensor module having light emitter and detector units
Grant 10,241,088 - Theuss , et al. | 2019-03-26 |
MEMS Microphone
App 20190084827 - Dehe; Alfons ; et al. | 2019-03-21 |
Micromechanical digital loudspeaker
Grant 10,237,670 - Dehe | 2019-03-19 |
Sound transducer with housing and MEMS structure
Grant 10,231,061 - Dehe , et al. | 2019-03-12 |
Double-membrane Mems Component And Production Method For A Double-membrane Mems Component
App 20190071305 - Strasser; Johann ; et al. | 2019-03-07 |
Mems Sensors, Methods For Providing Same And Method For Measuring A Fluid Constituent
App 20190063968 - Bretthauer; Christian ; et al. | 2019-02-28 |
Microelectromechanical Microphone
App 20190058936 - Dehe; Alfons ; et al. | 2019-02-21 |
Mems Sensors, Methods For Providing Same And Method For Operating A Mems Sensor
App 20190039884 - Dehe; Alfons ; et al. | 2019-02-07 |
Low Profile Transducer Module
App 20190039882 - Theuss; Horst ; et al. | 2019-02-07 |
System And Method For A Reference Chamber With A Housing And A Deflectable Structure
App 20190041363 - Tumpold; David ; et al. | 2019-02-07 |
MEMS device and MEMS vacuum microphone
Grant 10,189,699 - Walther , et al. Ja | 2019-01-29 |
Device for detecting acoustic waves
Grant 10,194,226 - Dehe , et al. Ja | 2019-01-29 |
Mems Component And Production Method For A Mems Component
App 20190023562 - Fueldner; Marc ; et al. | 2019-01-24 |
System and method for a transducer in an eWLB package
Grant 10,186,468 - Pindl , et al. Ja | 2019-01-22 |
Microelectromechanical Transducer
App 20190016588 - Bretthauer; Christian ; et al. | 2019-01-17 |
MEMS device
Grant 10,171,925 - Dehe , et al. J | 2019-01-01 |
Low profile transducer module
Grant 10,138,115 - Theuss , et al. Nov | 2018-11-27 |
MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone
Grant 10,129,676 - Walther , et al. November 13, 2 | 2018-11-13 |
Sound Transducer With Housing And Mems Structure
App 20180317021 - Dehe; Alfons ; et al. | 2018-11-01 |
System and method for a microfabricated fracture test structure
Grant 10,109,536 - Glacer , et al. October 23, 2 | 2018-10-23 |
System and method for a perpendicular electrode transducer
Grant 10,104,478 - Glacer , et al. October 16, 2 | 2018-10-16 |
Microelectromechanical Loudspeaker
App 20180279055 - Dehe; Alfons ; et al. | 2018-09-27 |
Capacitive MEMS Device, Capacitive MEMS Sound Transducer, Method for Forming a Capacitive MEMS Device, and Method for Operating a Capacitive MEMS Device
App 20180255402 - Dehe; Alfons | 2018-09-06 |
System and Method for an Optical MEMS Transducer
App 20180249258 - Bartl; Ulf ; et al. | 2018-08-30 |
Microelectromechanical Microphone
App 20180234774 - Walther; Arnaud ; et al. | 2018-08-16 |
Membrane Components And Method For Forming A Membrane Component
App 20180222749 - Dehe; Alfons | 2018-08-09 |
Microelectromechanical Microphone
App 20180213334 - DEHE; Alfons | 2018-07-26 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 10,034,100 - Dehe , et al. July 24, 2 | 2018-07-24 |
MEMS Device and Method of Manufacturing a MEMS Device
App 20180201504 - Dehe; Alfons ; et al. | 2018-07-19 |
System and method for a MEMS transducer
Grant 10,017,379 - Rajaraman , et al. July 10, 2 | 2018-07-10 |
Gas Analysis Apparatus
App 20180188172 - DEHE; Alfons ; et al. | 2018-07-05 |
Gas Analyzer
App 20180164215 - Glacer; Christoph ; et al. | 2018-06-14 |
Apparatus For Analysing The Particulate Matter Content Of An Aerosol
App 20180156706 - Dehe; Alfons ; et al. | 2018-06-07 |
MEMS microphone with low pressure region between diaphragm and counter electrode
Grant 9,986,344 - Dehe , et al. May 29, 2 | 2018-05-29 |
Chip package and a method of producing the same
Grant 9,981,843 - Maier , et al. May 29, 2 | 2018-05-29 |
System and method for an optical MEMS transducer
Grant 9,973,860 - Bartl , et al. May 15, 2 | 2018-05-15 |
System and method for an integrated transducer and temperature sensor
Grant 9,967,679 - Krumbein , et al. May 8, 2 | 2018-05-08 |
Photoacoustic Gas Detector
App 20180120266 - TUMPOLD; David ; et al. | 2018-05-03 |
Plate, Transducer and Methods for Making and Operating a Transducer
App 20180109206 - Dehe; Alfons | 2018-04-19 |
MEMS Device and MEMS Vacuum Microphone
App 20180099867 - Walther; Arnaud ; et al. | 2018-04-12 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure
App 20180103325 - Dehe; Alfons ; et al. | 2018-04-12 |
MEMS device and method of manufacturing a MEMS device
Grant 9,938,140 - Dehe , et al. April 10, 2 | 2018-04-10 |
System and method for a comb-drive MEMS device
Grant 9,938,133 - Kautzsch , et al. April 10, 2 | 2018-04-10 |
Gas Analyzer
App 20180059066 - GLACER; Christoph ; et al. | 2018-03-01 |
Method for forming a microelectromechanical device
Grant 9,902,612 - Dehe , et al. February 27, 2 | 2018-02-27 |
Acoustic Wave Sensor
App 20180052042 - Dehe; Alfons ; et al. | 2018-02-22 |
Microelectromechanical Device, A Microelectromechanical System, And A Method Of Manufacturing A Microelectromechanical Device
App 20180029878 - Dehe; Alfons ; et al. | 2018-02-01 |
Plate, transducer and methods for making and operating a transducer
Grant 9,876,446 - Dehe January 23, 2 | 2018-01-23 |
Microelectromechanical system and a method of manufacturing a microelectromechanical system
Grant 9,856,134 - Dehe January 2, 2 | 2018-01-02 |
Field Emission Devices and Methods of Making Thereof
App 20170365507 - Dehe; Alfons ; et al. | 2017-12-21 |
Acoustic Wave Detector
App 20170350810 - TUMPOLD; David ; et al. | 2017-12-07 |
Acoustic Wave Detector
App 20170350868 - TUMPOLD; David ; et al. | 2017-12-07 |
MEMS device and MEMS vacuum microphone
Grant 9,828,237 - Walther , et al. November 28, 2 | 2017-11-28 |
Single diaphragm transducer structure
Grant 9,816,881 - Dehe , et al. November 14, 2 | 2017-11-14 |
Microelectromechanical Device, An Array Of Microelectromechanical Devices, A Method Of Manufacturing A Microelectromechanical Device, And A Method Of Operating A Microelectromechanical Device
App 20170325025 - Dorfmeister; Manuel ; et al. | 2017-11-09 |
Device For Detecting Acoustic Waves
App 20170325013 - Dehe; Alfons ; et al. | 2017-11-09 |
Device For Detecting Acoustic Waves
App 20170325012 - Dehe; Alfons ; et al. | 2017-11-09 |
System and Method for a Comb-drive MEMS Device
App 20170297895 - Kautzsch; Thoralf ; et al. | 2017-10-19 |
Method For Forming A Microelectromechanical Device
App 20170297899 - Dehe; Alfons ; et al. | 2017-10-19 |
System and Method for a Transducer in an eWLB Package
App 20170284951 - Pindl; Stephan ; et al. | 2017-10-05 |
System and Method for an Optical MEMS Transducer
App 20170289703 - Bartl; Ulf ; et al. | 2017-10-05 |
MEMS Device and MEMS Vacuum Microphone
App 20170260040 - Walther; Arnaud ; et al. | 2017-09-14 |
Microelectromechanical System And A Method Of Manufacturing A Microelectromechanical System
App 20170247244 - Dehe; Alfons | 2017-08-31 |
Microelectromechanical Device And Method For Forming A Microelectromechanical Device
App 20170247245 - Dehe; Alfons ; et al. | 2017-08-31 |
Microelectromechanical device and method for forming a microelectromechanical device
Grant 9,745,188 - Dehe , et al. August 29, 2 | 2017-08-29 |
System and Method for a Microfabricated Fracture Test Structure
App 20170243793 - Glacer; Christoph ; et al. | 2017-08-24 |
MEMS Microphone, Apparatus comprising a MEMS Microphone and Method for Fabricating a MEMS Microphone
App 20170238107 - Walther; Arnaud ; et al. | 2017-08-17 |
MEMS device
Grant 9,728,653 - Dehe , et al. August 8, 2 | 2017-08-08 |
System and Method for a MEMS Transducer
App 20170217765 - Rajaraman; Vijaye Kumar ; et al. | 2017-08-03 |
Hall effect sensor with graphene detection layer
Grant 9,714,988 - Eckinger , et al. July 25, 2 | 2017-07-25 |
MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer
Grant 9,708,180 - Dehe July 18, 2 | 2017-07-18 |
Field emission devices and methods of making thereof
Grant 9,711,392 - Dehe , et al. July 18, 2 | 2017-07-18 |
System and Method for a Variable Flow Transducer
App 20170201192 - Tumpold; David ; et al. | 2017-07-13 |
MEMS Device
App 20170180900 - Dehe; Alfons ; et al. | 2017-06-22 |
System and method for a microfabricated fracture test structure
Grant 9,679,856 - Glacer , et al. June 13, 2 | 2017-06-13 |
Sound transducer with interdigitated first and second sets of comb fingers
Grant 9,674,627 - Hsu , et al. June 6, 2 | 2017-06-06 |
Sensor structure for sensing pressure waves and ambient pressure
Grant 9,670,059 - Dehe , et al. June 6, 2 | 2017-06-06 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 9,668,056 - Dehe , et al. May 30, 2 | 2017-05-30 |
System and method for a MEMS transducer
Grant 9,658,179 - Rajaraman , et al. May 23, 2 | 2017-05-23 |
System and Method for a Perpendicular Electrode Transducer
App 20170142525 - Glacer; Christoph ; et al. | 2017-05-18 |
MEMS device
Grant 9,628,886 - Dehe , et al. April 18, 2 | 2017-04-18 |
Comb MEMS Device and Method of Making a Comb MEMS Device
App 20170073213 - Dehe; Alfons | 2017-03-16 |
Photoacoustic Gas Sensor Device And A Method For Analyzing Gas
App 20170074834 - Dehe; Alfons ; et al. | 2017-03-16 |
Apparatus and Method for In-Situ Calibration of a Photoacoustic Sensor
App 20170067859 - KOLB; Stefan ; et al. | 2017-03-09 |
Adjustable ventilation openings in MEMS structures
Grant 9,591,408 - Dehe , et al. March 7, 2 | 2017-03-07 |
Micromechanical digital loudspeaker
Grant 9,584,941 - Dehe February 28, 2 | 2017-02-28 |
MEMS device and method of making a MEMS device
Grant 9,580,299 - Dehe , et al. February 28, 2 | 2017-02-28 |
System and method for packaged MEMS device having embedding arrangement, MEMS die, and grille
Grant 9,584,889 - Escher-Poeppel , et al. February 28, 2 | 2017-02-28 |
Dynamic Pressure Sensor
App 20170052083 - Wiesbauer; Andreas ; et al. | 2017-02-23 |
Semiconductor device for emitting frequency-adjusted infrared light
Grant 9,570,659 - Dehe , et al. February 14, 2 | 2017-02-14 |
Micro-electro-mechanical system devices
Grant 9,565,488 - Friza , et al. February 7, 2 | 2017-02-07 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure
App 20170034634 - Dehe; Alfons ; et al. | 2017-02-02 |
System and method for a MEMS transducer
Grant 9,540,226 - Klein , et al. January 10, 2 | 2017-01-10 |
Sensor module and semiconductor chip
Grant 9,533,874 - Fueldner , et al. January 3, 2 | 2017-01-03 |
System and Method for a MEMS Transducer
App 20160377569 - Rajaraman; Vijaye Kumar ; et al. | 2016-12-29 |
Photoacoustic gas sensor device and a method for analyzing gas
Grant 9,513,261 - Dehe , et al. December 6, 2 | 2016-12-06 |
MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer
Grant 9,516,428 - Dehe , et al. December 6, 2 | 2016-12-06 |
Double diaphragm MEMS microphone without a backplate element
Grant 9,510,107 - Dehe , et al. November 29, 2 | 2016-11-29 |
System And Method For A Mems Transducer
App 20160340173 - Klein; Wolfgang ; et al. | 2016-11-24 |
Micro-electro-mechanical System Devices
App 20160345084 - FRIZA; Wolfgang ; et al. | 2016-11-24 |
Single Diaphragm Transducer Structure
App 20160341619 - DEHE; ALFONS ; et al. | 2016-11-24 |
Dynamic pressure sensor
Grant 9,494,477 - Wiesbauer , et al. November 15, 2 | 2016-11-15 |
Comb MEMS device and method of making a comb MEMS device
Grant 9,487,386 - Dehe November 8, 2 | 2016-11-08 |
Mems Device And Method Of Manufacturing A Mems Device
App 20160318759 - Dehe; Alfons ; et al. | 2016-11-03 |
Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units
App 20160313288 - Theuss; Horst ; et al. | 2016-10-27 |
Chip Package and a Method of Producing the Same
App 20160311679 - Maier; Dominic ; et al. | 2016-10-27 |
Semiconductor devices and methods of forming thereof
Grant 9,458,009 - Dehe , et al. October 4, 2 | 2016-10-04 |
Gas Sensor
App 20160282259 - Kolb; Stefan ; et al. | 2016-09-29 |
Single diaphragm transducer structure
Grant 9,448,126 - Dehe , et al. September 20, 2 | 2016-09-20 |
MEMS sensor structure for sensing pressure waves and a change in ambient pressure
Grant 9,438,979 - Dehe September 6, 2 | 2016-09-06 |
Sound Transducer with Interdigitated First and Second Sets of Comb Fingers
App 20160234619 - Hsu; Shu-Ting ; et al. | 2016-08-11 |
MEMS device and method of making a MEMS device
Grant 9,409,763 - Dehe , et al. August 9, 2 | 2016-08-09 |
System and Method for an Integrated Transducer and Temperature Sensor
App 20160221822 - Krumbein; Ulrich ; et al. | 2016-08-04 |
Sound transducer with interdigitated first and second sets of comb fingers
Grant 9,402,137 - Hsu , et al. July 26, 2 | 2016-07-26 |
MEMS device and method of manufacturing a MEMS device
Grant 9,402,138 - Dehe , et al. July 26, 2 | 2016-07-26 |
Sensor Structure For Sensing Pressure Waves And Ambient Pressure
App 20160200567 - DEHE; Alfons ; et al. | 2016-07-14 |
Plate, transducer and methods for making and operating a transducer
Grant 9,362,853 - Dehe June 7, 2 | 2016-06-07 |
Sensor structure for sensing pressure waves and ambient pressure
Grant 9,309,105 - Dehe , et al. April 12, 2 | 2016-04-12 |
MEMS Device and Method of Making a MEMS Device
App 20160096726 - Dehe; Alfons ; et al. | 2016-04-07 |
Plate, Transducer and Methods for Making and Operating a Transducer
App 20160094155 - Dehe; Alfons | 2016-03-31 |
MEMS Microphone with Low Pressure Region between Diaphragm and Counter Electrode
App 20160066099 - Dehe; Alfons ; et al. | 2016-03-03 |
Low Profile Transducer Module
App 20160043664 - Theuss; Horst ; et al. | 2016-02-11 |
Sensor Module And Semiconductor Chip
App 20160016787 - Fueldner; Marc ; et al. | 2016-01-21 |
Micromechanical Digital Loudspeaker
App 20160014538 - Dehe; Alfons | 2016-01-14 |
Methods of manufacturing a MEMS device having a backplate with elongated protrusions
Grant 9,227,843 - Dehe January 5, 2 | 2016-01-05 |
Semiconductor Devices and Methods of Forming Thereof
App 20150321901 - Dehe; Alfons ; et al. | 2015-11-12 |
MEMS microphone with low pressure region between diaphragm and counter electrode
Grant 9,181,080 - Dehe , et al. November 10, 2 | 2015-11-10 |
MEMS Device
App 20150289046 - Dehe; Alfons ; et al. | 2015-10-08 |
Dynamic Pressure Sensor
App 20150276529 - Wiesbauer; Andreas ; et al. | 2015-10-01 |
Micro electrical mechanical system with bending deflection of backplate structure
Grant 9,148,726 - Dehe September 29, 2 | 2015-09-29 |
Micromechanical digital loudspeaker
Grant 9,148,712 - Dehe September 29, 2 | 2015-09-29 |
Single Diaphragm Transducer Structure
App 20150253208 - Dehe; Alfons ; et al. | 2015-09-10 |
Double Diaphragm Mems Microphone Without A Backplate Element
App 20150256940 - Dehe; Alfons ; et al. | 2015-09-10 |
Mems Sensor Structure For Sensing Pressure Waves And A Change In Ambient Pressure
App 20150256913 - Dehe; Alfons | 2015-09-10 |
Sensor Structure For Sensing Pressure Waves And Ambient Pressure
App 20150251899 - Dehe; Alfons ; et al. | 2015-09-10 |
System and Method for a Microfabricated Fracture Test Structure
App 20150255407 - Glacer; Christoph ; et al. | 2015-09-10 |
Support Structure And Method Of Forming A Support Structure
App 20150251285 - Dehe; Alfons ; et al. | 2015-09-10 |
Micromechanical Digital Loudspeaker
App 20150245118 - Dehe; Alfons | 2015-08-27 |
Semiconductor devices and methods of forming thereof
Grant 9,102,519 - Dehe , et al. August 11, 2 | 2015-08-11 |
MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer
App 20150210542 - Dehe; Alfons | 2015-07-30 |
Sensor module and semiconductor chip
Grant 9,090,453 - Fueldner , et al. July 28, 2 | 2015-07-28 |
Method for manufacturing a MEMS device and MEMS device
Grant 9,061,896 - Dehe , et al. June 23, 2 | 2015-06-23 |
Semiconductor Devices and Methods of Fabrication Thereof
App 20150145079 - Dehe; Alfons ; et al. | 2015-05-28 |
Electrostatic loudspeaker with membrane performing out-of-plane displacement
Grant 9,031,266 - Dehe , et al. May 12, 2 | 2015-05-12 |
Device with MEMS structure and ventilation path in support structure
Grant 9,024,396 - Dehe May 5, 2 | 2015-05-05 |
Photoacoustic Gas Sensor Device And A Method For Analyzing Gas
App 20150101395 - Dehe; Alfons ; et al. | 2015-04-16 |
Hall effect sensor with graphene detection layer
App 20150102807 - Eckinger; Markus ; et al. | 2015-04-16 |
Semiconductor Device For Emitting Frequency-adjusted Infrared Light
App 20150102372 - Dehe; Alfons ; et al. | 2015-04-16 |
MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer
Grant 9,006,845 - Dehe April 14, 2 | 2015-04-14 |
MEMS structure with adjustable ventilation openings
Grant 9,002,037 - Dehe , et al. April 7, 2 | 2015-04-07 |
Mems
App 20150090043 - Ruhl; Guenther ; et al. | 2015-04-02 |
Adjustable Ventilation Openings in MEMS Structures
App 20150078587 - Dehe; Alfons ; et al. | 2015-03-19 |
Adjustable ventilation openings in MEMS structures
Grant 8,983,097 - Dehe , et al. March 17, 2 | 2015-03-17 |
Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions
Grant 8,975,107 - Dehe , et al. March 10, 2 | 2015-03-10 |
Packaged MEMS Device
App 20150061048 - Escher-Poeppel; Irmgard ; et al. | 2015-03-05 |
Method for Manufacturing a MEMS Device and MEMS Device
App 20150054097 - Dehe; Alfons ; et al. | 2015-02-26 |
MEMS Device
App 20150021722 - Dehe; Alfons ; et al. | 2015-01-22 |
MEMS Device and Method of Manufacturing a MEMS Device
App 20150024536 - Dehe; Alfons | 2015-01-22 |
Device with MEMS Structure and Ventilation Path in Support Structure
App 20150014796 - Dehe; Alfons | 2015-01-15 |
MEMS Microphone with Low Pressure Region Between Diaphragm and Counter Electrode
App 20150001647 - Dehe; Alfons ; et al. | 2015-01-01 |
MEMS device having a back plate with elongated protrusions
Grant 8,921,956 - Dehe December 30, 2 | 2014-12-30 |
MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer
App 20140270271 - Dehe; Alfons ; et al. | 2014-09-18 |
Semiconductor Devices and Methods of Forming Thereof
App 20140264651 - Dehe; Alfons ; et al. | 2014-09-18 |
MEMS Device and Method of Manufacturing a MEMS Device
App 20140210020 - Dehe; Alfons | 2014-07-31 |
Comb MEMS Device and Method of Making a Comb MEMS Device
App 20140197502 - Dehe; Alfons | 2014-07-17 |
MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer
App 20140197501 - Dehe; Alfons | 2014-07-17 |
Housed loudspeaker array
Grant 8,737,674 - Dehe May 27, 2 | 2014-05-27 |
Tunable MEMS device and method of making a tunable MEMS device
Grant 8,723,277 - Dehe , et al. May 13, 2 | 2014-05-13 |
MEMS Device and Method of Manufacturing a MEMS Device
App 20140103460 - Dehe; Alfons ; et al. | 2014-04-17 |
Sensor Module And Semiconductor Chip
App 20140091408 - Fueldner; Marc ; et al. | 2014-04-03 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure
App 20140079277 - Dehe; Alfons ; et al. | 2014-03-20 |
Field Emission Devices and Methods of Making Thereof
App 20140028192 - Dehe; Alfons ; et al. | 2014-01-30 |
Sensor module and semiconductor chip
Grant 8,604,566 - Fueldner , et al. December 10, 2 | 2013-12-10 |
MEMS Device and Method of Making a MEMS Device
App 20130264663 - Dehe; Alfons ; et al. | 2013-10-10 |
Test Structures and Methods
App 20130258301 - Dehe; Alfons | 2013-10-03 |
Plate, Transducer and Methods for Making and Operating a Transducer
App 20130257218 - Dehe; Alfons | 2013-10-03 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 8,542,853 - Dehe , et al. September 24, 2 | 2013-09-24 |
Adjustable Ventilation Openings in MEMS Structures
App 20130223654 - Dehe; Alfons ; et al. | 2013-08-29 |
MEMS Structure with Adjustable Ventilation Openings
App 20130223023 - Dehe; Alfons ; et al. | 2013-08-29 |
Tunable MEMS Device and Method of Making a Tunable MEMS Device
App 20130221453 - Dehe; Alfons ; et al. | 2013-08-29 |
Plate, transducer and methods for making and operating a transducer
Grant 8,503,699 - Dehe August 6, 2 | 2013-08-06 |
System and method for wafer level packaging
Grant 8,497,558 - Krumbein , et al. July 30, 2 | 2013-07-30 |
Micromechanical sound transducer having a membrane support with tapered surface
Grant 8,461,655 - Klein , et al. June 11, 2 | 2013-06-11 |
Sound Transducer with Interdigitated First and Second Sets of Comb Fingers
App 20130121509 - Hsu; Shu-Ting ; et al. | 2013-05-16 |
MEMS microphone packaging and MEMS microphone module
Grant 8,428,286 - Fueldner , et al. April 23, 2 | 2013-04-23 |
Electrostatic Loudspeaker With Membrane Performing Out-of-plane Displacement
App 20130089224 - Dehe; Alfons ; et al. | 2013-04-11 |
Micro Electrical Mechanical System with Bending Deflection of Backplate Structure
App 20130062710 - Dehe; Alfons | 2013-03-14 |
System and Method for Wafer Level Packaging
App 20130015467 - Krumbein; Ulrich ; et al. | 2013-01-17 |
Semiconductor Devices and Methods of Fabrication Thereof
App 20120319217 - Dehe; Alfons ; et al. | 2012-12-20 |
Plate, Transducer and Methods for Making and Operating a Transducer
App 20120308053 - Dehe; Alfons | 2012-12-06 |
Microphone Arrangement
App 20120288130 - Dehe; Alfons | 2012-11-15 |
Micromechanical Sound Transducer Having a Membrane Support with Tapered Surface
App 20120248554 - Klein; Wolfgang ; et al. | 2012-10-04 |
Housed Loudspeaker Array
App 20120207332 - Dehe; Alfons | 2012-08-16 |
Micromechanical Digital Loudspeaker
App 20120148071 - Dehe; Alfons | 2012-06-14 |
Sensor module and method for manufacturing same
Grant 7,994,618 - Dehe , et al. August 9, 2 | 2011-08-09 |
Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure
App 20110170735 - Dehe; Alfons ; et al. | 2011-07-14 |
MEMS Microphone Packaging and MEMS Microphone Module
App 20110127623 - Fueldner; Marc ; et al. | 2011-06-02 |
Sound transducer structure and method for manufacturing a sound transducer structure
Grant 7,912,236 - Dehe , et al. March 22, 2 | 2011-03-22 |
Method for producing a membrane
Grant 7,882,612 - Dehe , et al. February 8, 2 | 2011-02-08 |
Sensor Module And Semiconductor Chip
App 20090309174 - Fueldner; Marc ; et al. | 2009-12-17 |
Membrane and method for the production of the same
App 20090162534 - Dehe; Alfons ; et al. | 2009-06-25 |
Membrane and method for the production of the same
Grant 7,502,482 - Dehe , et al. March 10, 2 | 2009-03-10 |
Micromechanical sensors and methods of manufacturing same
Grant 7,473,572 - Dehe , et al. January 6, 2 | 2009-01-06 |
Sound transducer structure and method for manufacturing a sound transducer structure
App 20080104825 - Dehe; Alfons ; et al. | 2008-05-08 |
Micromechanical capacitive transducer and method for manufacturing the same
Grant 7,348,646 - Barzen , et al. March 25, 2 | 2008-03-25 |
Micromechanical capacitive transducer and method for producing the same
Grant 7,253,016 - Barzen , et al. August 7, 2 | 2007-08-07 |
Sensor Module And Method For Manufacturing Same
App 20070126130 - Dehe; Alfons ; et al. | 2007-06-07 |
Micromechanical sensors and methods of manufacturing same
Grant 7,190,038 - Dehe , et al. March 13, 2 | 2007-03-13 |
Micromechanical capacitive transducer and method for manufacturing the same
App 20070034976 - Barzen; Stefan ; et al. | 2007-02-15 |
Micromechanical sensors and methods of manufacturing same
App 20060141656 - Dehe; Alfons ; et al. | 2006-06-29 |
Pressure sensor and method for operating a pressure sensor
Grant 7,040,173 - Dehe May 9, 2 | 2006-05-09 |
Method and apparatus for manufacturing a device having a moveable structure
Grant 7,001,828 - Barzen , et al. February 21, 2 | 2006-02-21 |
Pressure sensor and method for operating a pressure sensor
App 20050262947 - Dehe, Alfons | 2005-12-01 |
Membrane and method for the production of the same
App 20050241944 - Dehe, Alfons ; et al. | 2005-11-03 |
Microphone and method of producing a microphone
App 20050207605 - Dehe, Alfons ; et al. | 2005-09-22 |
Micromechanical capacitive transducer and method for producing the same
App 20050179100 - Barzen, Stefan ; et al. | 2005-08-18 |
Method and apparatus for manufacturing a device having a moveable structure
App 20050026313 - Barzen, Stefan ; et al. | 2005-02-03 |
Micromechanical sensors and methods of manufacturing same
App 20040259286 - Dehe, Alfons ; et al. | 2004-12-23 |
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