loadpatents
Patent applications and USPTO patent grants for Deguchi; Masatoshi.The latest application filed is for "bonding system and bonding method".
Patent | Date |
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Separation method, computer storage medium, and separation system Grant 10,008,419 - Okada , et al. June 26, 2 | 2018-06-26 |
Joining method and joining system Grant 9,484,236 - Okada , et al. November 1, 2 | 2016-11-01 |
Joining method and joining system Grant 9,463,612 - Okada , et al. October 11, 2 | 2016-10-11 |
Bonding System And Bonding Method App 20150251398 - DEGUCHI; Masatoshi ;   et al. | 2015-09-10 |
Joint method, joint apparatus and joint system Grant 8,899,289 - Deguchi , et al. December 2, 2 | 2014-12-02 |
Separation Method, Computer Storage Medium, And Separation System App 20140335633 - Okada; Shinji ;   et al. | 2014-11-13 |
Bonding system and bonding method Grant 8,846,495 - Deguchi September 30, 2 | 2014-09-30 |
Separation Apparatus, Separation System, Separation Method And Non-transitory Computer Readable Storage Medium App 20140284000 - SOMA; Yasutaka ;   et al. | 2014-09-25 |
Peeling Device, Peeling System And Peeling Method App 20140251546 - DEGUCHI; Masatoshi ;   et al. | 2014-09-11 |
Joining Method And Joining System App 20140224763 - Okada; Shinji ;   et al. | 2014-08-14 |
Joining Method And Joining System App 20140224414 - Okada; Shinji ;   et al. | 2014-08-14 |
Substrate treatment system, substrate treatment method, and non-transitory computer storage medium Grant 8,707,893 - Deguchi , et al. April 29, 2 | 2014-04-29 |
Bonding System And Bonding Method App 20130316516 - Deguchi; Masatoshi | 2013-11-28 |
Joint Method, Joint Apparatus And Joint System App 20130071996 - DEGUCHI; Masatoshi ;   et al. | 2013-03-21 |
Joint Apparatus, Joint System, And Joint Method App 20130062013 - OKADA; Shinji ;   et al. | 2013-03-14 |
Cleaning Method And Cleaning Apparatus App 20130000684 - SOMA; Yasutaka ;   et al. | 2013-01-03 |
Substrate Treatment System, Substrate Treatment Method, And Non-transitory Computer Storage Medium App 20120135148 - Deguchi; Masatoshi ;   et al. | 2012-05-31 |
Method and apparatus for heat processing of substrate Grant 7,517,217 - Deguchi , et al. April 14, 2 | 2009-04-14 |
Substrate Processing Apparatus And Substrate Processing Method App 20070128356 - Matsuyama; Yuji ;   et al. | 2007-06-07 |
Substrate Processing Apparatus And Substrate Processing Method App 20070127916 - Kitano; Junichi ;   et al. | 2007-06-07 |
Substrate processing apparatus and substrate processing method Grant 7,208,066 - Kitano , et al. April 24, 2 | 2007-04-24 |
Method and apparatus for heat processing of substrate App 20060005420 - Deguchi; Masatoshi ;   et al. | 2006-01-12 |
Method for heat processing of substrate Grant 6,969,538 - Deguchi , et al. November 29, 2 | 2005-11-29 |
Apparatus and method for applying process solution Grant 6,821,550 - Deguchi , et al. November 23, 2 | 2004-11-23 |
Substrate processing apparatus and substrate processing method App 20040050321 - Kitano, Junichi ;   et al. | 2004-03-18 |
Substrate processing apparatus Grant 6,659,661 - Deguchi , et al. December 9, 2 | 2003-12-09 |
Substrate processing apparatus Grant 6,466,300 - Deguchi October 15, 2 | 2002-10-15 |
Substrate processing apparatus App 20020114632 - Deguchi, Masatoshi ;   et al. | 2002-08-22 |
Method and apparatus for heat processing of substrate App 20020034714 - Deguchi, Masatoshi ;   et al. | 2002-03-21 |
Apparatus and method for applying process solution App 20010037763 - Deguchi, Masatoshi ;   et al. | 2001-11-08 |
Apparatus and method for applying process solution Grant 6,281,145 - Deguchi , et al. August 28, 2 | 2001-08-28 |
Substrate processing apparatus and substrate processing method App 20010013161 - Kitano, Junichi ;   et al. | 2001-08-16 |
Method of forming coating film and apparatus therefor Grant 6,063,190 - Hasebe , et al. May 16, 2 | 2000-05-16 |
Solvent and resist spin coating apparatus Grant 5,942,035 - Hasebe , et al. August 24, 1 | 1999-08-24 |
Method of forming coating film and apparatus therefor Grant 5,658,615 - Hasebe , et al. August 19, 1 | 1997-08-19 |
Coating apparatus and method Grant 5,580,607 - Takekuma , et al. December 3, 1 | 1996-12-03 |
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