de Veer; Johannes D.
Patent Applications and Registrations
Patent applications and USPTO patent grants for de Veer; Johannes D..The latest application filed is for "overlay metrology on bonded wafers".
- de Veer; Johannes D. - Menlo Park CA
- de Veer; Johannes D. - Harvard MA
| Patent | Date |
|---|---|
| Overlay metrology on bonded wafers Grant 11,309,202 - Krishnan , et al. April 19, 2 | 2022-04-19 |
| Overlay Metrology On Bonded Wafers App 20210242060 - Krishnan; Shankar ; et al. | 2021-08-05 |
| Spectroscopy with tailored spectral sampling Grant 10,151,631 - Neil , et al. Dec | 2018-12-11 |
| Spectroscopy with Tailored Spectral Sampling App 20180094978 - Neil; Mark A. ; et al. | 2018-04-05 |
| Selectably configurable multiple mode spectroscopic ellipsometry Grant 9,404,872 - Wang , et al. August 2, 2 | 2016-08-02 |
| Multiple angles of incidence semiconductor metrology systems and methods Grant 9,310,290 - Wang , et al. April 12, 2 | 2016-04-12 |
| Dynamically adjustable semiconductor metrology system Grant 9,228,943 - Wang , et al. January 5, 2 | 2016-01-05 |
| Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods App 20150285735 - Wang; David Y. ; et al. | 2015-10-08 |
| Light source tracking in optical metrology system Grant 9,146,156 - Zhuang , et al. September 29, 2 | 2015-09-29 |
| Multiple angles of incidence semiconductor metrology systems and methods Grant 9,116,103 - Wang , et al. August 25, 2 | 2015-08-25 |
| Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods App 20140375981 - Wang; David Y. ; et al. | 2014-12-25 |
| Discrete polarization scatterometry Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
| Metrology systems and methods for high aspect ratio and large lateral dimension structures Grant 8,860,937 - Dziura , et al. October 14, 2 | 2014-10-14 |
| Optical system polarizer calibration Grant 8,797,534 - de Veer , et al. August 5, 2 | 2014-08-05 |
| Optical System Polarizer Calibration App 20140043608 - de Veer; Johannes D. ; et al. | 2014-02-13 |
| Optical system polarizer calibration Grant 8,570,514 - de Veer , et al. October 29, 2 | 2013-10-29 |
| Dynamically Adjustable Semiconductor Metrology System App 20130114085 - Wang; David Y. ; et al. | 2013-05-09 |
| Light Source Tracking In Optical Metrology System App 20130033704 - Zhuang; Guorong V. ; et al. | 2013-02-07 |
| Optical System Polarizer Calibration App 20120320377 - de Veer; Johannes D. ; et al. | 2012-12-20 |
| Discrete Polarization Scatterometry App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
| Optical film topography and thickness measurement Grant 6,999,180 - Janik , et al. February 14, 2 | 2006-02-14 |
| Compensating plate to provide uniformity in interference microscopes Grant 3,904,267 - de Veer September 9, 1 | 1975-09-09 |
| Combination Of Birefringent Elements For Polarizing Interferential Systems Grant 3,868,168 - De Veer February 25, 1 | 1975-02-25 |
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