loadpatents
name:-0.012029886245728
name:-0.027616024017334
name:-0.0016260147094727
de Larios; John Patent Filings

de Larios; John

Patent Applications and Registrations

Patent applications and USPTO patent grants for de Larios; John.The latest application filed is for "reduction of entrance and exit marks left by a substrate-processing meniscus".

Company Profile
0.24.10
  • de Larios; John - Palo Alto CA US
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method for removing material from semiconductor wafer and apparatus for performing the same
Grant 8,691,027 - Korolik , et al. April 8, 2
2014-04-08
Reduction of entrance and exit marks left by a substrate-processing meniscus
Grant 8,623,152 - O'Donnell , et al. January 7, 2
2014-01-07
Reduction Of Entrance And Exit Marks Left By A Substrate-processing Meniscus
App 20130061879 - O'Donnell; Robert ;   et al.
2013-03-14
Reduction of entrance and exit marks left by a substrate-processing meniscus
Grant 8,317,932 - O'Donnell , et al. November 27, 2
2012-11-27
Method for processing a substrate using a single phase proximity head having a controlled meniscus
Grant 8,313,580 - Ravkin , et al. November 20, 2
2012-11-20
Single phase proximity head having a controlled meniscus for treating a substrate
Grant 7,997,288 - Ravkin , et al. August 16, 2
2011-08-16
Methods for substrate processing in cluster tool configurations having meniscus application systems
Grant 7,722,724 - Woods , et al. May 25, 2
2010-05-25
Reduction of entrance and exit marks left by a substrate-processing meniscus
Grant 7,703,462 - O'Donnell , et al. April 27, 2
2010-04-27
Post etch wafer surface cleaning with liquid meniscus
Grant 7,597,765 - Zhu , et al. October 6, 2
2009-10-06
Apparatus and method for confined area planarization
Grant 7,598,175 - Boyd , et al. October 6, 2
2009-10-06
Multi-menisci processing apparatus
Grant 7,464,719 - Garcia , et al. December 16, 2
2008-12-16
Single Phase Proximity Head Having A Controlled Meniscus For Treating A Substrate
App 20080266367 - Ravkin; Mike ;   et al.
2008-10-30
Apparatus and Method for Confined Area Planarization
App 20080227369 - Boyd; John M. ;   et al.
2008-09-18
Apparatus and method for confined area planarization
Grant 7,396,430 - Boyd , et al. July 8, 2
2008-07-08
Meniscus, vacuum, IPA vapor, drying manifold
Grant 7,383,844 - Woods , et al. June 10, 2
2008-06-10
Reduction Of Entrance And Exit Marks Left By A Substrate-processing Meniscus
App 20080078421 - O'Donnell; Robert ;   et al.
2008-04-03
Meniscus proximity system for cleaning semiconductor substrate surfaces
Grant 7,350,316 - Woods , et al. April 1, 2
2008-04-01
Post etch wafer surface cleaning with liquid meniscus
App 20070240737 - Zhu; Ji ;   et al.
2007-10-18
Methods for substrate processing in cluster tool configurations having meniscus application systems
App 20070235409 - Woods; Carl ;   et al.
2007-10-11
Method and apparatus for cleaning a substrate using megasonic power
Grant 7,264,007 - Boyd , et al. September 4, 2
2007-09-04
System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold
Grant 7,240,679 - Woods , et al. July 10, 2
2007-07-10
Meniscus Proximity System For Cleaning Semiconductor Substrate Surfaces
App 20070107756 - Woods; Carl ;   et al.
2007-05-17
Meniscus, vacuum, IPA vapor, drying manifold
Grant 7,198,055 - Woods , et al. April 3, 2
2007-04-03
Meniscus, vacuum, IPA vapor, drying manifold
App 20070023070 - Woods; Carl ;   et al.
2007-02-01
Apparatus for oscillating a head and methods for implementing the same
Grant 7,170,190 - Treur , et al. January 30, 2
2007-01-30
System and method for modulating flow through multiple ports in a proximity head
Grant 7,143,527 - Garcia , et al. December 5, 2
2006-12-05
Multi-menisci processing apparatus
App 20060207636 - Garcia; James P. ;   et al.
2006-09-21
Vertical proximity processor
Grant 7,069,937 - Garcia , et al. July 4, 2
2006-07-04
System and method for modulating flow through multiple ports in a proximity head
Grant 7,003,899 - Garcia , et al. February 28, 2
2006-02-28
Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
Grant 6,616,516 - Ravkin , et al. September 9, 2
2003-09-09
Method of selective etching native oxide
Grant 5,294,568 - McNeilly , et al. March 15, 1
1994-03-15

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