Patent | Date |
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Method for removing material from semiconductor wafer and apparatus for performing the same Grant 8,691,027 - Korolik , et al. April 8, 2 | 2014-04-08 |
Reduction of entrance and exit marks left by a substrate-processing meniscus Grant 8,623,152 - O'Donnell , et al. January 7, 2 | 2014-01-07 |
Reduction Of Entrance And Exit Marks Left By A Substrate-processing Meniscus App 20130061879 - O'Donnell; Robert ;   et al. | 2013-03-14 |
Reduction of entrance and exit marks left by a substrate-processing meniscus Grant 8,317,932 - O'Donnell , et al. November 27, 2 | 2012-11-27 |
Method for processing a substrate using a single phase proximity head having a controlled meniscus Grant 8,313,580 - Ravkin , et al. November 20, 2 | 2012-11-20 |
Single phase proximity head having a controlled meniscus for treating a substrate Grant 7,997,288 - Ravkin , et al. August 16, 2 | 2011-08-16 |
Methods for substrate processing in cluster tool configurations having meniscus application systems Grant 7,722,724 - Woods , et al. May 25, 2 | 2010-05-25 |
Reduction of entrance and exit marks left by a substrate-processing meniscus Grant 7,703,462 - O'Donnell , et al. April 27, 2 | 2010-04-27 |
Post etch wafer surface cleaning with liquid meniscus Grant 7,597,765 - Zhu , et al. October 6, 2 | 2009-10-06 |
Apparatus and method for confined area planarization Grant 7,598,175 - Boyd , et al. October 6, 2 | 2009-10-06 |
Multi-menisci processing apparatus Grant 7,464,719 - Garcia , et al. December 16, 2 | 2008-12-16 |
Single Phase Proximity Head Having A Controlled Meniscus For Treating A Substrate App 20080266367 - Ravkin; Mike ;   et al. | 2008-10-30 |
Apparatus and Method for Confined Area Planarization App 20080227369 - Boyd; John M. ;   et al. | 2008-09-18 |
Apparatus and method for confined area planarization Grant 7,396,430 - Boyd , et al. July 8, 2 | 2008-07-08 |
Meniscus, vacuum, IPA vapor, drying manifold Grant 7,383,844 - Woods , et al. June 10, 2 | 2008-06-10 |
Reduction Of Entrance And Exit Marks Left By A Substrate-processing Meniscus App 20080078421 - O'Donnell; Robert ;   et al. | 2008-04-03 |
Meniscus proximity system for cleaning semiconductor substrate surfaces Grant 7,350,316 - Woods , et al. April 1, 2 | 2008-04-01 |
Post etch wafer surface cleaning with liquid meniscus App 20070240737 - Zhu; Ji ;   et al. | 2007-10-18 |
Methods for substrate processing in cluster tool configurations having meniscus application systems App 20070235409 - Woods; Carl ;   et al. | 2007-10-11 |
Method and apparatus for cleaning a substrate using megasonic power Grant 7,264,007 - Boyd , et al. September 4, 2 | 2007-09-04 |
System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold Grant 7,240,679 - Woods , et al. July 10, 2 | 2007-07-10 |
Meniscus Proximity System For Cleaning Semiconductor Substrate Surfaces App 20070107756 - Woods; Carl ;   et al. | 2007-05-17 |
Meniscus, vacuum, IPA vapor, drying manifold Grant 7,198,055 - Woods , et al. April 3, 2 | 2007-04-03 |
Meniscus, vacuum, IPA vapor, drying manifold App 20070023070 - Woods; Carl ;   et al. | 2007-02-01 |
Apparatus for oscillating a head and methods for implementing the same Grant 7,170,190 - Treur , et al. January 30, 2 | 2007-01-30 |
System and method for modulating flow through multiple ports in a proximity head Grant 7,143,527 - Garcia , et al. December 5, 2 | 2006-12-05 |
Multi-menisci processing apparatus App 20060207636 - Garcia; James P. ;   et al. | 2006-09-21 |
Vertical proximity processor Grant 7,069,937 - Garcia , et al. July 4, 2 | 2006-07-04 |
System and method for modulating flow through multiple ports in a proximity head Grant 7,003,899 - Garcia , et al. February 28, 2 | 2006-02-28 |
Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates Grant 6,616,516 - Ravkin , et al. September 9, 2 | 2003-09-09 |
Method of selective etching native oxide Grant 5,294,568 - McNeilly , et al. March 15, 1 | 1994-03-15 |