de la Llera; Anthony
Patent Applications and Registrations
Patent applications and USPTO patent grants for de la Llera; Anthony.The latest application filed is for "dual-phase cooling in semiconductor manufacturing".
Company Profile
2.37.24
- de la Llera; Anthony - Fremont CA
- de la Llera; Anthony - Union City CA
Patent Activity
| Patent | Date |
|---|---|
| Dual-phase Cooling In Semiconductor Manufacturing App 20220005675 - de la Llera; Anthony ; et al. | 2022-01-06 |
| Multi Zone Gas Injection Upper Electrode System App 20200243307 - Bise; Ryan ; et al. | 2020-07-30 |
| Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly Grant 10,262,834 - de la Llera , et al. | 2019-04-16 |
| Edge-clamped And Mechanically Fastened Inner Electrode Of Showerhead Electrode Assembly App 20160086776 - de la Llera; Anthony ; et al. | 2016-03-24 |
| Dual zone temperature control of upper electrodes Grant 9,263,240 - Marakhtanov , et al. February 16, 2 | 2016-02-16 |
| Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly Grant 9,245,716 - de la Llera , et al. January 26, 2 | 2016-01-26 |
| Gas feed insert in a plasma processing chamber and methods therefor Grant 9,111,731 - de la Llera , et al. August 18, 2 | 2015-08-18 |
| Showerhead electrode assembly with gas flow modification for extended electrode life Grant 9,093,483 - Augustino , et al. July 28, 2 | 2015-07-28 |
| Plasma confinement ring assembly for plasma processing chambers Grant 9,076,826 - de la Llera , et al. July 7, 2 | 2015-07-07 |
| Movable grounding arrangements in a plasma processing chamber and methods therefor Grant 8,847,495 - de la Llera , et al. September 30, 2 | 2014-09-30 |
| Showerhead Electrode Assembly With Gas Flow Modification For Extended Electrode Life App 20140187049 - Augustino; Jason ; et al. | 2014-07-03 |
| Upper electrode backing member with particle reducing features Grant 8,709,202 - De La Llera , et al. April 29, 2 | 2014-04-29 |
| Showerhead electrode assembly with gas flow modification for extended electrode life Grant 8,702,866 - Augustino , et al. April 22, 2 | 2014-04-22 |
| Cam lock electrode clamp Grant 8,628,268 - Kellogg , et al. January 14, 2 | 2014-01-14 |
| Showerhead electrode Grant 8,573,152 - de la Llera , et al. November 5, 2 | 2013-11-05 |
| Cam-locked showerhead electrode and assembly Grant 8,470,127 - de la Llera , et al. June 25, 2 | 2013-06-25 |
| Gas Feed Insert In A Plasma Processing Chamber And Methods Therefor App 20130134138 - de la Llera; Anthony ; et al. | 2013-05-30 |
| Movable Grounding Arrangements In A Plasma Processing Chamber And Methods Therefor App 20130134876 - de la Llera; Anthony ; et al. | 2013-05-30 |
| Clamped monolithic showerhead electrode Grant 8,419,959 - Bettencourt , et al. April 16, 2 | 2013-04-16 |
| Showerhead electrode with centering feature Grant 8,402,918 - Kadkhodayan , et al. March 26, 2 | 2013-03-26 |
| Clamped showerhead electrode assembly Grant 8,313,805 - Kadkhodayan , et al. November 20, 2 | 2012-11-20 |
| Showerhead electrode assemblies for plasma processing apparatuses Grant 8,313,665 - Stevenson , et al. November 20, 2 | 2012-11-20 |
| Cam-locked Showerhead Electrode And Assembly App 20120175062 - de la Llera; Anthony ; et al. | 2012-07-12 |
| Showerhead electrode Grant 8,206,506 - Kadkhodayan , et al. June 26, 2 | 2012-06-26 |
| Clamped showerhead electrode assembly Grant 8,161,906 - Kadkhodayan , et al. April 24, 2 | 2012-04-24 |
| Plasma Confinement Ring Assembly For Plasma Processing Chambers App 20120073754 - de la Llera; Anthony ; et al. | 2012-03-29 |
| Showerhead Electrode App 20120055632 - de la Llera; Anthony ; et al. | 2012-03-08 |
| Edge-clamped And Mechanically Fastened Inner Electrode Of Showerhead Electrode Assembly App 20110083809 - de la Llera; Anthony ; et al. | 2011-04-14 |
| Upper Electrode Backing Member With Particle Reducing Features App 20110086513 - De La Llera; Anthony ; et al. | 2011-04-14 |
| Showerhead Electrode Assemblies For Plasma Processing Apparatuses App 20110081783 - Stevenson; Thomas R. ; et al. | 2011-04-07 |
| Clamped Monolithic Showerhead Electrode App 20110070740 - Bettencourt; Gregory R. ; et al. | 2011-03-24 |
| Cam Lock Electrode Clamp App 20110042879 - Kellogg; Michael C. ; et al. | 2011-02-24 |
| Upper electrode backing member with particle reducing features Grant 7,854,820 - De La Llera , et al. December 21, 2 | 2010-12-21 |
| Showerhead electrode App 20100000683 - Kadkhodayan; Babak ; et al. | 2010-01-07 |
| Clamped showerhead electrode assembly App 20100003824 - Kadkhodayan; Babak ; et al. | 2010-01-07 |
| Showerhead electrode assemblies for plasma processing apparatuses App 20080308228 - Stevenson; Thomas R. ; et al. | 2008-12-18 |
| Showerhead electrode assembly with gas flow modification for extended electrode life App 20080141941 - Augustino; Jason ; et al. | 2008-06-19 |
| Upper electrode backing member with particle reducing features App 20080090417 - De La Llera; Anthony ; et al. | 2008-04-17 |
| Components for a plasma processing apparatus App 20080087641 - De La Llera; Anthony ; et al. | 2008-04-17 |
| Substrate holding and spinning assembly and methods for making the same Grant 7,226,055 - Bettencourt , et al. June 5, 2 | 2007-06-05 |
| Air platen for leading edge and trailing edge control Grant 7,018,276 - de la Llera , et al. March 28, 2 | 2006-03-28 |
| Gimballed conditioning apparatus Grant 6,949,016 - de la Llera , et al. September 27, 2 | 2005-09-27 |
| Air platen for leading edge and trailing edge control App 20040242136 - de la Llera, Anthony ; et al. | 2004-12-02 |
| Air platen for leading edge and trailing edge control Grant 6,761,626 - de la Llera , et al. July 13, 2 | 2004-07-13 |
| Polishing head assembly in an apparatus for chemical mechanical planarization Grant 6,746,313 - Pham , et al. June 8, 2 | 2004-06-08 |
| Method and apparatus for applying downward force on wafer during CMP Grant 6,712,670 - de la Llera , et al. March 30, 2 | 2004-03-30 |
| Method and apparatus for applying downward force on wafer during CMP App 20030139115 - de la Llera, Anthony ; et al. | 2003-07-24 |
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