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Patent applications and USPTO patent grants for De Kort; Antonius Johannes.The latest application filed is for "lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method Grant 7,804,582 - Zaal , et al. September 28, 2 | 2010-09-28 |
Software upgrades in a lithographic apparatus Grant 7,652,749 - Jeunink , et al. January 26, 2 | 2010-01-26 |
Method of calibrating a lithographic apparatus and device manufacturing method Grant 7,426,011 - Zaal , et al. September 16, 2 | 2008-09-16 |
Lithographic method Grant 7,423,725 - Zaal , et al. September 9, 2 | 2008-09-09 |
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method App 20080024748 - Zaal; Koen Jacobus Johannes Maria ;   et al. | 2008-01-31 |
Software upgrades in a lithographic apparatus App 20070203873 - Jeunink; Andre Bernardus ;   et al. | 2007-08-30 |
Method of calibrating a lithographic apparatus and device manufacturing method App 20070058152 - Zaal; Koen Jacobus Johannes Maria ;   et al. | 2007-03-15 |
Lithographic method App 20070052940 - Zaal; Koen Jacobus Johannes Maria ;   et al. | 2007-03-08 |
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