Patent | Date |
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Projection System And Lithographic Apparatus Comprising Said Projection System App 20220082947 - MUTSAERS; Marinus Engelbertus Cornelis ;   et al. | 2022-03-17 |
Projection system Grant 10,248,027 - Butler , et al. | 2019-04-02 |
Lithographic apparatus and device manufacturing method Grant 9,857,698 - De Jongh , et al. January 2, 2 | 2018-01-02 |
Projection System App 20170363965 - BUTLER; Hans ;   et al. | 2017-12-21 |
Lithographic Apparatus And Device Manufacturing Method App 20170038693 - DE JONGH; Robertus Johannes Marinus ;   et al. | 2017-02-09 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus Grant 9,304,404 - Fischer , et al. April 5, 2 | 2016-04-05 |
Projection system and lithographic apparatus Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
Positioning system, lithographic apparatus and device manufacturing method Grant 9,122,173 - Butler , et al. September 1, 2 | 2015-09-01 |
Lithographic apparatus and device manufacturing method Grant 8,908,144 - Groeneveld , et al. December 9, 2 | 2014-12-09 |
Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method App 20140293251 - Butler; Hans ;   et al. | 2014-10-02 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20140043596 - Fischer; Juergen ;   et al. | 2014-02-13 |
Positioning System, Lithographic Apparatus and Device Manufacturing Method App 20120147355 - BUTLER; Hans ;   et al. | 2012-06-14 |
Positioning system, lithographic apparatus and device manufacturing method Grant 8,144,310 - Butler , et al. March 27, 2 | 2012-03-27 |
Lithographic Apparatus and Method App 20120044471 - Streefkerk; Bob ;   et al. | 2012-02-23 |
Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method App 20110194088 - Butler; Hans ;   et al. | 2011-08-11 |
Positioning System, Lithographic Apparatus and Device Manufacturing Method App 20090262325 - Butler; Hans ;   et al. | 2009-10-22 |
Lithographic apparatus and device manufacturing method Grant 7,307,262 - Van Dijsseldonk , et al. December 11, 2 | 2007-12-11 |
Lithographic apparatus and device manufacturing method Grant 7,224,428 - De Jongh , et al. May 29, 2 | 2007-05-29 |
Lithographic apparatus and device manufacturing method App 20060139598 - Van Dijsseldonk; Antonius Johannes Josephus ;   et al. | 2006-06-29 |
Lithographic projection apparatus, computer program for control thereof, and device manufacturing method Grant 6,992,752 - De Jongh January 31, 2 | 2006-01-31 |
Lithographic apparatus and device manufacturing method App 20050036123 - De Jongh, Robertus Johannes Marinus ;   et al. | 2005-02-17 |
Lithographic projection apparatus, computer program for control thereof, and device manufacturing method App 20030180639 - De Jongh, Robertus Johannes Marinus | 2003-09-25 |