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Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
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Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
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Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2 | 2010-09-28 |
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus Grant 7,746,447 - Zaal , et al. June 29, 2 | 2010-06-29 |
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device Grant 7,710,539 - Menchtchikov , et al. May 4, 2 | 2010-05-04 |
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate Grant 7,710,538 - Menchtchikov , et al. May 4, 2 | 2010-05-04 |
Lithographic Apparatus And Device Manufacturing Method App 20090323037 - AARTS; Igor Matheus Petronella ;   et al. | 2009-12-31 |
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Method And Arrangement For Correcting Thermally-induced Field Deformations Of A Lithographically Exposed Substrate App 20090055114 - MENCHTCHIKOV; Boris ;   et al. | 2009-02-26 |
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device Grant 7,462,430 - Menchtchikov , et al. December 9, 2 | 2008-12-09 |
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate Grant 7,462,429 - Menchtchikov , et al. December 9, 2 | 2008-12-09 |
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Method and arrangement for predicting thermally-induced deformation of substrate, and a semiconductor device App 20070090853 - Menchtchikov; Boris ;   et al. | 2007-04-26 |
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate App 20070082280 - Menchtchikov; Boris ;   et al. | 2007-04-12 |
Lithographic apparatus and device manufacturing method Grant 7,196,768 - Ottens , et al. March 27, 2 | 2007-03-27 |
Method of calibrating a lithographic apparatus and device manufacturing method App 20070058152 - Zaal; Koen Jacobus Johannes Maria ;   et al. | 2007-03-15 |
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