Patent | Date |
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Lithographic apparatus and contamination removal or prevention method Grant 9,599,908 - De Jong , et al. March 21, 2 | 2017-03-21 |
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus Grant 9,289,802 - De Jong , et al. March 22, 2 | 2016-03-22 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20160033875 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2016-02-04 |
Lithographic apparatus and contamination removal or prevention method Grant 9,158,206 - De Jong , et al. October 13, 2 | 2015-10-13 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system Grant 9,019,466 - Leenders , et al. April 28, 2 | 2015-04-28 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method Grant 9,013,672 - De Jong , et al. April 21, 2 | 2015-04-21 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method Grant 8,947,629 - De Jong , et al. February 3, 2 | 2015-02-03 |
Lithographic apparatus and a method of operating the apparatus Grant 8,823,918 - Watso , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus and device manufacturing method Grant 8,339,572 - De Jong December 25, 2 | 2012-12-25 |
Cleaning Device And A Lithographic Apparatus Cleaning Method App 20110292359 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2011-12-01 |
Cleaning device and a lithographic apparatus cleaning method Grant 8,011,377 - De Jong , et al. September 6, 2 | 2011-09-06 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20110188013 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2011-08-04 |
Lithographic apparatus and contamination removal or prevention method Grant 7,916,269 - De Jong , et al. March 29, 2 | 2011-03-29 |
Cleaning device and a lithographic apparatus cleaning method Grant 7,900,641 - De Jong , et al. March 8, 2 | 2011-03-08 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method Grant 7,866,330 - Jansen , et al. January 11, 2 | 2011-01-11 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method Grant 7,841,352 - Jansen , et al. November 30, 2 | 2010-11-30 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20090284715 - Watso; Robert Douglas ;   et al. | 2009-11-19 |
Lithographic Apparatus And Device Manufacturing Method App 20090190105 - DE JONG; Anthonius Martinus Cornelis Petrus | 2009-07-30 |
Cleaning apparatus and immersion lithographic apparatus App 20090174870 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-07-09 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20090025753 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-29 |
Lithographic Apparatus and Contamination Removal or Prevention Method App 20090027635 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-29 |
Substrates and methods of using those substrates App 20090014030 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-15 |
Cleaning device, a lithographic apparatus and a lithographic cleaning method App 20080284990 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2008-11-20 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method App 20080271750 - Jansen; Bauke ;   et al. | 2008-11-06 |
Cleaning device and a lithographic apparatus cleaning method App 20080271747 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2008-11-06 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method App 20080273181 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2008-11-06 |