De Groot; Antonius Franciscus Johannes
Patent Applications and Registrations
Patent applications and USPTO patent grants for De Groot; Antonius Franciscus Johannes.The latest application filed is for "substrate holder for use in a lithographic apparatus and a method of manufacturing a substrate holder".
Company Profile
9.30.25
- De Groot; Antonius Franciscus Johannes - Lierop NL
- De Groot; Antonius Franciscus Johannes - Someren NL
- De Groot; Antonius Franciscus Johannes - Somerren NL
Patent Activity
| Patent | Date |
|---|---|
| Elastic guiding device, positioning device, blade and lithographic apparatus Grant 11,421,729 - Mulder , et al. August 23, 2 | 2022-08-23 |
| Substrate Holder For Use In A Lithographic Apparatus And A Method Of Manufacturing A Substrate Holder App 20220082945 - NIKIPELOV; Andrey ; et al. | 2022-03-17 |
| Pellicle and pellicle assembly Grant 11,231,646 - Vles , et al. January 25, 2 | 2022-01-25 |
| Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method Grant 11,156,924 - Vermeulen , et al. October 26, 2 | 2021-10-26 |
| Substrate Support, Lithographic Apparatus, Substrate Inspection Apparatus, Device Manufacturing Method App 20210263431 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2021-08-26 |
| Positioning system and lithographic apparatus Grant 11,003,095 - Bustraan , et al. May 11, 2 | 2021-05-11 |
| Lithographic apparatus and method Grant 10,908,518 - Delpuerto , et al. February 2, 2 | 2021-02-02 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 10,747,125 - Lafarre , et al. A | 2020-08-18 |
| Pellicle And Pellicle Assembly App 20200209736 - VLES; David Ferdinand ; et al. | 2020-07-02 |
| Motor assembly, lithographic apparatus and device manufacturing method Grant 10,684,558 - Duijsens , et al. | 2020-06-16 |
| Motor Assembly, Lithographic Apparatus And Device Manufacturing Method App 20200050115 - DUIJSENS; Pim Jozef Hendrik ; et al. | 2020-02-13 |
| Positioning System And Lithographic Apparatus App 20190219932 - BUSTRAAN; Krijn Frederik ; et al. | 2019-07-18 |
| Substrate Support, Lithographic Apparatus And Loading Method App 20190113853 - ONVLEE; Johannes ; et al. | 2019-04-18 |
| Movable support and lithographic apparatus Grant 10,228,626 - De Groot , et al. | 2019-03-12 |
| Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190072863 - Lafarre; Raymond Wilhelmus Louis ; et al. | 2019-03-07 |
| Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator Grant 10,191,392 - Dams , et al. Ja | 2019-01-29 |
| Movable Support And Lithographic Apparatus App 20180356738 - DE GROOT; Antonius Franciscus Johannes ; et al. | 2018-12-13 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 10,120,292 - Lafarre , et al. November 6, 2 | 2018-11-06 |
| Lithographic Apparatus And Method App 20180267414 - DELPUERTO; Santiago E. ; et al. | 2018-09-20 |
| Lithographic apparatus and method Grant 10,001,713 - Del Puerto , et al. June 19, 2 | 2018-06-19 |
| Lithographic apparatus comprising an actuator, and method for protecting such actuator Grant 9,921,494 - Cadee , et al. March 20, 2 | 2018-03-20 |
| Substrate table system, lithographic apparatus and substrate table swapping method Grant 9,753,381 - Van De Ven , et al. September 5, 2 | 2017-09-05 |
| Stage system and a lithographic apparatus Grant 9,726,985 - Van De Ven , et al. August 8, 2 | 2017-08-08 |
| Actuator, Positioning Device, Lithographic Apparatus, And Method For Manufacturing An Actuator App 20170199469 - DAMS; Johannes Adrianus Antonius Theodorus ; et al. | 2017-07-13 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 9,507,275 - Lafarre , et al. November 29, 2 | 2016-11-29 |
| Stage system and a lithographic apparatus Grant 9,389,518 - De Groot , et al. July 12, 2 | 2016-07-12 |
| Lithographic Apparatus and Method App 20150370180 - DEL PUERTO; Santiago E. ; et al. | 2015-12-24 |
| Lithographic apparatus and lithographic projection method Grant 9,182,683 - Beerens , et al. November 10, 2 | 2015-11-10 |
| Substrate Table System, Lithographic Apparatus And Substrate Table Swapping Method App 20150153661 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2015-06-04 |
| Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150109599 - Koevoets; Adrianus Hendrik ; et al. | 2015-04-23 |
| Lithographic Apparatus Comprising An Actuator, And Method For Protecting Such Actuator App 20150070678 - Cadee; Theodorus Petrus Maria ; et al. | 2015-03-12 |
| Positioning device, lithographic apparatus, positioning method and device manufacturing method Grant 8,947,640 - Lafarre , et al. February 3, 2 | 2015-02-03 |
| Lithographic apparatus and device manufacturing method Grant 8,932,042 - Vermeulen , et al. January 13, 2 | 2015-01-13 |
| Stage System and a Lithographic Apparatus App 20140375975 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2014-12-25 |
| Positioning system and a method for positioning a substage with respect to a frame Grant 8,896,811 - Hol , et al. November 25, 2 | 2014-11-25 |
| Lithographic apparatus and device manufacturing method Grant 8,755,030 - Valentin , et al. June 17, 2 | 2014-06-17 |
| Position sensor and lithographic apparatus Grant 8,736,815 - Beerens , et al. May 27, 2 | 2014-05-27 |
| Stage System and a Lithographic Apparatus App 20130162968 - DE GROOT; Antonius Franciscus Johannes ; et al. | 2013-06-27 |
| Actuator, positioning system and lithographic apparatus Grant 8,472,010 - Hol , et al. June 25, 2 | 2013-06-25 |
| Lithographic Apparatus and Substrate Handling Method App 20130077078 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2013-03-28 |
| Positioning Device, Lithographic Apparatus, Positioning Method And Device Manufacturing Method App 20120327387 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2012-12-27 |
| Lithographic Apparatus and Method App 20120224161 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2012-09-06 |
| Lithographic Apparatus And Lithographic Projection Method App 20120212715 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2012-08-23 |
| Lithographic Apparatus and Device Manufacturing Method App 20120153543 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2012-06-21 |
| Position Sensor And Lithographic Apparatus App 20110304839 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2011-12-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20110222039 - VALENTIN; Christiaan Louis ; et al. | 2011-09-15 |
| Actuator, Positioning System And Lithographic Apparatus App 20110069293 - Hol; Sven Antoin Johan ; et al. | 2011-03-24 |
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