| Patent | Date |
|---|
Authentication Object, Authentication System, And Authentication Medium Production Method
App 20220138305 - KUROSAWA; Tsuyoshi ; et al. | 2022-05-05 |
Resin Composition For Forming Phase-separated Structure, Method For Producing Structure Including Phase-separated Structure, And Block Copolymer
App 20220017741 - HAYAKAWA; Teruaki ; et al. | 2022-01-20 |
Resin Composition For Forming Phase-separated Structure, Method For Producing Structure Including Phase-separated Structure, And Block Copolymer
App 20210230340 - MIYAGI; Ken ; et al. | 2021-07-29 |
Method of producing structure containing phase-separated structure
Grant 10,995,234 - Dazai , et al. May 4, 2 | 2021-05-04 |
Method Of Producing Purified Product Of Resin Composition For Forming A Phase-separated Structure, Purified Product Of Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structure
App 20210017343 - Dazai; Takahiro ; et al. | 2021-01-21 |
Resin Composition For Forming Phase-separated Structure, Method For Producing Structure Including Phase-separated Structure, And Block Copolymer
App 20200369819 - Miyagi; Ken ; et al. | 2020-11-26 |
Resin Composition For Forming A Phase-separated Structure, And Method Of Producing Structure Containing Phase-separated Structur
App 20200183281 - DAZAI; Takahiro ; et al. | 2020-06-11 |
Method Of Producing Structure Containing Phase-separated Structure
App 20190284387 - DAZAI; Takahiro ; et al. | 2019-09-19 |
Method Of Producing Structure Containing Phase-separated Structure
App 20190276698 - DAZAI; Takahiro ; et al. | 2019-09-12 |
Resin Composition For Forming Phase-separated Structure And Method Of Producing Structure Including Phase-separated Structure
App 20180171172 - YAMANO; Hitoshi ; et al. | 2018-06-21 |
Resin Composition For Forming Phase-separated Structure And Method For Producing Structure Including Phase-separated Structure
App 20180072564 - MIYAGI; Ken ; et al. | 2018-03-15 |
Method of forming resist pattern
Grant 9,690,194 - Nakamura , et al. June 27, 2 | 2017-06-27 |
Method of producing structure containing phase-separated structure and method of forming top coat film
Grant 9,644,110 - Seshimo , et al. May 9, 2 | 2017-05-09 |
Resist composition, method of forming resist pattern, polymeric compound and compound
Grant 9,606,433 - Utsumi , et al. March 28, 2 | 2017-03-28 |
Undercoat agent and method of producing structure containing phase-separated structure
Grant 9,567,477 - Seshimo , et al. February 14, 2 | 2017-02-14 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern
Grant 9,442,371 - Seshimo , et al. September 13, 2 | 2016-09-13 |
Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern
Grant 9,383,642 - Dazai , et al. July 5, 2 | 2016-07-05 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern
Grant 9,206,307 - Matsumiya , et al. December 8, 2 | 2015-12-08 |
Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern
Grant 9,188,869 - Seshimo , et al. November 17, 2 | 2015-11-17 |
Method Of Producing Structure Containing Phase-separated Structure And Method Of Forming Top Coat Film
App 20150291832 - Seshimo; Takehiro ; et al. | 2015-10-15 |
Resist composition and method for forming resist pattern
Grant 9,122,157 - Arai , et al. September 1, 2 | 2015-09-01 |
Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern
Grant 9,097,971 - Utsumi , et al. August 4, 2 | 2015-08-04 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern
App 20150205207 - Seshimo; Takehiro ; et al. | 2015-07-23 |
Substrate provided with metal nanostructure on surface thereof and method of producing the same
Grant 9,051,648 - Fujikawa , et al. June 9, 2 | 2015-06-09 |
Method of forming polymeric compound, resist composition and method of forming resist pattern
Grant 9,023,580 - Shiono , et al. May 5, 2 | 2015-05-05 |
Primer and pattern forming method for layer including block copolymer
Grant 8,999,631 - Senzaki , et al. April 7, 2 | 2015-04-07 |
Method of producing polymeric compound, resist composition, and method of forming resist pattern
Grant 8,987,386 - Utsumi , et al. March 24, 2 | 2015-03-24 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern
App 20150034593 - Matsumiya; Tasuku ; et al. | 2015-02-05 |
Method Of Producing Structure Containing Phase-separation Structure, Method Of Forming Pattern, And Method Of Forming Fine Pattern
App 20150034595 - Seshimo; Takehiro ; et al. | 2015-02-05 |
Undercoat Agent And Method Of Producing Structure Containing Phase-separated Structure
App 20150030773 - Seshimo; Takehiro ; et al. | 2015-01-29 |
Fluorine-containing block copolymeric compound
Grant 8,846,838 - Matsumiya , et al. September 30, 2 | 2014-09-30 |
Resist composition, method of forming resist pattern and polymeric compound
Grant 8,795,948 - Dazai , et al. August 5, 2 | 2014-08-05 |
Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound
Grant 8,742,038 - Shiono , et al. June 3, 2 | 2014-06-03 |
Resist Composition And Method For Forming Resist Pattern
App 20140147788 - Arai; Masatoshi ; et al. | 2014-05-29 |
Polymerization Method Of High-molecular Weight Compound, Resist Composition, And Method For Forming Resist Pattern
App 20140147792 - Dazai; Takahiro ; et al. | 2014-05-29 |
Resist Composition And Method For Forming Resist Pattern
App 20140147787 - Dazai; Takahiro ; et al. | 2014-05-29 |
Method Of Forming Resist Pattern
App 20140147793 - Nakamura; Tsuyoshi ; et al. | 2014-05-29 |
Compound, Radical Polymerization Initiator, Method For Producing Compound, Polymer, Resist Composition, And Method For Forming Resist Pattern
App 20140141373 - Utsumi; Yoshiyuki ; et al. | 2014-05-22 |
Resist Composition For Negative Development Which Is Used For Formation Of Guide Pattern, Guide Pattern Formation Method, And Method For Forming Pattern On Layer Containing Block Copolymer
App 20140127626 - Senzaki; Takahiro ; et al. | 2014-05-08 |
Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound
Grant 8,642,244 - Shiono , et al. February 4, 2 | 2014-02-04 |
Primer And Pattern Forming Method For Layer Including Block Copolymer
App 20140030652 - Senzaki; Takahiro ; et al. | 2014-01-30 |
Method of forming resist pattern and negative tone-development resist composition
Grant 8,632,960 - Hirano , et al. January 21, 2 | 2014-01-21 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound
App 20130309614 - Utsumi; Yoshiyuki ; et al. | 2013-11-21 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound
App 20130252180 - Dazai; Takahiro ; et al. | 2013-09-26 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,541,529 - Dazai , et al. September 24, 2 | 2013-09-24 |
Positive resist composition and method of forming resist pattern
Grant 8,487,056 - Matsumiya , et al. July 16, 2 | 2013-07-16 |
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing polymeric compound
Grant 8,475,997 - Shiono , et al. July 2, 2 | 2013-07-02 |
Method Of Forming Polymeric Compound, Resist Composition And Method Of Forming Resist Pattern
App 20130137049 - Shiono; Daiju ; et al. | 2013-05-30 |
Negative resist composition, method of forming resist pattern and polymeric compound
Grant 8,404,426 - Abe , et al. March 26, 2 | 2013-03-26 |
Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compound
Grant 8,404,428 - Matsumiya , et al. March 26, 2 | 2013-03-26 |
Method of forming resist pattern and negative tone-development resist composition
Grant 8,394,578 - Hirano , et al. March 12, 2 | 2013-03-12 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Polymeric Compound
App 20130053518 - Matsumiya; Tasuku ; et al. | 2013-02-28 |
Polymer, Resist Composition And Method Of Forming Resist Pattern
App 20130045443 - Utsumi; Yoshiyuki ; et al. | 2013-02-21 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,367,296 - Hirano , et al. February 5, 2 | 2013-02-05 |
Polymer, Resist Composition And Method Of Forming Resist Pattern
App 20130022911 - Utsumi; Yoshiyuki ; et al. | 2013-01-24 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20120329969 - MATSUMIYA; Tasuku ; et al. | 2012-12-27 |
Method Of Producing Polymeric Compound, Resist Composition, And Method Of Forming Resist Pattern
App 20120328993 - Utsumi; Yoshiyuki ; et al. | 2012-12-27 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,329,378 - Hirano , et al. December 11, 2 | 2012-12-11 |
Positive resist composition and method of forming resist pattern
Grant 8,323,869 - Shimizu , et al. December 4, 2 | 2012-12-04 |
Polymeric compound, positive resist composition, and method of forming resist pattern
Grant 8,298,745 - Furuya , et al. October 30, 2 | 2012-10-30 |
Positive resist composition, method of forming resist pattern using the same, and polymeric compound
Grant 8,268,529 - Dazai , et al. September 18, 2 | 2012-09-18 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20120202151 - Dazai; Takahiro ; et al. | 2012-08-09 |
Positive resist composition and method of forming resist pattern
Grant 8,236,477 - Matsumiya , et al. August 7, 2 | 2012-08-07 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,232,041 - Dazai , et al. July 31, 2 | 2012-07-31 |
Resist composition, method of forming resist pattern, polymeric compound, and compound
Grant 8,227,170 - Dazai , et al. July 24, 2 | 2012-07-24 |
Resist composition for immersion exposure, method of forming resist pattern, and flourine-containing polymeric compound
Grant 8,221,956 - Shiono , et al. July 17, 2 | 2012-07-17 |
Positive resist composition and method of forming resist pattern
Grant 8,206,891 - Seshimo , et al. June 26, 2 | 2012-06-26 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,192,915 - Dazai , et al. June 5, 2 | 2012-06-05 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,182,976 - Dazai , et al. May 22, 2 | 2012-05-22 |
Resist Composition For Immersion Exposure, Method Of Forming Resist Pattern, And Fluorine-containing Polymeric Compound
App 20120094236 - SHIONO; Daiju ; et al. | 2012-04-19 |
Resist Composition For Immersion Exposure, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Compound
App 20120077125 - Shiono; Daiju ; et al. | 2012-03-29 |
Substrate Provided With Metal Nanostructure On Surface Thereof And Method Of Producing The Same
App 20120048738 - Fujikawa; Shigenori ; et al. | 2012-03-01 |
Polymer compound, positive resist composition, and method of forming resist pattern
Grant 8,105,749 - Dazai , et al. January 31, 2 | 2012-01-31 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,088,553 - Shimizu , et al. January 3, 2 | 2012-01-03 |
Method of forming resist pattern and negative tone-development resist composition
App 20110262864 - HIRANO; Tomoyuki ; et al. | 2011-10-27 |
Method Of Forming Resist Pattern And Negative Tone-development Resist Composition
App 20110244399 - HIRANO; Tomoyuki ; et al. | 2011-10-06 |
Positive resist composition, method of forming resist pattern, and polymeric compound
Grant 8,021,823 - Shimizu , et al. September 20, 2 | 2011-09-20 |
Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
Grant 7,989,138 - Furuya , et al. August 2, 2 | 2011-08-02 |
Compound, method for producing same, positive resist composition and method for forming resist pattern
Grant 7,960,089 - Shiono , et al. June 14, 2 | 2011-06-14 |
Resist composition and method of forming resist pattern
Grant 7,960,091 - Shimizu , et al. June 14, 2 | 2011-06-14 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Polymeric Compound
App 20110117499 - MATSUMIYA; Tasuku ; et al. | 2011-05-19 |
Positive resist composition, method of forming resist pattern, polymeric compound, and compound
Grant 7,919,651 - Shiono , et al. April 5, 2 | 2011-04-05 |
Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern
Grant 7,914,967 - Furuya , et al. March 29, 2 | 2011-03-29 |
Polymer Compound, Positive Resist Composition, And Method Of Forming Resist Pattern
App 20100248148 - DAZAI; Takahiro ; et al. | 2010-09-30 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20100233626 - Shimizu; Hiroaki ; et al. | 2010-09-16 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20100233625 - Hirano; Tomoyuki ; et al. | 2010-09-16 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20100209848 - Dazai; Takahiro ; et al. | 2010-08-19 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Polymeric Compound
App 20100196821 - Dazai; Takahiro ; et al. | 2010-08-05 |
Polymer compound, positive resist composition, and method of forming resist pattern
Grant 7,767,379 - Dazai , et al. August 3, 2 | 2010-08-03 |
Compound, Method For Producing Same, Positive Resist Composition And Method For Forming Resist Pattern
App 20100183974 - Shiono; Daiju ; et al. | 2010-07-22 |
Positive resist composition and method of forming resist pattern
App 20100183981 - Matsumiya; Tasuku ; et al. | 2010-07-22 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound
App 20100178609 - Dazai; Takahiro ; et al. | 2010-07-15 |
Polymer compound, positive resist composition and method of forming resist pattern
Grant 7,745,098 - Dazai , et al. June 29, 2 | 2010-06-29 |
Positive resist composition and method of forming resist pattern
Grant 7,741,009 - Dazai , et al. June 22, 2 | 2010-06-22 |
Polymeric Compound, Positive Resist Composition, And Method Of Forming Resits Pattern
App 20100124718 - Furuya; Sanae ; et al. | 2010-05-20 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20100086873 - Seshimo; Takehiro ; et al. | 2010-04-08 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20100081086 - HIRANO; Tomoyuki ; et al. | 2010-04-01 |
Negative resist composition, method of forming resist pattern and polymeric compound
App 20100035178 - Abe; Sho ; et al. | 2010-02-11 |
Resist composition for immersion exposure, method of forming resist pattern, and flourine-containing polymeric compound
App 20090317743 - Shiono; Daiju ; et al. | 2009-12-24 |
Positive Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound
App 20090312573 - Shiono; Daiju ; et al. | 2009-12-17 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20090269694 - Shimizu; Hiroaki ; et al. | 2009-10-29 |
Positive resist composition, method of forming resist pattern, polymeric compound, and compound
Grant 7,604,920 - Shiono , et al. October 20, 2 | 2009-10-20 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound
App 20090214982 - Shimizu; Hiroaki ; et al. | 2009-08-27 |
Resist Composition For Immersion Exposure, Method Of Forming Resist Pattern Using The Same, And Fluorine-containing Compound
App 20090197204 - Shiono; Daiju ; et al. | 2009-08-06 |
Resist Composition And Method Of Forming Resist Pattern
App 20090197197 - Shimizu; Hiroaki ; et al. | 2009-08-06 |
Resist Composition For Liquid Immersion Lithography, Method Of Forming Resist Pattern, And Fluorine-containing Copolymer
App 20090186300 - Furuya; Sanae ; et al. | 2009-07-23 |
Fluorine-containing Compound, Resist Composition For Immersion Exposure, And Method Of Forming Resist Pattern
App 20090142699 - Furuya; Sanae ; et al. | 2009-06-04 |
Polymer Compound, Positive Resist Composition, And Method Of Forming Resist Pattern
App 20090068590 - Dazai; Takahiro ; et al. | 2009-03-12 |
Polymer Compound, Positive Resist Composition And Method Of Forming Resist Pattern
App 20090061356 - Dazai; Takahiro ; et al. | 2009-03-05 |
Fluorine-containing Compound, Resist Composition For Immersion Exposure, And Method Of Forming Resist Pattern
App 20090047602 - Furuya; Sanae ; et al. | 2009-02-19 |
Positive Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound
App 20090042131 - SHIONO; DAIJU ; et al. | 2009-02-12 |
Positive Resist Composition And Method Of Forming Resist Pattern
App 20090023097 - Dazai; Takahiro ; et al. | 2009-01-22 |
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