Dawson; Keith E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Dawson; Keith E..The latest application filed is for "tactile wafer lifter and methods for operating the same".
- Dawson; Keith E. - Livermore CA
| Patent | Date |
|---|---|
| Tactile wafer lifter and methods for operating the same Grant 8,657,556 - Dawson , et al. February 25, 2 | 2014-02-25 |
| Tactile Wafer Lifter And Methods For Operating The Same App 20130066459 - Dawson; Keith E. ; et al. | 2013-03-14 |
| Tactile wafer lifter and methods for operating the same Grant 8,317,450 - Dawson , et al. November 27, 2 | 2012-11-27 |
| Tactile Wafer Lifter and Methods for Operating the Same App 20100111651 - Dawson; Keith E. ; et al. | 2010-05-06 |
| Substrate support having temperature controlled substrate support surface App 20040187787 - Dawson, Keith E. ; et al. | 2004-09-30 |
| Sealing techniques suitable for different geometries and constrained spaces Grant 6,536,777 - Hao , et al. March 25, 2 | 2003-03-25 |
| Sealing Techniques Suitable For Different Geometries And Contrained Spaces App 20010045706 - HAO, FANGLI J. ; et al. | 2001-11-29 |
| Thermal control of semiconductor wafer during reactive ion etching Grant 5,609,720 - Lenz , et al. March 11, 1 | 1997-03-11 |
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