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Device and method for scanning measurement of the distance to an object Grant 11,237,254 - Davydenko February 1, 2 | 2022-02-01 |
Device And Method For Scanning Measurement Of The Distance To An Object App 20210364607 - DAVYDENKO; Vladimir | 2021-11-25 |
Device And Method For Scanning Measurement Of The Distance To An Object App 20210316756 - DAVYDENKO; Vladimir | 2021-10-14 |
Apparatus And Method For Scanning Ascertainment Of The Distance To An Object App 20210231778 - DAVYDENKO; Vladimir ;   et al. | 2021-07-29 |
Device and method for scanning measurement of the distance to an object Grant 11,009,593 - Davydenko May 18, 2 | 2021-05-18 |
Apparatus For Ascertaining A Distance To An Object App 20210026017 - DAVYDENKO; Vladimir ;   et al. | 2021-01-28 |
Apparatus For Ascertaining A Distance To An Object App 20210026015 - DAVYDENKO; Vladimir | 2021-01-28 |
Illumination system of a microlithographic projection device and method for operating such a system Grant 10,539,883 - Deguenther , et al. Ja | 2020-01-21 |
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 10,274,828 - Deguenther , et al. | 2019-04-30 |
Illumination System Of A Microlithographic Projection Device And Method For Operating Such A System App 20180284622 - Deguenther; Markus ;   et al. | 2018-10-04 |
Illumination system for microlithography Grant 10,088,754 - Scholz , et al. October 2, 2 | 2018-10-02 |
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 9,977,334 - Deguenther , et al. May 22, 2 | 2018-05-22 |
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20180129137 - Deguenther; Markus ;   et al. | 2018-05-10 |
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system Grant 9,910,360 - Deguenther , et al. March 6, 2 | 2018-03-06 |
Illumination system of a microlithographic projection exposure apparatus Grant 9,910,359 - Deguenther , et al. March 6, 2 | 2018-03-06 |
Illumination System For Microlithography App 20170192361 - Scholz; Axel ;   et al. | 2017-07-06 |
Illumination system for microlithography Grant 9,606,441 - Scholz , et al. March 28, 2 | 2017-03-28 |
Optical hollow waveguide assembly Grant 9,535,210 - Schmidt , et al. January 3, 2 | 2017-01-03 |
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20160357113 - Deguenther; Markus ;   et al. | 2016-12-08 |
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System App 20160349624 - Deguenther; Markus ;   et al. | 2016-12-01 |
Illumination system of a microlithographic projection exposure apparatus Grant 9,500,954 - Deguenther , et al. November 22, 2 | 2016-11-22 |
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160209759 - Deguenther; Markus ;   et al. | 2016-07-21 |
Illumination System For Microlithography App 20160161858 - Scholz; Axel ;   et al. | 2016-06-09 |
Optical Hollow Waveguide Assembly App 20160124142 - SCHMIDT; Stefan Wolfgang ;   et al. | 2016-05-05 |
Illumination system of a microlithographic projection exposure apparatus Grant 9,310,690 - Deguenther , et al. April 12, 2 | 2016-04-12 |
Illumination system for microlithography Grant 9,280,060 - Scholz , et al. March 8, 2 | 2016-03-08 |
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150146184 - Deguenther; Markus ;   et al. | 2015-05-28 |
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150146183 - Deguenther; Markus ;   et al. | 2015-05-28 |
Illumination System For Microlithography App 20150022798 - Scholz; Axel ;   et al. | 2015-01-22 |
Illumination system for microlithography Grant 8,873,023 - Scholz , et al. October 28, 2 | 2014-10-28 |
Illumination system for a microlithographic projection exposure apparatus Grant 8,730,455 - Fiolka , et al. May 20, 2 | 2014-05-20 |
Illumination System For Microlithography App 20120019796 - Scholz; Axel ;   et al. | 2012-01-26 |
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light App 20120013878 - Kuss; Matthias ;   et al. | 2012-01-19 |
Illumination System For A Microlithographic Projection Exposure Apparatus App 20110285978 - FIOLKA; Damian ;   et al. | 2011-11-24 |
Illumination system for a microlithographic projection exposure apparatus Grant 8,004,656 - Fiolka , et al. August 23, 2 | 2011-08-23 |
Projection exposure system, beam delivery system and method of generating a beam of light Grant 7,995,280 - Kuss , et al. August 9, 2 | 2011-08-09 |
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light App 20080225921 - Kuss; Matthias ;   et al. | 2008-09-18 |
Illumination system for a microlithographic projection exposure apparatus App 20070206171 - Fiolka; Damian ;   et al. | 2007-09-06 |
Irradiation system for generating modulated radiation App 20020114082 - Davydenko, Vladimir | 2002-08-22 |
Arrangement and device for transforming optical rays App 20020054435 - Davydenko, Vladimir | 2002-05-09 |