Davis; Cecil J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Davis; Cecil J..The latest application filed is for "apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure".
Company Profile
0.71.0
- Davis; Cecil J. - Greenville TX
- Davis; Cecil J. - West Chester PA
Patent Activity
| Patent | Date |
|---|---|
| Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure Grant 6,905,578 - Moslehi , et al. June 14, 2 | 2005-06-14 |
| Rapid cycle chuck for low-pressure processing Grant 6,705,394 - Moslehi , et al. March 16, 2 | 2004-03-16 |
| Edge sealing structure for substrate in low-pressure processing environment Grant 6,508,885 - Moslehi , et al. January 21, 2 | 2003-01-21 |
| Method and apparatus for thin film deposition using an active shutter Grant 6,444,103 - Moslehi , et al. September 3, 2 | 2002-09-03 |
| Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet Grant 6,126,790 - Moslehi , et al. October 3, 2 | 2000-10-03 |
| Thin-film processing electromagnet for low-skew magnetic orientation Grant 6,106,682 - Moslehi , et al. August 22, 2 | 2000-08-22 |
| Multiple-coil electromagnet for magnetically orienting thin films Grant 6,042,707 - Moslehi , et al. March 28, 2 | 2000-03-28 |
| Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. Grant 6,039,848 - Moslehi , et al. March 21, 2 | 2000-03-21 |
| High throughput optical curing process for semiconductor device manufacturing Grant 5,972,803 - Shu , et al. October 26, 1 | 1999-10-26 |
| High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition Grant 5,876,573 - Moslehi , et al. March 2, 1 | 1999-03-02 |
| Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber Grant 5,580,385 - Paranjpe , et al. December 3, 1 | 1996-12-03 |
| Multi-electrode plasma processing apparatus Grant 5,464,499 - Moslehi , et al. * November 7, 1 | 1995-11-07 |
| Programmable multizone gas injector for single-wafer semiconductor processing equipment Grant 5,453,124 - Moslehi , et al. September 26, 1 | 1995-09-26 |
| High performance multi-zone illuminator module for semiconductor wafer processing Grant 5,446,825 - Moslehi , et al. August 29, 1 | 1995-08-29 |
| Method and apparatus for low-temperature semiconductor processing Grant 5,435,379 - Moslehi , et al. July 25, 1 | 1995-07-25 |
| Multi-zone illuminator with embedded process control sensors Grant 5,367,606 - Moslehi , et al. November 22, 1 | 1994-11-22 |
| Semiconductor wafer heater with infrared lamp module with light blocking means Grant 5,345,534 - Najm , et al. September 6, 1 | 1994-09-06 |
| Multi-electrode plasma processing apparatus Grant 5,286,297 - Moslehi , et al. February 15, 1 | 1994-02-15 |
| Multi zone illuminator with embeded process control sensors and light interference elimination circuit Grant 5,268,989 - Moslehi , et al. December 7, 1 | 1993-12-07 |
| Low particulate reliability enhanced remote microwave plasma discharge device Grant 5,262,610 - Huang , et al. November 16, 1 | 1993-11-16 |
| Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation Grant 5,248,636 - Davis , et al. September 28, 1 | 1993-09-28 |
| Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing Grant 5,217,559 - Moslehi , et al. June 8, 1 | 1993-06-08 |
| Wafer processing apparatus having independently controllable energy sources Grant 5,138,973 - Davis , et al. August 18, 1 | 1992-08-18 |
| Semiconductor wafer temperature measurement system and method Grant 5,102,231 - Loewenstein , et al. April 7, 1 | 1992-04-07 |
| Distributed-array magnetron-plasma processing module and method Grant 5,082,542 - Moslehi , et al. January 21, 1 | 1992-01-21 |
| Integrated circuit processing system Grant 5,044,871 - Davis , et al. September 3, 1 | 1991-09-03 |
| Method for etching tungsten Grant 4,997,520 - Jucha , et al. March 5, 1 | 1991-03-05 |
| Method for deposition of silicon oxide on a wafer Grant 4,988,533 - Freeman , et al. January 29, 1 | 1991-01-29 |
| Method for etching semiconductor materials using a remote plasma generator Grant 4,988,644 - Jucha , et al. January 29, 1 | 1991-01-29 |
| Integrated circuit processing system Grant 4,966,519 - Davis , et al. October 30, 1 | 1990-10-30 |
| Processing apparatus and method Grant 4,949,671 - Davis , et al. August 21, 1 | 1990-08-21 |
| Plasma and plasma UV deposition of SiO.sub.2 Grant 4,916,091 - Freeman , et al. April 10, 1 | 1990-04-10 |
| Method for etching tungsten Grant 4,915,777 - Jucha , et al. April 10, 1 | 1990-04-10 |
| Processing apparatus and method Grant 4,911,103 - Davis , et al. March 27, 1 | 1990-03-27 |
| Processing apparatus and method Grant 4,910,043 - Freeman , et al. March 20, 1 | 1990-03-20 |
| Method for wafer treating Grant 4,906,328 - Freeman , et al. March 6, 1 | 1990-03-06 |
| Remote plasma generation process using a two-stage showerhead Grant 4,904,621 - Loewenstein , et al. February 27, 1 | 1990-02-27 |
| Isolation substrate ring for plasma reactor Grant 4,891,087 - Davis , et al. January 2, 1 | 1990-01-02 |
| Processing apparatus and method Grant 4,891,488 - Davis , et al. January 2, 1 | 1990-01-02 |
| Processing apparatus and method Grant 4,886,570 - Davis , et al. December 12, 1 | 1989-12-12 |
| Method for etching titanium nitride local interconnects Grant 4,878,994 - Jucha , et al. November 7, 1 | 1989-11-07 |
| Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma Grant 4,877,757 - York , et al. October 31, 1 | 1989-10-31 |
| Wafer processing apparatus Grant 4,875,989 - Davis , et al. October 24, 1 | 1989-10-24 |
| Selective etching of tungsten by remote and in situ plasma generation Grant 4,874,723 - Jucha , et al. October 17, 1 | 1989-10-17 |
| Processing apparatus Grant 4,872,938 - Davis , et al. October 10, 1 | 1989-10-10 |
| Method for etch of polysilicon film Grant 4,867,841 - Loewenstein , et al. September 19, 1 | 1989-09-19 |
| Method and apparatus for cleaning integrated circuit wafers Grant 4,863,561 - Freeman , et al. September 5, 1 | 1989-09-05 |
| Method for etching tungsten Grant 4,849,067 - Jucha , et al. July 18, 1 | 1989-07-18 |
| Wafer processing apparatus and method Grant 4,842,686 - Davis , et al. June 27, 1 | 1989-06-27 |
| Advanced vacuum processor Grant 4,842,680 - Davis , et al. June 27, 1 | 1989-06-27 |
| Process for etch of tungsten Grant 4,842,676 - Jucha , et al. June 27, 1 | 1989-06-27 |
| Method for etching tungsten Grant 4,842,687 - Jucha , et al. June 27, 1 | 1989-06-27 |
| Method for plasma etching tungsten Grant 4,838,990 - Jucha , et al. June 13, 1 | 1989-06-13 |
| Method for depositing compound from group II-VI Grant 4,837,113 - Luttmer , et al. June 6, 1 | 1989-06-06 |
| Processing apparatus Grant 4,836,905 - Davis , et al. June 6, 1 | 1989-06-06 |
| Processing apparatus and method Grant 4,832,777 - Davis , et al. May 23, 1 | 1989-05-23 |
| Processing apparatus Grant 4,832,779 - Fisher , et al. May 23, 1 | 1989-05-23 |
| Processing apparatus and method Grant 4,830,700 - Davis , et al. May 16, 1 | 1989-05-16 |
| Method for etch of GaAs Grant 4,830,705 - Loewenstein , et al. May 16, 1 | 1989-05-16 |
| Method for etching an aluminum film doped with silicon Grant 4,828,649 - Davis , et al. May 9, 1 | 1989-05-09 |
| Processing apparatus and method Grant 4,822,450 - Davis , et al. April 18, 1 | 1989-04-18 |
| Method for cleanup processing chamber and vacuum process module Grant 4,820,377 - Davis , et al. April 11, 1 | 1989-04-11 |
| Wafer processing apparatus Grant 4,818,327 - Davis , et al. April 4, 1 | 1989-04-04 |
| Processing apparatus Grant 4,818,326 - Liu , et al. April 4, 1 | 1989-04-04 |
| Semiconductor wafer transfer method and arm mechanism Grant 4,816,116 - Davis , et al. March 28, 1 | 1989-03-28 |
| Apparatus for transferring workpieces Grant 4,816,098 - Davis , et al. March 28, 1 | 1989-03-28 |
| Vacuum processing system Grant 4,687,542 - Davis , et al. August 18, 1 | 1987-08-18 |
| Apparatus for plasma assisted etching Grant 4,685,999 - Davis , et al. August 11, 1 | 1987-08-11 |
| Automated single slice cassette load lock plasma reactor Grant 4,659,413 - Davis , et al. April 21, 1 | 1987-04-21 |
| Automated single slice powered load lock plasma reactor Grant 4,657,620 - Davis , et al. April 14, 1 | 1987-04-14 |
| Card Feeder Grant 3,642,271 - Davis February 15, 1 | 1972-02-15 |
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