| Patent | Date |
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Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
Grant 8,737,438 - Das , et al. May 27, 2 | 2014-05-27 |
Laser thin film poly-silicon annealing optical system
Grant 8,362,391 - Partlo , et al. January 29, 2 | 2013-01-29 |
Systems And Methods For Implementing An Interaction Between A Laser Shaped As Line Beam And A Film Deposited On A Substrate
App 20120298838 - Das; Palash P. ; et al. | 2012-11-29 |
Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
Grant 8,265,109 - Das , et al. September 11, 2 | 2012-09-11 |
Laser Thin Film Poly-silicon Annealing Optical System
App 20110163077 - Partlo; William N. ; et al. | 2011-07-07 |
Laser thin film poly-silicon annealing optical system
Grant 7,884,303 - Partlo , et al. February 8, 2 | 2011-02-08 |
Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
App 20090256057 - Das; Palash P. ; et al. | 2009-10-15 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
Systems and methods for generating laser light shaped as a line beam
Grant 7,471,455 - Das , et al. December 30, 2 | 2008-12-30 |
Confocal pulse stretcher
Grant 7,415,056 - Das , et al. August 19, 2 | 2008-08-19 |
Confocal pulse stretcher
App 20070237192 - Das; Palash P. ; et al. | 2007-10-11 |
Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
Grant 7,277,188 - Das , et al. October 2, 2 | 2007-10-02 |
Gas discharge laser light source beam delivery unit
App 20070160103 - Das; Palash P. ; et al. | 2007-07-12 |
Systems and methods for generating laser light shaped as a line beam
App 20070097511 - Das; Palash P. ; et al. | 2007-05-03 |
Gas discharge laser light source beam delivery unit
Grant 7,190,707 - Das , et al. March 13, 2 | 2007-03-13 |
Very high energy, high stability gas discharge laser surface treatment system
Grant 7,167,499 - Das , et al. January 23, 2 | 2007-01-23 |
High repetition rate gas discharge laser with precise pulse timing control
Grant 7,149,234 - Das , et al. December 12, 2 | 2006-12-12 |
Laser spectral engineering for lithographic process
Grant 7,139,301 - Kroyan , et al. November 21, 2 | 2006-11-21 |
Bandwidth control technique for a laser
Grant 7,079,556 - Fomenkov , et al. July 18, 2 | 2006-07-18 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
App 20060126697 - Knowles; David S. ; et al. | 2006-06-15 |
Laser thin film poly-silicon annealing system
Grant 7,061,959 - Partlo , et al. June 13, 2 | 2006-06-13 |
Very narrow band, two chamber, high rep-rate gas discharge laser system
Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
Laser lithography light source with beam delivery
Grant 7,016,388 - Klene , et al. March 21, 2 | 2006-03-21 |
Laser thin film poly-silicon annealing optical system
Grant 7,009,140 - Partio , et al. March 7, 2 | 2006-03-07 |
Very narrow band, two chamber, high reprate gas discharge laser system
Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
App 20060001878 - Das; Palash P. ; et al. | 2006-01-05 |
Laser thin film poly-silicon annealing optical system
App 20050269300 - Partlo, William N. ; et al. | 2005-12-08 |
Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System
App 20050271109 - Knowles, David S. ; et al. | 2005-12-08 |
Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
App 20050259709 - Das, Palash P. ; et al. | 2005-11-24 |
Laser thin film poly-silicon annealing system
App 20050141580 - Partlo, William N. ; et al. | 2005-06-30 |
Laser thin film poly-silicon annealing optical system
App 20050035103 - Partlo, William N. ; et al. | 2005-02-17 |
Very high energy, high stability gas discharge laser surface treatment system
App 20040182838 - Das, Palash P. ; et al. | 2004-09-23 |
Gas discharge laser light source beam delivery unit
App 20040179560 - Das, Palash P. ; et al. | 2004-09-16 |
Laser spectral engineering for lithographic process
App 20040146082 - Kroyan, Armen ; et al. | 2004-07-29 |
Laser lithography light source with beam delivery
App 20040105479 - Klene, Brian ; et al. | 2004-06-03 |
High power gas discharge laser with line narrowing unit
Grant 6,735,236 - Cybulski , et al. May 11, 2 | 2004-05-11 |
Bandwidth control technique for a laser
Grant 6,721,340 - Fomenkov , et al. April 13, 2 | 2004-04-13 |
Bandwidth control technique for a laser
App 20040057474 - Fomenkov, Igor V. ; et al. | 2004-03-25 |
Very narrow band, two chamber, high reprate gas discharge laser system
App 20040047385 - Knowles, David S. ; et al. | 2004-03-11 |
High repetition rate gas discharge laser with precise pulse timing control
App 20040047386 - Das, Palash P. ; et al. | 2004-03-11 |
Lithography laser with beam delivery and beam pointing control
Grant 6,704,339 - Lublin , et al. March 9, 2 | 2004-03-09 |
Lithography laser system with in-place alignment tool
Grant 6,704,340 - Ershov , et al. March 9, 2 | 2004-03-09 |
Laser lithography light source with beam delivery
Grant 6,693,939 - Klene , et al. February 17, 2 | 2004-02-17 |
Laser spectral engineering for lithographic process
Grant 6,671,294 - Kroyan , et al. December 30, 2 | 2003-12-30 |
Very narrow band, two chamber, high rep rate gas discharge laser system
Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
Electric discharge laser with active wavelength chirp correction
Grant 6,621,846 - Sandstrom , et al. September 16, 2 | 2003-09-16 |
High repetition rate gas discharge laser with precise pulse timing control
Grant 6,618,421 - Das , et al. September 9, 2 | 2003-09-09 |
Very narrow band, two chamber, high rep rate gas discharge laser system
Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
Lithography laser system with in-place alignment tool
App 20030091087 - Ershov, Alexander I. ; et al. | 2003-05-15 |
Reliable, modular, production quality narrow-band high rep rate F2 laser
Grant RE38,054 - Hofmann , et al. April 1, 2 | 2003-04-01 |
Lithography laser with beam delivery and beam pointing control
App 20030043876 - Lublin, Leonard ; et al. | 2003-03-06 |
Fast wavelength correction technique for a laser
Grant 6,529,531 - Everage , et al. March 4, 2 | 2003-03-04 |
Laser lithography light source with beam delivery
App 20020191654 - Klene, Brian ; et al. | 2002-12-19 |
Very narrow band, two chamber, high rep rate gas discharge laser system
App 20020154668 - Knowles, David S. ; et al. | 2002-10-24 |
Control technique for microlithography lasers
Grant 6,392,743 - Zambon , et al. May 21, 2 | 2002-05-21 |
Very narrow band injection seeded F2 lithography laser
Grant 6,381,257 - Ershov , et al. April 30, 2 | 2002-04-30 |
Laser spectral engineering for lithographic process
App 20020048288 - Kroyan, Armen ; et al. | 2002-04-25 |
Very narrow band, two chamber, high rep rate gas discharge laser system
App 20020044586 - Myers, David W. ; et al. | 2002-04-18 |
Injection seeded F2 lithography laser
Grant 6,370,174 - Onkels , et al. April 9, 2 | 2002-04-09 |
High repetition rate gas discharge laser with precise pulse timing control
App 20020012376 - Das, Palash P. ; et al. | 2002-01-31 |
High Power Gas Discharge Laser With Line Narrowing Unit
App 20020006147 - CYBULSKI, RAYMOND F. ; et al. | 2002-01-17 |
Bandwidth estimating technique for narrow band laser
Grant 6,317,448 - Das , et al. November 13, 2 | 2001-11-13 |
Fluorine control system with fluorine monitor
Grant 6,240,117 - Gong , et al. May 29, 2 | 2001-05-29 |
Smart laser with automated beam quality control
Grant 6,212,217 - Erie , et al. April 3, 2 | 2001-04-03 |
Narrow band laser with fine wavelength control
Grant 6,192,064 - Algots , et al. February 20, 2 | 2001-02-20 |
Automatic fluorine control system
Grant 6,151,349 - Gong , et al. November 21, 2 | 2000-11-21 |
Reliable modular production quality narrow-band high REP rate excimer laser
Grant 6,128,323 - Myers , et al. October 3, 2 | 2000-10-03 |
Wavelength shift correction technique for a laser
Grant 6,078,599 - Everage , et al. June 20, 2 | 2000-06-20 |
Laser-illuminated stepper or scanner with energy sensor feedback
Grant 6,067,306 - Sandstrom , et al. May 23, 2 | 2000-05-23 |
Compact high resolution grating spectrometer
Grant 6,061,129 - Ershov , et al. May 9, 2 | 2000-05-09 |
Automatic fluorine control system
Grant 6,028,880 - Carlesi , et al. February 22, 2 | 2000-02-22 |
Laser having baffled enclosure
Grant 6,021,150 - Partio , et al. February 1, 2 | 2000-02-01 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser
Grant 6,018,537 - Hofmann , et al. January 25, 2 | 2000-01-25 |
Narrow band excimer laser with gas additive
Grant 6,014,398 - Hofmann , et al. January 11, 2 | 2000-01-11 |
Pulse energy control for excimer laser
Grant 6,005,879 - Sandstrom , et al. December 21, 1 | 1999-12-21 |
Reliable. modular, production quality narrow-band KRF excimer laser
Grant 5,991,324 - Knowles , et al. November 23, 1 | 1999-11-23 |
Narrow band excimer laser
Grant 5,982,800 - Ishihara , et al. November 9, 1 | 1999-11-09 |
Wavelength reference for excimer laser
Grant 5,978,391 - Das , et al. November 2, 1 | 1999-11-02 |
Process for selecting operating range for narrow band excimer laser
Grant 5,887,014 - Das March 23, 1 | 1999-03-23 |
Excimer laser with magnetic bearings supporting fan
Grant 5,848,089 - Sarkar , et al. December 8, 1 | 1998-12-08 |
Laser having improved beam quality and reduced operating cost
Grant 5,748,656 - Watson , et al. May 5, 1 | 1998-05-05 |
Pulse power generating circuit with energy recovery
Grant 5,729,562 - Birx , et al. March 17, 1 | 1998-03-17 |
External high voltage control for a laser system
Grant 5,657,334 - Das , et al. August 12, 1 | 1997-08-12 |
Maintenance strategy control system and monitoring method for gas discharge lasers
Grant 5,646,954 - Das , et al. July 8, 1 | 1997-07-08 |
Excimer laser
Grant 5,586,134 - Das , et al. December 17, 1 | 1996-12-17 |
Excimer laser
Grant 5,377,215 - Das , et al. December 27, 1 | 1994-12-27 |
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