loadpatents
Patent applications and USPTO patent grants for Dao; Giang.The latest application filed is for "filtered mask enclosure".
Patent | Date |
---|---|
Apparatus for keeping contamination away from a mask during exposure with light Grant 6,793,717 - Wu , et al. September 21, 2 | 2004-09-21 |
Apparatus and method for removing photomask contamination and controlling electrostatic discharge Grant 6,734,443 - Zheng , et al. May 11, 2 | 2004-05-11 |
Filtered mask enclosure App 20040045433 - Wu, Han-Ming ;   et al. | 2004-03-11 |
In-situ balancing for phase-shifting mask Grant 6,660,649 - Dao , et al. December 9, 2 | 2003-12-09 |
Method and apparatus for physical image based inspection system Grant 6,625,800 - Qian , et al. September 23, 2 | 2003-09-23 |
Detection of contaminants on low wavelength masks Grant 6,611,327 - Ramamoorthy , et al. August 26, 2 | 2003-08-26 |
Filtered mask enclosure Grant 6,610,123 - Wu , et al. August 26, 2 | 2003-08-26 |
Filtered Mask Enclosure App 20030110944 - Wu, Han-Ming ;   et al. | 2003-06-19 |
In-situ balancing for phase-shifting mask Grant 6,548,417 - Dao , et al. April 15, 2 | 2003-04-15 |
In-situ balancing for phase-shifting mask App 20030054262 - Dao, Giang ;   et al. | 2003-03-20 |
In-situ Balancing For Phase-shifting Mask App 20030054260 - Dao, Giang ;   et al. | 2003-03-20 |
Apparatus and method for removing photomask contamination and controlling electrostatic discharge App 20020179852 - Zheng, Jun Fei ;   et al. | 2002-12-05 |
Detection of contaminants on low wavelength masks App 20020135759 - Ramamoorthy, Arun ;   et al. | 2002-09-26 |
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