loadpatents
Patent applications and USPTO patent grants for Dansberg; Michel Pieter.The latest application filed is for "load lock system and method for transferring substrates in a lithography system".
Patent | Date |
---|---|
Enclosure for a target processing machine Grant 10,144,134 - Vijverberg , et al. De | 2018-12-04 |
Load lock system and method for transferring substrates in a lithography system Grant 10,087,019 - Dansberg , et al. October 2, 2 | 2018-10-02 |
Lithography system, method of clamping and wafer table Grant 9,665,013 - De Boer , et al. May 30, 2 | 2017-05-30 |
Lithography system, method of clamping and wafer table Grant 9,645,511 - De Boer , et al. May 9, 2 | 2017-05-09 |
Load Lock System And Method For Transferring Substrates In A Lithography System App 20160137427 - Dansberg; Michel Pieter ;   et al. | 2016-05-19 |
Projection system with flexible coupling Grant 9,268,216 - Peijster , et al. February 23, 2 | 2016-02-23 |
Enclosure For A Target Processing Machine App 20150321356 - Vijverberg; Joep Gerard ;   et al. | 2015-11-12 |
Lithography system and method for storing positional data of a target Grant 9,009,631 - Looije , et al. April 14, 2 | 2015-04-14 |
Lithography System, Method Of Clamping And Wafer Table App 20140185028 - DE BOER; Guido ;   et al. | 2014-07-03 |
Lithography System, Method Of Clamping And Wafer Table App 20140176920 - DE BOER; Guido ;   et al. | 2014-06-26 |
Lithography system, method of clamping and wafer table Grant 8,705,010 - De Boer , et al. April 22, 2 | 2014-04-22 |
Projection System With Flexible Coupling App 20130070223 - Peijster; Jerry Johannes Martinus ;   et al. | 2013-03-21 |
Lithography System And Method For Storing Positional Data Of A Target App 20130016327 - Looije; Alexius Otto ;   et al. | 2013-01-17 |
Lithography system, method of heat dissipation and frame Grant 8,325,321 - Kruit , et al. December 4, 2 | 2012-12-04 |
Apparatus configured to position a workpiece Grant 7,679,720 - Dansberg , et al. March 16, 2 | 2010-03-16 |
Lithography system, method of clamping and wafer table App 20090027649 - De Boer; Guido ;   et al. | 2009-01-29 |
Apparatus configured to position a workpiece App 20080174750 - Dansberg; Michel Pieter ;   et al. | 2008-07-24 |
Lithographic apparatus and device manufacturing method Grant 7,359,032 - Dansberg , et al. April 15, 2 | 2008-04-15 |
Lithography system, method of heat dissipation and frame App 20080024743 - Kruit; Pieter ;   et al. | 2008-01-31 |
Lithographic apparatus and device manufacturing method App 20050083496 - Dansberg, Michel Pieter ;   et al. | 2005-04-21 |
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