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Patent applications and USPTO patent grants for Daneshpanah; Mohammad M..The latest application filed is for "method, system and computer program product for generating high density registration maps for masks".
Patent | Date |
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Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors Grant 9,424,636 - Laske , et al. August 23, 2 | 2016-08-23 |
Method, System And Computer Program Product For Generating High Density Registration Maps For Masks App 20150310160 - LASKE; Frank ;   et al. | 2015-10-29 |
Method For Measuring Positions Of Structures On A Mask And Thereby Determining Mask Manufacturing Errors App 20150248756 - LASKE; Frank ;   et al. | 2015-09-03 |
System And Method For Determining The Position Of Defects On Objects, Coordinate Measuring Unit And Computer Program For Coordinate Measuring Unit App 20150226539 - ROETH; Klaus-Dieter ;   et al. | 2015-08-13 |
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