Daneman; Michael J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Daneman; Michael J..The latest application filed is for "release chemical protection for integrated complementary metal-oxide-semiconductor (cmos) and micro-electro-mechanical (mems) devices".

Company Profile

2.26.24

Daneman; Michael J. - Campbell CA
Daneman; Michael J. - Pacifica CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices Grant 10,683,205 - Daneman , et al.	2020-06-16
MEMS device and process for RF and low resistance applications Grant 10,508,022 - Daneman , et al. Dec	2019-12-17
Aluminum nitride (AlN) devices with infrared absorption structural layer Grant 10,294,097 - Tsai , et al.	2019-05-21
MEMS device and process for RF and low resistance applications Grant 10,160,635 - Daneman , et al. Dec	2018-12-25
Release Chemical Protection For Integrated Complementary Metal-oxide-semiconductor (cmos) And Micro-electro-mechanical (mems) Devices App 20180346323 - Daneman; Michael J. ; et al.	2018-12-06
Mems Device And Process For Rf And Low Resistance Applications App 20180312394 - DANEMAN; Michael J. ; et al.	2018-11-01
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices Grant 10,071,906 - Daneman , et al. September 11, 2	2018-09-11
ALUMINUM NITRIDE (AlN) DEVICES WITH INFRARED ABSORPTION STRUCTURAL LAYER App 20170327370 - Tsai; Julius Ming-Lin ; et al.	2017-11-16
Mems Device And Process For Rf And Low Resistance Applications App 20170297900 - DANEMAN; Michael J. ; et al.	2017-10-19
ALUMINUM NITRIDE (AlN) DEVICES WITH INFRARED ABSORPTION STRUCTURAL LAYER App 20170022054 - Tsai; Julius Ming-Lin ; et al.	2017-01-26
Release Chemical Protection For Integrated Complementary Metal-oxide-semiconductor (cmos) And Micro-electro-mechanical (mems) Devices App 20170015547 - Daneman; Michael J. ; et al.	2017-01-19
Aluminum nitride (AlN) devices with infrared absorption structural layer Grant 9,511,994 - Tsai , et al. December 6, 2	2016-12-06
Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices Grant 9,487,396 - Daneman , et al. November 8, 2	2016-11-08
Release Chemical Protection For Integrated Complementary Metal-oxide-semiconductor (cmos) And Micro-electro-mechanical (mems) Devices App 20160068388 - Daneman; Michael J. ; et al.	2016-03-10
ALUMINUM NITRIDE (AlN) DEVICES WITH INFRARED ABSORPTION STRUCTURAL LAYER App 20150298965 - Tsai; Julius Ming-Lin ; et al.	2015-10-22
MEMS device and process for RF and low resistance applications Grant 9,114,977 - Daneman , et al. August 25, 2	2015-08-25
Mems Device And Process For Rf And Low Resistance Applications App 20140145244 - DANEMAN; Michael J. ; et al.	2014-05-29
Internal electrical contact for enclosed MEMS devices Grant 8,564,076 - Huang , et al. October 22, 2	2013-10-22
MEMS device including an electrical interconnect through a substrate Grant 8,384,134 - Daneman , et al. February 26, 2	2013-02-26
Process For A Sealed Mems Device With A Portion Exposed To The Environment App 20130001710 - DANEMAN; Michael J. ; et al.	2013-01-03
Wafer Level Packaging Of Mems Devices App 20120235297 - DANEMAN; Michael J. ; et al.	2012-09-20
Wafer Level Packaging Of Mems Devices App 20120235251 - DANEMAN; Michael J. ; et al.	2012-09-20
Optical cross-connect system Grant 7,183,633 - Daneman , et al. February 27, 2	2007-02-27
High contrast grating light valve type device Grant 7,177,081 - Tomita , et al. February 13, 2	2007-02-13
Three dimensional optical switches and beam steering modules Grant 7,023,604 - Behin , et al. April 4, 2	2006-04-04
MEMS mirrors with precision clamping mechanism Grant 6,888,979 - Behin , et al. May 3, 2	2005-05-03
Fabrication and controlled release of structures using etch-stop trenches Grant 6,887,391 - Daneman , et al. May 3, 2	2005-05-03
Tiling of optical MEMS devices Grant 6,873,756 - Beerling , et al. March 29, 2	2005-03-29
Use Of Applied Force To Improve Mems Switch Performance App 20040247237 - Chaparala, Murali ; et al.	2004-12-09
Use of applied force to improve MEMS switch performance Grant 6,819,820 - Chaparala , et al. November 16, 2	2004-11-16
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing Grant 6,819,822 - Behin , et al. November 16, 2	2004-11-16
Mems element having perpendicular portion formed from substrate Grant 6,813,412 - Lin November 2, 2	2004-11-02
Capacitive sensing scheme for digital control state detection in optical switches Grant 6,788,520 - Behin , et al. September 7, 2	2004-09-07
Mechanical landing pad formed on the underside of a MEMS device Grant 6,764,936 - Daneman , et al. July 20, 2	2004-07-20
High Contrast Grating Light Valve App 20040001257 - Tomita, Akira ; et al.	2004-01-01
Tiling of optical MEMS devices App 20030048979 - Beerling, Timothy E. ; et al.	2003-03-13
Conductive equipotential landing pads formed on the underside of a MEMS device Grant 6,528,887 - Daneman , et al. March 4, 2	2003-03-04
Maintaining the state of a MEMS device in the event of a power failure Grant 6,514,781 - Chang , et al. February 4, 2	2003-02-04
Maintaining The State Of A Mems Device In The Event Of A Power Failure App 20030008420 - Chang, Mark W. ; et al.	2003-01-09
Apparatus And Method For 2-dimensional Steered-beam Nxm Optical Switch Using Single-axis Mirror Arrays App 20020135855 - Daneman, Michael J. ; et al.	2002-09-26
Optical beam steering switching system Grant 6,437,902 - Daneman , et al. August 20, 2	2002-08-20
Three Dimensional optical switches and beam steering modules App 20020097478 - Behin, Behrang ; et al.	2002-07-25
Enclosure for MEMS apparatus and method of using the same App 20020075551 - Daneman, Michael J. ; et al.	2002-06-20
MEMS mirrors with precision clamping mechanism App 20020064337 - Behin, Behrang ; et al.	2002-05-30
Process for creating an electrically isolated electrode on a sidewall of a cavity in a base App 20020046985 - Daneman, Michael J. ; et al.	2002-04-25
Mechanical landing pad formed on the underside of a MEMS device App 20010055831 - Daneman, Michael J. ; et al.	2001-12-27
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics Grant 6,330,102 - Daneman , et al. December 11, 2	2001-12-11
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing App 20010048784 - Behin, Behrang ; et al.	2001-12-06
Optical beam steering switching system App 20010043386 - Daneman, Michael J. ; et al.	2001-11-22

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