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Patent applications and USPTO patent grants for Dandavate; Gautam Shashank.The latest application filed is for "retaining ring having inner surfaces with facets".
Patent | Date |
---|---|
Retaining ring having inner surfaces with features Grant 11,453,099 - Reedy , et al. September 27, 2 | 2022-09-27 |
Inner retaining ring and outer retaining ring for carrier head Grant 11,173,579 - Chen , et al. November 16, 2 | 2021-11-16 |
Retaining Ring Having Inner Surfaces with Facets App 20210249276 - Oh; Jeonghoon ;   et al. | 2021-08-12 |
Retaining ring having inner surfaces with facets Grant 11,056,350 - Oh , et al. July 6, 2 | 2021-07-06 |
Retaining Ring Having Inner Surfaces with Features App 20200114489 - Reedy; Steven Mark ;   et al. | 2020-04-16 |
Retaining ring having inner surfaces with features Grant 10,500,695 - Reedy , et al. Dec | 2019-12-10 |
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20180304441 - Chen; Hung Chih ;   et al. | 2018-10-25 |
Inner retaining ring and outer retaining ring for carrier head Grant 10,022,837 - Chen , et al. July 17, 2 | 2018-07-17 |
Configurable pressure design for multizone chemical mechanical planarization polishing head Grant 9,610,672 - Oh , et al. April 4, 2 | 2017-04-04 |
Retaining Ring Having Inner Surfaces with Features App 20160346897 - Reedy; Steven Mark ;   et al. | 2016-12-01 |
Retaining ring with selected stiffness and thickness Grant 9,492,905 - Chen , et al. November 15, 2 | 2016-11-15 |
Retaining ring having inner surfaces with facets Grant 9,368,371 - Oh , et al. June 14, 2 | 2016-06-14 |
Retaining Ring Having Inner Surfaces With Facets App 20160151879 - Oh; Jeonghoon ;   et al. | 2016-06-02 |
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20160082571 - Chen; Hung Chih ;   et al. | 2016-03-24 |
Configurable Pressure Design For Multizone Chemical Mechanical Planarization Polishing Head App 20160059377 - OH; Jeonghoon ;   et al. | 2016-03-03 |
Retaining Ring Having Inner Surfaces with Facets App 20150303070 - Oh; Jeonghoon ;   et al. | 2015-10-22 |
Retaining Ring With Selected Stiffness And Thickness App 20150209930 - Chen; Hung Chih ;   et al. | 2015-07-30 |
Monitoring retaining ring thickness and pressure control Grant 9,067,295 - Deshpande , et al. June 30, 2 | 2015-06-30 |
Polishing head zone boundary smoothing Grant 9,050,699 - Chen , et al. June 9, 2 | 2015-06-09 |
Retaining ring with selected stiffness and thickness Grant 8,998,676 - Chen , et al. April 7, 2 | 2015-04-07 |
Inner retaining ring and outer retaining ring for carrier head Grant 8,840,446 - Chen , et al. September 23, 2 | 2014-09-23 |
Substrate Precession Mechanism For Cmp Polishing Head App 20140273756 - CHEN; Chih Hung ;   et al. | 2014-09-18 |
Carrier head with narrow inner ring and wide outer ring Grant 8,721,391 - Chen , et al. May 13, 2 | 2014-05-13 |
Retaining Ring With Selected Stiffness And Thickness App 20140120803 - Chen; Hung Chih ;   et al. | 2014-05-01 |
Monitoring Retaining Ring Thickness And Pressure Control App 20140027407 - Deshpande; Sameer ;   et al. | 2014-01-30 |
Sensors in Carrier Head of a CMP System App 20140020829 - Chen; Hung Chih ;   et al. | 2014-01-23 |
Apparatus and method for temperature control during polishing Grant 8,591,286 - Chen , et al. November 26, 2 | 2013-11-26 |
Polishing Head Zone Boundary Smoothing App 20130252518 - CHEN; Hung Chih ;   et al. | 2013-09-26 |
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20130149942 - Chen; Hung Chih ;   et al. | 2013-06-13 |
Polishing head zone boundary smoothing Grant 8,460,067 - Chen , et al. June 11, 2 | 2013-06-11 |
Apparatus And Method For Temperature Control During Polishing App 20120040592 - CHEN; HUNG CHIH ;   et al. | 2012-02-16 |
Carrier Head With Narrow Inner Ring And Wide Outer Ring App 20120034849 - Chen; Hung Chih ;   et al. | 2012-02-09 |
Substrate Holder To Reduce Substrate Edge Stress During Chemical Mechanical Polishing App 20120021673 - Chen; Hung Chih ;   et al. | 2012-01-26 |
Polishing Head Zone Boundary Smoothing App 20100291842 - CHEN; HUNG CHIH ;   et al. | 2010-11-18 |
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