Dan; Arkaprava
Patent Applications and Registrations
Patent applications and USPTO patent grants for Dan; Arkaprava.The latest application filed is for "in-situ dc plasma for cleaning pedestal heater".
- Dan; Arkaprava - San Jose CA
- DAN; Arkaprava - Santa Clara CA
| Patent | Date |
|---|---|
| In-Situ DC Plasma For Cleaning Pedestal Heater App 20220152668 - Ulavi; Tejas ; et al. | 2022-05-19 |
| In-situ DC plasma for cleaning pedestal heater Grant 11,260,432 - Ulavi , et al. March 1, 2 | 2022-03-01 |
| Complementary pattern station designs Grant 11,220,747 - AuBuchon , et al. January 11, 2 | 2022-01-11 |
| Methods Of Controlling Gas Pressure In Gas-pulsing-based Precursor Distribution Systems App 20210398823 - Cimino; Mauro ; et al. | 2021-12-23 |
| Method Of Tuning Film Properties Of Metal Nitride Using Plasma App 20210351071 - LIU; Wenyi ; et al. | 2021-11-11 |
| Apparatus and Methods for Real-Time Wafer Chucking Detection App 20210351060 - Ulavi; Tejas ; et al. | 2021-11-11 |
| Dithering Or Dynamic Offsets For Improved Uniformity App 20210087681 - AuBuchon; Joseph ; et al. | 2021-03-25 |
| In-Situ DC Plasma For Cleaning Pedestal Heater App 20210086239 - Ulavi; Tejas ; et al. | 2021-03-25 |
| Peald Titanium Nitride With Direct Microwave Plasma App 20210050186 - Chen; Hanhong ; et al. | 2021-02-18 |
| Complementary Pattern Station Designs App 20200131636 - AuBuchon; Joseph ; et al. | 2020-04-30 |
| Methods Of Operating A Spatial Deposition Tool App 20200090978 - AuBuchon; Joseph ; et al. | 2020-03-19 |
| Methods Of Operating A Spatial Deposition Tool App 20200066572 - AuBuchon; Joseph ; et al. | 2020-02-27 |
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