loadpatents
Patent applications and USPTO patent grants for Dan; Arkaprava.The latest application filed is for "in-situ dc plasma for cleaning pedestal heater".
Patent | Date |
---|---|
In-Situ DC Plasma For Cleaning Pedestal Heater App 20220152668 - Ulavi; Tejas ;   et al. | 2022-05-19 |
In-situ DC plasma for cleaning pedestal heater Grant 11,260,432 - Ulavi , et al. March 1, 2 | 2022-03-01 |
Complementary pattern station designs Grant 11,220,747 - AuBuchon , et al. January 11, 2 | 2022-01-11 |
Methods Of Controlling Gas Pressure In Gas-pulsing-based Precursor Distribution Systems App 20210398823 - Cimino; Mauro ;   et al. | 2021-12-23 |
Method Of Tuning Film Properties Of Metal Nitride Using Plasma App 20210351071 - LIU; Wenyi ;   et al. | 2021-11-11 |
Apparatus and Methods for Real-Time Wafer Chucking Detection App 20210351060 - Ulavi; Tejas ;   et al. | 2021-11-11 |
Dithering Or Dynamic Offsets For Improved Uniformity App 20210087681 - AuBuchon; Joseph ;   et al. | 2021-03-25 |
In-Situ DC Plasma For Cleaning Pedestal Heater App 20210086239 - Ulavi; Tejas ;   et al. | 2021-03-25 |
Peald Titanium Nitride With Direct Microwave Plasma App 20210050186 - Chen; Hanhong ;   et al. | 2021-02-18 |
Complementary Pattern Station Designs App 20200131636 - AuBuchon; Joseph ;   et al. | 2020-04-30 |
Methods Of Operating A Spatial Deposition Tool App 20200090978 - AuBuchon; Joseph ;   et al. | 2020-03-19 |
Methods Of Operating A Spatial Deposition Tool App 20200066572 - AuBuchon; Joseph ;   et al. | 2020-02-27 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.