loadpatents
Patent applications and USPTO patent grants for Dammel; Ralph R.The latest application filed is for "composition for coating over a photoresist pattern comprising a lactam".
Patent | Date |
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Silicon-containing composition for fine pattern formation and method for fine pattern formation using the same Grant 8,663,906 - Dammel , et al. March 4, 2 | 2014-03-04 |
Silicon-based antireflective coating compositions Grant 8,524,441 - Zhang , et al. September 3, 2 | 2013-09-03 |
Composition for Coating over a Photoresist Pattern Comprising a Lactam App 20120219919 - Thiyagarajan; Muthiah ;   et al. | 2012-08-30 |
Edge Bead Remover For Coatings App 20120108067 - Neisser; Mark O. ;   et al. | 2012-05-03 |
Hardmask process for forming a reverse tone image using polysilazane Grant 8,084,186 - Abdallah , et al. December 27, 2 | 2011-12-27 |
Positive-Working Photoimageable Bottom Antireflective Coating App 20110086312 - Dammel; Ralph R. ;   et al. | 2011-04-14 |
Composition for coating over a photoresist pattern comprising a lactam Grant 7,923,200 - Thiyagarajan , et al. April 12, 2 | 2011-04-12 |
Photoactive compounds Grant 7,833,693 - Rahman , et al. November 16, 2 | 2010-11-16 |
Process of imaging a photoresist with multiple antireflective coatings Grant 7,816,071 - Abdallah , et al. October 19, 2 | 2010-10-19 |
Silicon-containing Composition For Fine Pattern Formation And Method For Fine Pattern Formation Using The Same App 20100255430 - Dammel; Ralph R. ;   et al. | 2010-10-07 |
Hardmask Process for Forming a Reverse Tone Image Using Polysilazane App 20100203299 - Abdallah; David ;   et al. | 2010-08-12 |
Composition for coating over a photoresist pattern Grant 7,745,077 - Thiyagarajan , et al. June 29, 2 | 2010-06-29 |
Silicon-based Antireflective Coating Compositions App 20100092895 - Zhang; Ruzhi ;   et al. | 2010-04-15 |
Hardmask Process for Forming a Reverse Tone Image App 20100040838 - Abdallah; David J. ;   et al. | 2010-02-18 |
Composition for Coating over a Photoresist Pattern App 20090317739 - Thiyagarajan; Muthiah ;   et al. | 2009-12-24 |
Spin-on Graded K Silicon Antireflective Coating App 20090274974 - Abdallah; David ;   et al. | 2009-11-05 |
Photoresist Image-Forming Process Using Double Patterning App 20090253080 - Dammel; Ralph R. ;   et al. | 2009-10-08 |
Process for Shrinking Dimensions Between Photoresist Pattern Comprising a Pattern Hardening Step App 20090253081 - Abdallah; David ;   et al. | 2009-10-08 |
Composition for coating over a photoresist pattern Grant 7,595,141 - Kudo , et al. September 29, 2 | 2009-09-29 |
Photoactive compounds Grant 7,547,501 - Dammel , et al. June 16, 2 | 2009-06-16 |
Photoresist composition for deep UV and process thereof Grant 7,537,879 - Houlihan , et al. May 26, 2 | 2009-05-26 |
Photoactive compounds Grant 7,521,170 - Rahman , et al. April 21, 2 | 2009-04-21 |
Photoactive Compounds App 20090087782 - Rahman; M. Dalil ;   et al. | 2009-04-02 |
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof Grant 7,473,512 - Houlihan , et al. January 6, 2 | 2009-01-06 |
Composition for Coating over a Photoresist Pattern Comprising a Lactam App 20080248427 - Thiyagarajan; Muthiah ;   et al. | 2008-10-09 |
Antireflective coating compositions Grant 7,416,834 - Abdallah , et al. August 26, 2 | 2008-08-26 |
Polymers Useful in Photoresist Compositions and Compositions Thereof App 20080171270 - Padmanaban; Munirathna ;   et al. | 2008-07-17 |
Photoactive Compounds App 20080085463 - Dammel; Ralph R. ;   et al. | 2008-04-10 |
Photoresist composition for deep ultraviolet lithography Grant 7,351,521 - Dammel , et al. April 1, 2 | 2008-04-01 |
Antireflective coating compositions App 20080076059 - Abdallah; David J. ;   et al. | 2008-03-27 |
Photoresist composition for deep ultraviolet lithography App 20070172762 - Dammel; Ralph R. ;   et al. | 2007-07-26 |
Photoresist composition for deep ultraviolet lithography App 20070154841 - Dammel; Ralph R. ;   et al. | 2007-07-05 |
Photoresist composition for deep ultraviolet lithography Grant 7,211,366 - Dammel , et al. May 1, 2 | 2007-05-01 |
Photoactive compounds App 20070015084 - Rahman; M. Dalil ;   et al. | 2007-01-18 |
Process of imaging a photoresist with multiple antireflective coatings App 20060177772 - Abdallah; David J. ;   et al. | 2006-08-10 |
Process of imaging a photoresist with multiple antireflective coatings App 20060177774 - Abdallah; David J. ;   et al. | 2006-08-10 |
Photoresist composition for deep UV and process thereof App 20060110677 - Houlihan; Francis M. ;   et al. | 2006-05-25 |
Composition for coating over a photoresist pattern App 20060088788 - Kudo; Takanori ;   et al. | 2006-04-27 |
Photoresist composition Grant 7,033,728 - Dammel April 25, 2 | 2006-04-25 |
Negative-working photoimageable bottom antireflective coating App 20060063105 - Oberlander; Joseph E. ;   et al. | 2006-03-23 |
Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds Grant 6,991,888 - Padmanaban , et al. January 31, 2 | 2006-01-31 |
Aqueous edge bead remover App 20050282093 - Dammel, Ralph R. ;   et al. | 2005-12-22 |
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof App 20050202347 - Houlihan, Francis M. ;   et al. | 2005-09-15 |
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof App 20050202351 - Houlihan, Francis M. ;   et al. | 2005-09-15 |
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof App 20050202340 - Houlihan, Francis M. ;   et al. | 2005-09-15 |
Photoresist composition App 20050147915 - Dammel, Ralph R. | 2005-07-07 |
Photoresist composition for imaging thick films Grant 6,852,465 - Dammel , et al. February 8, 2 | 2005-02-08 |
Positive-working photoimageable bottom antireflective coating Grant 6,844,131 - Oberlander , et al. January 18, 2 | 2005-01-18 |
Negative-acting aqueous photoresist composition Grant 6,800,415 - Lu , et al. October 5, 2 | 2004-10-05 |
Negative deep ultraviolet photoresist Grant 6,800,416 - Kudo , et al. October 5, 2 | 2004-10-05 |
Photoresist composition for imaging thick films App 20040185368 - Dammel, Ralph R. ;   et al. | 2004-09-23 |
Photoresist composition for deep ultraviolet lithography App 20040166433 - Dammel, Ralph R. ;   et al. | 2004-08-26 |
Photoresist composition for deep ultraviolet lithography App 20040166434 - Dammel, Ralph R. ;   et al. | 2004-08-26 |
Photoresist composition for deep ultraviolet lithography Grant 6,737,215 - Dammel , et al. May 18, 2 | 2004-05-18 |
Photoresist composition for deep UV radiation containing an additive Grant 6,723,488 - Kudo , et al. April 20, 2 | 2004-04-20 |
Polymer suitable for photoresist compositions Grant 6,686,429 - Dammel , et al. February 3, 2 | 2004-02-03 |
Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds App 20030235775 - Padmanaban, Munirathna ;   et al. | 2003-12-25 |
Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds App 20030235782 - Padmanaban, Munirathna ;   et al. | 2003-12-25 |
Negative-working photoimageable bottom antireflective coating App 20030215736 - Oberlander, Joseph E. ;   et al. | 2003-11-20 |
Positive-working photoimageable bottom antireflective coating App 20030129531 - Oberlander, Joseph E. ;   et al. | 2003-07-10 |
Negative deep ultraviolet photoresist App 20030129527 - Kudo, Takanori ;   et al. | 2003-07-10 |
Negative-acting chemically amplified photoresist composition Grant 6,576,394 - Xu , et al. June 10, 2 | 2003-06-10 |
Photoresist composition for deep UV radiation containing an additive App 20030087180 - Kudo, Takanori ;   et al. | 2003-05-08 |
Negative- acting aqueous photoresist composition App 20030077539 - Lu, Ping-Hung ;   et al. | 2003-04-24 |
Novel Polymer Suitable For Photoresist Compositions App 20030013831 - Dammel, Ralph R. ;   et al. | 2003-01-16 |
Photoresist composition for deep ultraviolet lithography App 20020187419 - Dammel, Ralph R. ;   et al. | 2002-12-12 |
Photoresist composition for deep UV radiation Grant 6,365,322 - Padmanaban , et al. April 2, 2 | 2002-04-02 |
Antireflective coating compositions for photoresist compositions and use thereof Grant 5,994,430 - Ding , et al. November 30, 1 | 1999-11-30 |
Process for obtaining a lift-off imaging profile Grant 5,922,503 - Spak , et al. July 13, 1 | 1999-07-13 |
Antireflective coating for photoresist compositions Grant 5,733,714 - McCulloch , et al. March 31, 1 | 1998-03-31 |
Method of using a Lewis base to control molecular weight of novolak resins Grant 5,688,893 - Rahman , et al. November 18, 1 | 1997-11-18 |
Antireflective coatings for photoresist compositions Grant 5,652,317 - McCulloch , et al. July 29, 1 | 1997-07-29 |
Aqueous antireflective coatings for photoresist compositions Grant 5,652,297 - McCulloch , et al. July 29, 1 | 1997-07-29 |
Using a Lewis base to control molecular weight of novolak resins Grant 5,614,349 - Rahman , et al. March 25, 1 | 1997-03-25 |
Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists Grant 5,476,750 - Rahman , et al. December 19, 1 | 1995-12-19 |
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