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Processing Chamber With Multiple Plasma Units App 20210159052 - Daito; Kazuya ;   et al. | 2021-05-27 |
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Selective Tungsten Deposition At Low Temperatures App 20200335395 - Xu; Yi ;   et al. | 2020-10-22 |
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Method For Forming A Metal Gapfill App 20200303250 - CEN; Xi ;   et al. | 2020-09-24 |
Method Of Reducing Effective Oxide Thickness In A Semiconductor Structure App 20200176247 - LI; LUPING ;   et al. | 2020-06-04 |
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Methods To Selectively Deposit Corrosion-Free Metal Contacts App 20180145034 - Xu; Yi ;   et al. | 2018-05-24 |
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Tungsten Growth Modulation By Controlling Surface Composition App 20140106083 - WU; KAI ;   et al. | 2014-04-17 |
Pvd Aln Film With Oxygen Doping For A Low Etch Rate Hardmask Film App 20130296158 - CAO; Yong ;   et al. | 2013-11-07 |