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Method Of Measuring Efficiency For Optical Devices
App 20220291082 - FU; Jinxin ; et al. | 2022-09-15 |
Blocker plate for use in a substrate process chamber
Grant 11,421,322 - Yuan , et al. August 23, 2 | 2022-08-23 |
Selective tungsten deposition at low temperatures
Grant 11,404,313 - Xu , et al. August 2, 2 | 2022-08-02 |
Selective Tungsten Deposition Within Trench Structures
App 20220181201 - XU; Yi ; et al. | 2022-06-09 |
Method for forming a metal gapfill
Grant 11,355,391 - Cen , et al. June 7, 2 | 2022-06-07 |
Illumination System For Ar Metrology Tool
App 20220163423 - SUN; Yangyang ; et al. | 2022-05-26 |
Optical Device Metrology Systems And Related Methods
App 20220163382 - FU; Jinxin ; et al. | 2022-05-26 |
In-line Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220122241 - SUN; Yangyang ; et al. | 2022-04-21 |
In-line Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220122240 - SUN; Yangyang ; et al. | 2022-04-21 |
See-through Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220121030 - SUN; Yangyang ; et al. | 2022-04-21 |
See-through Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220120700 - SUN; Yangyang ; et al. | 2022-04-21 |
Multiple-channel Showerhead Design And Methods In Manufacturing
App 20220010431 - DAITO; Kazuya ; et al. | 2022-01-13 |
Low-temperature Plasma Pre-clean For Selective Gap Fill
App 20210398850 - Xu; Yi ; et al. | 2021-12-23 |
Methods And Apparatus For Cleaning A Showerhead
App 20210335586 - YU; Tom H. ; et al. | 2021-10-28 |
Methods and Apparatus for Integrated Cobalt Disilicide Formation
App 20210327717 - Yu; Tom Ho Wing ; et al. | 2021-10-21 |
Method of reducing effective oxide thickness in a semiconductor structure
Grant 11,062,900 - Li , et al. July 13, 2 | 2021-07-13 |
Processing Chamber With Multiple Plasma Units
App 20210159052 - Daito; Kazuya ; et al. | 2021-05-27 |
Dual Plasma Pre-clean For Selective Gap Fill
App 20210159070 - Xu; Yi ; et al. | 2021-05-27 |
Selective Tungsten Deposition At Low Temperatures
App 20200335395 - Xu; Yi ; et al. | 2020-10-22 |
Apparatus to improve substrate temperature uniformity
Grant 10,793,951 - Tzu , et al. October 6, 2 | 2020-10-06 |
Method For Forming A Metal Gapfill
App 20200303250 - CEN; Xi ; et al. | 2020-09-24 |
Method Of Reducing Effective Oxide Thickness In A Semiconductor Structure
App 20200176247 - LI; LUPING ; et al. | 2020-06-04 |
System for measuring level of a precursor in a container
Grant 10,620,031 - Daito , et al. | 2020-04-14 |
Methods for depositing semiconductor films
Grant 10,535,527 - Xu , et al. Ja | 2020-01-14 |
Blocker Plate For Use In A Substrate Process Chamber
App 20190382895 - YUAN; XIAOXIONG ; et al. | 2019-12-19 |
Blocker plate for use in a substrate process chamber
Grant 10,508,339 - Yuan , et al. Dec | 2019-12-17 |
Substrate Processing Chamber Having Heated Showerhead Assembly
App 20190078210 - GUNGOR; FARUK ; et al. | 2019-03-14 |
Methods For Depositing Semiconductor Films
App 20190019684 - Xu; Yi ; et al. | 2019-01-17 |
Precursor Level Sensor
App 20180364089 - Daito; Kazuya ; et al. | 2018-12-20 |
Blocker Plate For Use In A Substrate Process Chamber
App 20180347043 - YUAN; XIAOXIONG ; et al. | 2018-12-06 |
Apparatus To Improve Substrate Temperature Uniformity
App 20180237916 - TZU; GWO-CHUAN ; et al. | 2018-08-23 |
Methods To Selectively Deposit Corrosion-Free Metal Contacts
App 20180145034 - Xu; Yi ; et al. | 2018-05-24 |
Apparatus to improve substrate temperature uniformity
Grant 9,957,615 - Tzu , et al. May 1, 2 | 2018-05-01 |
Methods for forming low-resistance contacts through integrated process flow systems
Grant 9,947,578 - Lei , et al. April 17, 2 | 2018-04-17 |
Methods For Forming Low-resistance Contacts Through Integrated Process Flow Systems
App 20170148670 - LEI; YU ; et al. | 2017-05-25 |
Methods for forming metal organic tungsten for middle of the line (MOL) applications
Grant 9,653,352 - Wu , et al. May 16, 2 | 2017-05-16 |
Tungsten growth modulation by controlling surface composition
Grant 9,169,556 - Wu , et al. October 27, 2 | 2015-10-27 |
PVD ALN film with oxygen doping for a low etch rate hardmask film
Grant 9,162,930 - Cao , et al. October 20, 2 | 2015-10-20 |
Methods For Forming Metal Organic Tungsten For Middle Of The Line (mol) Applications
App 20150294906 - WU; LIQI ; et al. | 2015-10-15 |
Apparatus To Improve Substrate Temperature Uniformity
App 20150075432 - TZU; GWO-CHUAN ; et al. | 2015-03-19 |
Tungsten Growth Modulation By Controlling Surface Composition
App 20140106083 - WU; KAI ; et al. | 2014-04-17 |
Pvd Aln Film With Oxygen Doping For A Low Etch Rate Hardmask Film
App 20130296158 - CAO; Yong ; et al. | 2013-11-07 |
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