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Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus Grant 11,035,034 - Daigo , et al. June 15, 2 | 2021-06-15 |
Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device Grant 10,844,470 - Daigo , et al. November 24, 2 | 2020-11-24 |
Vapor Phase Growth Apparatus And Vapor Phase Growth Method App 20200190692 - DAIGO; Yoshiaki ;   et al. | 2020-06-18 |
Vapor Phase Growth Method App 20200185220 - DAIGO; Yoshiaki | 2020-06-11 |
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Film forming method, method of manufacturing semiconductor light-emitting device, semiconductor light-emitting device, and illuminating device Grant 10,224,463 - Daigo | 2019-03-05 |
Film Forming Apparatus And Film Forming Method App 20180119280 - DAIGO; Yoshiaki ;   et al. | 2018-05-03 |
Epitaxial Film Forming Method, Sputtering Apparatus, Manufacturing Method Of Semiconductor Light-emitting Element, Semiconductor Light-emitting Element, And Illumination Device App 20170309480 - Daigo; Yoshiaki ;   et al. | 2017-10-26 |
Film Formation Method, Vacuum Processing Apparatus, Method Of Manufacturing Semiconductor Light Emitting Element, Semiconductor Light Emitting Element, Method Of Manufacturing Semiconductor Electronic Element, Semiconductor Electronic Element, And Illuminating Apparatus App 20170145588 - DAIGO; YOSHIAKI ;   et al. | 2017-05-25 |
Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device Grant 9,379,279 - Daigo June 28, 2 | 2016-06-28 |
Film forming method, vacuum processing apparatus, semiconductor light emitting element manufacturing method, semiconductor light emitting element, and illuminating device Grant 9,309,606 - Daigo April 12, 2 | 2016-04-12 |
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Film Forming Method, Method Of Manufacturing Semiconductor Light-emitting Device, Semiconductor Light-emitting Device, And Illuminating Device App 20150311399 - Daigo; Yoshiaki | 2015-10-29 |
Epitaxial Film Forming Method, Sputtering Apparatus, Manufacturing Method Of Semiconductor Light-emitting Element, Semiconductor Light-emitting Element, And Illumination Device App 20150102371 - DAIGO; Yoshiaki | 2015-04-16 |
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Film Forming Method, Vacuum Processing Apparatus, Semiconductor Light Emitting Element Manufacturing Method, Semiconductor Light Emitting Element, And Illuminating Device App 20140225154 - DAIGO; YOSHIAKI | 2014-08-14 |
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