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Patent applications and USPTO patent grants for Czerniak; Michael Roger.The latest application filed is for "vacuum pumping system".
Patent | Date |
---|---|
Apparatus for evacuating a corrosive effluent gas stream from a processing chamber Grant 10,625,205 - Bailey , et al. | 2020-04-21 |
Vacuum Pumping System App 20200047225 - Bailey; Christopher Mark ;   et al. | 2020-02-13 |
Apparatus For Evacuating A Corrosive Effluent Gas Stream From A Processing Chamber App 20180207581 - Bailey; Christopher Mark ;   et al. | 2018-07-26 |
Method of treating an exhaust gas stream Grant 9,631,810 - Czerniak , et al. April 25, 2 | 2017-04-25 |
Evacuation system alerts based on process tool systems bus monitoring Grant 9,081,379 - Smith , et al. July 14, 2 | 2015-07-14 |
Vacuum pumping systems Grant 8,793,007 - Philippe , et al. July 29, 2 | 2014-07-29 |
Method Of Controlling Operation Of A Processing System App 20120253500 - Smith; James Robert ;   et al. | 2012-10-04 |
Method of controlling operation of a processing system Grant 8,224,474 - Smith , et al. July 17, 2 | 2012-07-17 |
Method Of Treating An Exhaust Gas Stream App 20120090338 - Czerniak; Michael Roger ;   et al. | 2012-04-19 |
Vacuum Pumping Systems App 20110082580 - Philippe; Laurent Marc ;   et al. | 2011-04-07 |
Method of Pumping Gas App 20090269231 - Birch; Peter Hugh ;   et al. | 2009-10-29 |
Apparatus for conveying gases to and from a chamber Grant 7,445,023 - Czerniak November 4, 2 | 2008-11-04 |
Method of Controlling Operation of a Processing System App 20080262655 - Smith; James Robert ;   et al. | 2008-10-23 |
Gas combustion apparatus App 20080017108 - Czerniak; Michael Roger ;   et al. | 2008-01-24 |
Apparatus for conveying gases to and from a chamber App 20060289071 - Czerniak; Michael Roger | 2006-12-28 |
Treatment of exhaust gases App 20050123463 - Seeley, Andrew James ;   et al. | 2005-06-09 |
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