| Patent | Date |
|---|
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
Grant 6,905,578 - Moslehi , et al. June 14, 2 | 2005-06-14 |
Method for fabricating a semiconductor chip interconnect
Grant 6,812,126 - Paranjpe , et al. November 2, 2 | 2004-11-02 |
Rapid cycle chuck for low-pressure processing
Grant 6,705,394 - Moslehi , et al. March 16, 2 | 2004-03-16 |
Apparatus for supporting a substrate in a reaction chamber
Grant 6,692,575 - Omstead , et al. February 17, 2 | 2004-02-17 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,645,847 - Paranjpe , et al. November 11, 2 | 2003-11-11 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,627,995 - Paranjpe , et al. September 30, 2 | 2003-09-30 |
Method and system for physically-assisted chemical-vapor deposition
Grant 6,596,133 - Moslehi , et al. July 22, 2 | 2003-07-22 |
System for fabricating a device on a substrate with a process gas
Grant 6,544,341 - Omstead , et al. April 8, 2 | 2003-04-08 |
Thermally conductive chuck for vacuum processor
App 20030029610 - Moslehi, Mehrdad M. | 2003-02-13 |
Apparatus for dispensing gas for fabricating substrates
Grant 6,508,197 - Omstead , et al. January 21, 2 | 2003-01-21 |
Edge sealing structure for substrate in low-pressure processing environment
Grant 6,508,885 - Moslehi , et al. January 21, 2 | 2003-01-21 |
Method for forming a copper film on a substrate
Grant 6,461,675 - Paranjpe , et al. October 8, 2 | 2002-10-08 |
Method and apparatus for thin film deposition using an active shutter
Grant 6,444,103 - Moslehi , et al. September 3, 2 | 2002-09-03 |
Method of chemical-vapor deposition of a material
Grant 6,444,263 - Paranjpe , et al. September 3, 2 | 2002-09-03 |
Thermally conductive chuck with thermally separated sealing structures
Grant 6,378,600 - Moslehi April 30, 2 | 2002-04-30 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,365,502 - Paranjpe , et al. April 2, 2 | 2002-04-02 |
Semiconductor chip interconnect barrier material and fabrication method
Grant 6,294,836 - Paranjpe , et al. September 25, 2 | 2001-09-25 |
Method for fabricating a device on a substrate
Grant 6,274,495 - Omstead , et al. August 14, 2 | 2001-08-14 |
Method for planarized deposition of a material
Grant 6,245,655 - Moslehi June 12, 2 | 2001-06-12 |
Low-pressure processing system for magnetic orientation of thin magnetic film
Grant 6,235,164 - Gerrish , et al. May 22, 2 | 2001-05-22 |
Method for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
Grant 6,197,166 - Moslehi March 6, 2 | 2001-03-06 |
Method and system for dispensing process gas for fabricating a device on a substrate
Grant 6,190,732 - Omstead , et al. February 20, 2 | 2001-02-20 |
High-performance energy transfer system and method for thermal processing applications
Grant 6,188,044 - Lee , et al. February 13, 2 | 2001-02-13 |
Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
Grant 6,136,165 - Moslehi October 24, 2 | 2000-10-24 |
Shutter for thin-film processing equipment
Grant 6,132,805 - Moslehi October 17, 2 | 2000-10-17 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
Grant 6,126,790 - Moslehi , et al. October 3, 2 | 2000-10-03 |
Thin-film processing electromagnet for low-skew magnetic orientation
Grant 6,106,682 - Moslehi , et al. August 22, 2 | 2000-08-22 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing
Grant 6,051,113 - Moslehi April 18, 2 | 2000-04-18 |
Wafer handler for multi-station tool
Grant 6,048,162 - Moslehi April 11, 2 | 2000-04-11 |
Multiple-coil electromagnet for magnetically orienting thin films
Grant 6,042,707 - Moslehi , et al. March 28, 2 | 2000-03-28 |
Ultra-high vacuum apparatus and method for high productivity physical vapor deposition.
Grant 6,039,848 - Moslehi , et al. March 21, 2 | 2000-03-21 |
Method for automated calibration of temperature sensors in rapid thermal processing equipment
Grant 6,004,029 - Moslehi , et al. December 21, 1 | 1999-12-21 |
Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment
Grant 5,976,261 - Moslehi , et al. November 2, 1 | 1999-11-02 |
Thermally conductive chuck for vacuum processor
Grant 5,936,829 - Moslehi August 10, 1 | 1999-08-10 |
Sputtering apparatus with magnetic orienting device for thin film deposition
Grant 5,902,466 - Gerrish , et al. May 11, 1 | 1999-05-11 |
Temperature controlled chuck for vacuum processing
Grant 5,775,416 - Heimanson , et al. July 7, 1 | 1998-07-07 |
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
Grant 5,746,897 - Heimanson , et al. May 5, 1 | 1998-05-05 |
Rapid thermal processing high-performance multizone illuminator for wafer backside heating
Grant 5,715,361 - Moslehi February 3, 1 | 1998-02-03 |
Magnetic orienting device for thin film deposition and method of use
Grant 5,630,916 - Gerrish , et al. May 20, 1 | 1997-05-20 |
Apple-shaped magnetron for sputtering system
Grant 5,248,402 - Ballentine , et al. September 28, 1 | 1993-09-28 |
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