| Patent | Date |
|---|
Systems And Methods For Nitride-containing Film Removal
App 20220254648 - Wang; Baiwei ; et al. | 2022-08-11 |
Systems And Methods For Tungsten-containing Film Removal
App 20220165580 - Cui; Zhenjiang ; et al. | 2022-05-26 |
Chamber conditioning and removal processes
Grant 11,328,909 - Zhang , et al. May 10, 2 | 2022-05-10 |
Etching of Metal Oxides Using Fluorine and Metal Halides
App 20220139720 - Woods; Keenan N. ; et al. | 2022-05-05 |
Systems And Methods For Selective Metal Compound Removal
App 20220084832 - Cui; Zhenjiang ; et al. | 2022-03-17 |
Etching of metal oxides using fluorine and metal halides
Grant 11,239,091 - Woods , et al. February 1, 2 | 2022-02-01 |
Systems and methods for etching metals and metal derivatives
Grant 11,121,002 - Cui , et al. September 14, 2 | 2021-09-14 |
Systems and methods for aluminum-containing film removal
Grant 11,062,921 - Cui , et al. July 13, 2 | 2021-07-13 |
Etching of Metal Oxides Using Fluorine and Metal Halides
App 20200395222 - Woods; Keenan N. ; et al. | 2020-12-17 |
Metal recess for semiconductor structures
Grant 10,861,676 - Cui , et al. December 8, 2 | 2020-12-08 |
Metal recess for semiconductor structures
Grant 10,854,426 - Cui , et al. December 1, 2 | 2020-12-01 |
Menu-type design method for GEO satellite control system based on optimized information integration
Grant 10,696,426 - Zhou , et al. June 30, 2 | 2020-06-30 |
3D NAND high aspect ratio structure etch
Grant 10,692,880 - Cui , et al. | 2020-06-23 |
Systems And Methods For Etching Metals And Metal Derivatives
App 20200135491 - Cui; Zhenjiang ; et al. | 2020-04-30 |
Systems And Methods For Hafnium-containing Film Removal
App 20200118829 - Cui; Zhenjiang ; et al. | 2020-04-16 |
HKMG integration
Grant 10,504,746 - Cui , et al. Dec | 2019-12-10 |
Metal Recess For Semiconductor Structures
App 20190214229 - Cui; Zhenjiang ; et al. | 2019-07-11 |
Metal Recess For Semiconductor Structures
App 20190214230 - Cui; Zhenjiang ; et al. | 2019-07-11 |
Chamber Conditioning And Removal Processes
App 20190198300 - Zhang; Hanshen ; et al. | 2019-06-27 |
Menu-type Design Method For Geo Satellite Control System Based On Optimized Information Integration
App 20180281991 - ZHOU; Zhicheng ; et al. | 2018-10-04 |
3d Nand High Aspect Ratio Structure Etch
App 20180182777 - CUI; Zhenjiang ; et al. | 2018-06-28 |
Two-step fluorine radical etch of hafnium oxide
Grant 9,960,049 - Zhang , et al. May 1, 2 | 2018-05-01 |
Cobalt-containing material removal
Grant 9,947,549 - Wang , et al. April 17, 2 | 2018-04-17 |
Cobalt-containing Material Removal
App 20180102259 - Wang; Xikun ; et al. | 2018-04-12 |
Two-step Fluorine Radical Etch Of Hafnium Oxide
App 20170338119 - ZHANG; Hanshen ; et al. | 2017-11-23 |
Hkmg Integration
App 20170294320 - CUI; Zhenjiang ; et al. | 2017-10-12 |
Fluorine Reduction With Scope With Controlled Oxidation
App 20170291199 - ZHONG; Xing ; et al. | 2017-10-12 |
Cleaning high aspect ratio vias
Grant 9,576,788 - Liu , et al. February 21, 2 | 2017-02-21 |
Cleaning High Aspect Ratio Vias
App 20160314961 - Liu; Jie ; et al. | 2016-10-27 |
Chlorine-based hardmask removal
Grant 9,478,434 - Wang , et al. October 25, 2 | 2016-10-25 |
Fluorine-based hardmask removal
Grant 9,355,862 - Pandit , et al. May 31, 2 | 2016-05-31 |
Integrated cluster to enable next generation interconnect
Grant 9,318,383 - Naik , et al. April 19, 2 | 2016-04-19 |
Air gap structure integration using a processing system
Grant 9,312,168 - Naik , et al. April 12, 2 | 2016-04-12 |
Chlorine-based Hardmask Removal
App 20160086816 - Wang; Xikun ; et al. | 2016-03-24 |
Fluorine-based Hardmask Removal
App 20160086815 - Pandit; Mandar ; et al. | 2016-03-24 |
Integrated Processing For Microcontamination Prevention
App 20160068969 - Cui; Zhenjiang ; et al. | 2016-03-10 |
Integrated Cluster To Enable Next Generation Interconnect
App 20160049331 - NAIK; Mehul B. ; et al. | 2016-02-18 |
Integrated cluster to enable next generation interconnect
Grant 9,184,093 - Naik , et al. November 10, 2 | 2015-11-10 |
Air Gap Structure Integration Using A Processing System
App 20150170956 - NAIK; Mehul B. ; et al. | 2015-06-18 |
Process for damascene structure with reduced low-k damage
Grant 8,951,911 - Naik , et al. February 10, 2 | 2015-02-10 |
Integrated Cluster To Enable Next Generation Interconnect
App 20140273430 - NAIK; Mehul B. ; et al. | 2014-09-18 |
Adhesion Improvement For Low K Dielectrics To Conductive Materials
App 20130230986 - RAJAGOPALAN; NAGARAJAN ; et al. | 2013-09-05 |
Process For Damascene Structure With Reduced Low-k Damage
App 20120252206 - NAIK; MEHUL B. ; et al. | 2012-10-04 |
Method Of Processing Low K Dielectric Films
App 20120122320 - Lakshmanan; Annamalai ; et al. | 2012-05-17 |
Post-ash Sidewall Healing
App 20120009796 - Cui; Zhenjiang ; et al. | 2012-01-12 |
Restoring low dielectric constant film properties
Grant 8,058,183 - Cui , et al. November 15, 2 | 2011-11-15 |
Air gap formation and integration using a patterning cap
Grant 7,811,924 - Cui , et al. October 12, 2 | 2010-10-12 |
Restoring Low Dielectric Constant Film Properties
App 20090317971 - Cui; Zhenjiang ; et al. | 2009-12-24 |
Air Gap Formation And Integration Using A Patterning Cap
App 20090309230 - CUI; ZHENJIANG ; et al. | 2009-12-17 |
Method For Critical Dimension Shrink Using Conformal Pecvd Films
App 20090286402 - Xia; Li-Qun ; et al. | 2009-11-19 |
Chamber clean method using remote and in situ plasma cleaning systems
Grant 7,588,036 - Cui , et al. September 15, 2 | 2009-09-15 |
Techniques promoting adhesion of porous low K film to underlying barrier layer
Grant 7,547,643 - Schmitt , et al. June 16, 2 | 2009-06-16 |
Methods and apparatuses promoting adhesion of dielectric barrier film to copper
App 20090011148 - Rajagopalan; Nagarajan ; et al. | 2009-01-08 |
Adhesion improvement for low k dielectrics
Grant 7,459,404 - Li , et al. December 2, 2 | 2008-12-02 |
Interface engineering to improve adhesion between low k stacks
Grant 7,259,111 - Padhi , et al. August 21, 2 | 2007-08-21 |
Adhesion improvement for low k dielectrics to conductive materials
Grant 7,229,911 - Rajagopalan , et al. June 12, 2 | 2007-06-12 |
Deposition process for high aspect ratio trenches
Grant 7,097,886 - Moghadam , et al. August 29, 2 | 2006-08-29 |
Adhesion improvement for low k dielectrics
App 20060189162 - Huang; Lihua Li ; et al. | 2006-08-24 |
Interface engineering to improve adhesion between low k stacks
App 20060160376 - Padhi; Deenesh ; et al. | 2006-07-20 |
Adhesion improvement for low k dielectrics
Grant 7,030,041 - Li , et al. April 18, 2 | 2006-04-18 |
Post treatment of low k dielectric films
Grant 7,018,941 - Cui , et al. March 28, 2 | 2006-03-28 |
Adhesion improvement for low k dielectrics to conductive materials
App 20060046479 - Rajagopalan; Nagarajan ; et al. | 2006-03-02 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
Grant 6,992,024 - Cui , et al. January 31, 2 | 2006-01-31 |
Post Treatment Of Low K Dielectric Films
App 20050239293 - Cui, Zhenjiang ; et al. | 2005-10-27 |
Adhesion improvement for low k dielectrics to conductive materials
App 20050233555 - Rajagopalan, Nagarajan ; et al. | 2005-10-20 |
Techniques promoting adhesion of porous low K film to underlying barrier layer
App 20050233591 - Schmitt, Francimar ; et al. | 2005-10-20 |
Adhesion improvement for low k dielectrics
App 20050202685 - Huang, Lihua Li ; et al. | 2005-09-15 |
Fixture used to prepare semiconductor specimens for film adhesion testing
Grant 6,936,843 - Cui August 30, 2 | 2005-08-30 |
Methods and apparatuses promoting adhesion of dielectric barrier film to copper
App 20050186339 - Rajagopalan, Nagarajan ; et al. | 2005-08-25 |
HDP-CVD uniformity control
Grant 6,890,597 - Krishnaraj , et al. May 10, 2 | 2005-05-10 |
Multistep cure technique for spin-on-glass films
Grant 6,878,644 - Cui , et al. April 12, 2 | 2005-04-12 |
Electron beam treatment of SixNy films
App 20040266123 - Cui, Zhenjiang ; et al. | 2004-12-30 |
Fixture used to prepare semiconductor specimens for film adhesion testing
App 20040238127 - Cui, Zhenjiang | 2004-12-02 |
Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy
Grant 6,818,894 - Takoudis , et al. November 16, 2 | 2004-11-16 |
Multistep cure technique for spin-on-glass films
App 20040224479 - Cui, Zhenjiang ; et al. | 2004-11-11 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
App 20040224496 - Cui, Zhenjiang ; et al. | 2004-11-11 |
HDP-CVD uniformity control
App 20040224090 - Krishnaraj, Padmanabhan ; et al. | 2004-11-11 |
Method of preparing a sample of a semiconductor structure for adhesion testing
Grant 6,790,707 - Cui September 14, 2 | 2004-09-14 |
Deposition process for high aspect ratio trenches
App 20040115898 - Moghadam, Farhad K. ; et al. | 2004-06-17 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
Grant 6,693,050 - Cui , et al. February 17, 2 | 2004-02-17 |
Chamber clean method using remote and in situ plasma cleaning systems
App 20040000321 - Cui, Zhenjiang ; et al. | 2004-01-01 |
Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment
Grant 6,635,144 - Cui , et al. October 21, 2 | 2003-10-21 |
Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy
App 20020180991 - Takoudis, Christos G. ; et al. | 2002-12-05 |
Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment
App 20020151186 - Cui, Zhenjiang ; et al. | 2002-10-17 |
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