| Patent | Date |
|---|
Improvements In Metrology Targets
App 20220260929 - MEHTA; Nikhil ; et al. | 2022-08-18 |
Method for process metrology
Grant 11,385,551 - Verstraeten , et al. July 12, 2 | 2022-07-12 |
Metrology Apparatus
App 20220121127 - PANDEY; Nitesh ; et al. | 2022-04-21 |
Metrology apparatus
Grant 11,262,661 - Pandey , et al. March 1, 2 | 2022-03-01 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210384086 - VAN LEEST; Adriaan Johan ; et al. | 2021-12-09 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210335678 - VAN LEEST; Adriaan Johan ; et al. | 2021-10-28 |
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate
App 20210325174 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-10-21 |
Method and apparatus to determine a patterning process parameter
Grant 11,145,557 - Van Leest , et al. October 12, 2 | 2021-10-12 |
Method of measuring a parameter of a lithographic process, metrology apparatus
Grant 11,099,489 - Cramer , et al. August 24, 2 | 2021-08-24 |
Method and apparatus to determine a patterning process parameter
Grant 11,101,185 - Van Leest , et al. August 24, 2 | 2021-08-24 |
Method and apparatus to determine a patterning process parameter
Grant 11,101,184 - Van Leest , et al. August 24, 2 | 2021-08-24 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 11,092,900 - Van Der Schaar , et al. August 17, 2 | 2021-08-17 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
Grant 11,009,343 - Tinnemans , et al. May 18, 2 | 2021-05-18 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques
Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Method of measuring a target, metrology apparatus, lithographic cell, and target
Grant 10,955,756 - Cramer March 23, 2 | 2021-03-23 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210035871 - VAN LEEST; Adriaan Johan ; et al. | 2021-02-04 |
Metrology method and apparatus with increased bandwidth
Grant 10,901,323 - Cramer , et al. January 26, 2 | 2021-01-26 |
Substrate, metrology apparatus and associated methods for a lithographic process
Grant 10,871,367 - Verma , et al. December 22, 2 | 2020-12-22 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,845,713 - Theeuwes , et al. November 24, 2 | 2020-11-24 |
Method and apparatus to determine a patterning process parameter
Grant 10,811,323 - Van Leest , et al. October 20, 2 | 2020-10-20 |
Metrology Method and Apparatus with Increased Bandwidth
App 20200319562 - CRAMER; Hugo Augustinus Joseph ; et al. | 2020-10-08 |
Substrate, Metrology Apparatus And Associated Methods For A Lithographic Process
App 20200284578 - VERMA; Alok ; et al. | 2020-09-10 |
Metrology method and apparatus with increased bandwidth
Grant 10,732,514 - Cramer , et al. | 2020-08-04 |
Patterning Device, Manufacturing Method For A Patterning Device, System For Patterning A Reticle, Calibration Method Of An Inspe
App 20200232933 - HOOGENBOOM; Thomas Leo Maria ; et al. | 2020-07-23 |
Method of Measuring a Parameter of a Lithographic Process, Metrology Apparatus
App 20200192231 - CRAMER; Hugo Augustinus Joseph ; et al. | 2020-06-18 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200185281 - VAN LEEST; Adriaan Johan ; et al. | 2020-06-11 |
Substrate, metrology apparatus and associated methods for a lithographic process
Grant 10,677,589 - Verma , et al. | 2020-06-09 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200126872 - VAN LEEST; Adriaan Johan ; et al. | 2020-04-23 |
Statistical hierarchical reconstruction from metrology data
Grant 10,627,213 - Mossavat , et al. | 2020-04-21 |
Method of Calibrating a Plurality of Metrology Apparatuses, Method of Determining a Parameter of Interest, and Metrology Apparat
App 20200110341 - MOSSAVAT; Seyed Iman ; et al. | 2020-04-09 |
Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values
Grant 10,615,084 - Van Leest , et al. | 2020-04-07 |
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20200073254 - VAN DER SCHAAR; Maurits ; et al. | 2020-03-05 |
Method of determining an optimal focus height for a metrology apparatus
Grant 10,571,363 - Medvedyeva , et al. Feb | 2020-02-25 |
Method and apparatus to determine a patterning process parameter
Grant 10,546,790 - Van Leest , et al. Ja | 2020-01-28 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200013685 - VAN LEEST; Adriaan Johan ; et al. | 2020-01-09 |
Metrology Apparatus
App 20190384184 - Pandey; Nitesh ; et al. | 2019-12-19 |
Beat patterns for alignment on small metrology targets
Grant 10,488,768 - Fagginger Auer , et al. Nov | 2019-11-26 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 10,481,503 - Van Der Schaar , et al. Nov | 2019-11-19 |
Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion
Grant 10,453,758 - Van Leest , et al. Oc | 2019-10-22 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20190265028 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-08-29 |
Method and apparatus for measuring a parameter of a lithographic process, computer program products for implementing such methods and apparatus
Grant 10,394,135 - Cramer , et al. A | 2019-08-27 |
Metrology Method and Apparatus with Increased Bandwidth
App 20190258177 - CRAMER; Hugo Augustinus Joseph ; et al. | 2019-08-22 |
Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques
App 20190250094 - PANDEY; Nitesh ; et al. | 2019-08-15 |
Method Of Determining An Optimal Focus Height For A Metrology Apparatus
App 20190242782 - MEDVEDYEVA; Mariya Vyacheslavivna ; et al. | 2019-08-08 |
Method for monitoring a characteristic of illumination from a metrology apparatus
Grant 10,317,805 - Schmetz-Schagen , et al. | 2019-06-11 |
Metrology Method And Apparatus, Computer Program And Lithographic System
App 20190163075 - THEEUWES; Thomas ; et al. | 2019-05-30 |
Separation Of Contributions To Metrology Data
App 20190086810 - TEL; Wim Tjibbo ; et al. | 2019-03-21 |
Beat Patterns For Alignment On Small Metrology Targets
App 20190072860 - FAGGINGER AUER; Bastiaan Onne ; et al. | 2019-03-07 |
Substrate, Metrology Apparatus And Associated Methods For A Lithographic Process
App 20190063911 - Verma; Alok ; et al. | 2019-02-28 |
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method
Grant 10,180,628 - Cramer , et al. Ja | 2019-01-15 |
Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 10,156,797 - Mossavat , et al. Dec | 2018-12-18 |
Process flagging and cluster detection without requiring reconstruction
Grant 10,151,985 - Dirks , et al. Dec | 2018-12-11 |
Method Of Measuring A Target, Metrology Apparatus, Lithographic Cell, And Target
App 20180335704 - CRAMER; Hugo Augustinus Joseph | 2018-11-22 |
Inspection method and apparatus, lithographic system and device manufacturing method
Grant 10,132,763 - Cramer , et al. November 20, 2 | 2018-11-20 |
Method for Monitoring a Characteristic of Illumination From a Metrology Apparatus
App 20180173113 - SCHMETZ-SCHAGEN; Jolanda Theodora Josephina ; et al. | 2018-06-21 |
Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus
Grant 9,977,340 - Aben , et al. May 22, 2 | 2018-05-22 |
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Computer Program Products for Implementing such Methods and Apparatus
App 20180129140 - CRAMER; Hugo Augustinus Joseph ; et al. | 2018-05-10 |
Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 9,964,853 - Vanoppen , et al. May 8, 2 | 2018-05-08 |
Method of determining dose, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 9,952,517 - Verma , et al. April 24, 2 | 2018-04-24 |
Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure
Grant 9,760,018 - Mossavat , et al. September 12, 2 | 2017-09-12 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170256465 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255112 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255737 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255738 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Process Flagging And Cluster Detection Without Requiring Reconstruction
App 20170176869 - Dirks; Remco ; et al. | 2017-06-22 |
Statistical Hierarchical Reconstruction From Metrology Data
App 20170160074 - MOSSAVAT; Seyed Iman ; et al. | 2017-06-08 |
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20170059999 - VAN DER SCHAAR; Maurits ; et al. | 2017-03-02 |
Method Of Determining Edge Placement Error, Inspection Apparatus, Patterning Device, Substrate And Device Manufacturing Method
App 20170010541 - MOSSAVAT; Seyed Iman ; et al. | 2017-01-12 |
Lithographic focus and dose measurement using a 2-D target
Grant 9,436,099 - Leewis , et al. September 6, 2 | 2016-09-06 |
Method and Inspection Apparatus and Computer Program Product for Assessing a Quality of Reconstruction of a Value of a Parameter of Interest of a Structure
App 20160154319 - MOSSAVAT; Seyed Iman ; et al. | 2016-06-02 |
Method Of Determining Critical-dimension-related Properties, Inspection Apparatus And Device Manufacturing Method
App 20160116849 - CRAMER; Hugo Augustinus Joseph ; et al. | 2016-04-28 |
Method of Determining Dose, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method
App 20160026096 - VERMA; Alok ; et al. | 2016-01-28 |
Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell
Grant 9,188,875 - Cramer , et al. November 17, 2 | 2015-11-17 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 9,182,682 - Cramer , et al. November 10, 2 | 2015-11-10 |
Method of Determining Dose and Focus, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method
App 20150293458 - Vanoppen; Peter Clement Paul ; et al. | 2015-10-15 |
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method
Grant 9,128,065 - Cramer , et al. September 8, 2 | 2015-09-08 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 9,081,303 - Cramer , et al. July 14, 2 | 2015-07-14 |
Inspection Method and Apparatus, Lithographic System and Device Manufacturing Method
App 20150177166 - Cramer; Hugo Augustinus Joseph ; et al. | 2015-06-25 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 8,994,944 - Cramer , et al. March 31, 2 | 2015-03-31 |
Lithographic focus and dose measurement using a 2-D target
Grant 8,891,061 - Leewis , et al. November 18, 2 | 2014-11-18 |
Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus
Grant 8,868,387 - Den Boef , et al. October 21, 2 | 2014-10-21 |
Inspection method for lithography
Grant 8,830,447 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus
Grant 8,830,472 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Lithographic Focus and Dose Measurement Using A 2-D Target
App 20140247434 - LEEWIS; Christian Marinus ; et al. | 2014-09-04 |
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method
App 20140211185 - Cramer; Hugo Augustinus Joseph ; et al. | 2014-07-31 |
Method to determine the value of process parameters based on scatterometry data
Grant 8,773,657 - Van Der Laan , et al. July 8, 2 | 2014-07-08 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20140139814 - CRAMER; Hugo Augustinus Joseph ; et al. | 2014-05-22 |
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method
Grant 8,705,007 - Cramer , et al. April 22, 2 | 2014-04-22 |
Scatterometry method and measurement system for lithography
Grant 8,520,212 - Coene , et al. August 27, 2 | 2013-08-27 |
Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrate
Grant 8,390,823 - Cramer , et al. March 5, 2 | 2013-03-05 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,294,907 - Cramer , et al. October 23, 2 | 2012-10-23 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 8,189,195 - Den Boef , et al. May 29, 2 | 2012-05-29 |
Method and Apparatus for Measuring a Structure on a Substrate, Computer Program Products for Implementing Such Methods and Apparatus
App 20120123748 - Aben; Maria Johanna Hendrika ; et al. | 2012-05-17 |
Inspection Method for Lithography
App 20120044472 - Den Boef; Arie Jeffrey ; et al. | 2012-02-23 |
Scatterometry Method and Measurement System for Lithography
App 20110304851 - Coene; Willem Marie Julia Marcel ; et al. | 2011-12-15 |
Calibration Method, Inspection Method and Apparatus, Lithographic Apparatus, and Lithographic Processing Cell
App 20110292365 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-12-01 |
Lithographic Focus and Dose Measurement Using A 2-D Target
App 20110249244 - Leewis; Christian Marinus ; et al. | 2011-10-13 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20110249247 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-10-13 |
Inspection Apparatus and Associated Method and Monitoring and Control System
App 20110231167 - CRAMER; Hugo Augustinus Joseph ; et al. | 2011-09-22 |
Method, Inspection Apparatus and Substrate for Determining an Approximate Structure of an Object on a Substrate
App 20110085176 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-04-14 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,916,927 - Cramer , et al. March 29, 2 | 2011-03-29 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,916,284 - Dusa , et al. March 29, 2 | 2011-03-29 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20110027704 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-02-03 |
Method of Assessing a Model of a Substrate, an Inspection Apparatus and a Lithographic Apparatus
App 20110026032 - Den Boef; Arie Jeffrey ; et al. | 2011-02-03 |
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method
App 20100201963 - Cramer; Hugo Augustinus Joseph ; et al. | 2010-08-12 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target pattern
Grant 7,738,103 - Kiers , et al. June 15, 2 | 2010-06-15 |
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method
Grant 7,605,907 - Cramer , et al. October 20, 2 | 2009-10-20 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining A Parameter of a Target Pattern
App 20090135424 - Kiers; Antoine Gaston Marie ; et al. | 2009-05-28 |
Method of Optimizing a Model, a Method of Measuring a Property, A Device Manufacturing Method, a Spectrometer and a Lithographic Apparatus
App 20090094005 - DEN BOEF; Arie Jeffrey ; et al. | 2009-04-09 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 7,460,237 - Cramer December 2, 2 | 2008-12-02 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080279442 - Den Boef; Arie Jeffrey ; et al. | 2008-11-13 |
Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method
App 20080239277 - Cramer; Hugo Augustinus Joseph ; et al. | 2008-10-02 |
Inspection method and apparatus,lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080170780 - Cramer; Hugo Augustinus Joseph ; et al. | 2008-07-17 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
App 20080018874 - Dusa; Mircea ; et al. | 2008-01-24 |
Method to Determine the Value of Process Parameters BAsed on Scatterometry Data
App 20070222979 - Van Der Laan; Hans ; et al. | 2007-09-27 |
Method of depositing a metal layer onto a substrate and a method for measuring in three dimensions the topographical features of a substrate
App 20070093044 - Rijpers; Bartolomeus Petrus ; et al. | 2007-04-26 |
Device inspection method and apparatus using an asymmetric marker
Grant 7,112,813 - Den Boef , et al. September 26, 2 | 2006-09-26 |
Method to determine the value of process parameters based on scatterometry data
App 20050185174 - Laan, Hans Van Der ; et al. | 2005-08-25 |
Lithographic apparatus and methods, patterning structure and method for making a patterning structure, device manufacturing method, and device manufactured thereby
App 20050136340 - Baselmans, Johannes Jacobus Matheus ; et al. | 2005-06-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,809,797 - Baselmans , et al. October 26, 2 | 2004-10-26 |
Device inspection
App 20040129900 - Den Boef, Arie Jeffrey ; et al. | 2004-07-08 |
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