| Patent | Date |
|---|
Plasma abatement of compounds containing heavy atoms
Grant 11,185,815 - Cox , et al. November 30, 2 | 2021-11-30 |
Apparatus for exhaust cooling
Grant 11,114,285 - Cox , et al. September 7, 2 | 2021-09-07 |
Non-disappearing anode for use with dielectric deposition
Grant 11,114,289 - Cox , et al. September 7, 2 | 2021-09-07 |
Sputtering target with backside cooling grooves
Grant 11,011,356 - West , et al. May 18, 2 | 2021-05-18 |
Smart chamber and smart chamber components
Grant 10,930,479 - Binns , et al. February 23, 2 | 2021-02-23 |
Physical vapor deposition in-chamber electro-magnet
Grant 10,867,776 - West , et al. December 15, 2 | 2020-12-15 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20200357616 - ALLEN; Adolph Miller ; et al. | 2020-11-12 |
Sputtering Target With Backside Cooling Grooves
App 20200294778 - WEST; Brian T. ; et al. | 2020-09-17 |
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process
Grant 10,763,090 - Allen , et al. Sep | 2020-09-01 |
Method and apparatus for gas abatement
Grant 10,757,797 - Wang , et al. A | 2020-08-25 |
Sputtering target with backside cooling grooves
Grant 10,714,321 - West , et al. | 2020-07-14 |
Arcing detection apparatus for plasma processing
Grant 10,580,626 - Zhang , et al. | 2020-03-03 |
Physical Vapor Deposition In-chamber Electro-magnet
App 20190348259 - WEST; Brian T. ; et al. | 2019-11-14 |
Plasma abatement of compounds containing heavy atoms
Grant 10,449,486 - Cox , et al. Oc | 2019-10-22 |
Method And Apparatus For Gas Abatement
App 20190246481 - WANG; Rongping ; et al. | 2019-08-08 |
Gas cooled substrate support for stabilized high temperature deposition
Grant 10,344,375 - West , et al. July 9, 2 | 2019-07-09 |
Transparent electrostatic carrier
Grant 10,332,773 - Lee , et al. | 2019-06-25 |
Smart Chamber And Smart Chamber Components
App 20190096643 - BINNS; Simon Nicholas ; et al. | 2019-03-28 |
Wafer carrier for smaller wafers and wafer pieces
Grant 10,236,201 - Cox , et al. | 2019-03-19 |
Plasma Abatement Of Compounds Containing Heavy Atoms
App 20190022577 - COX; Michael S. ; et al. | 2019-01-24 |
Method and apparatus for gas abatement
Grant 10,187,966 - Wang , et al. Ja | 2019-01-22 |
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
Grant 10,176,973 - Cox , et al. J | 2019-01-08 |
Smart chamber and smart chamber components
Grant 10,153,143 - Binns , et al. Dec | 2018-12-11 |
Sputtering Target With Backside Cooling Grooves
App 20180342378 - WEST; Brian T. ; et al. | 2018-11-29 |
Plasma Abatement Of Compounds Containing Heavy Atoms
App 20180318758 - COX; Michael S. ; et al. | 2018-11-08 |
Sputtering target with backside cooling grooves
Grant 10,049,863 - West , et al. August 14, 2 | 2018-08-14 |
Locally heated multi-zone substrate support
Grant 9,984,912 - Cox May 29, 2 | 2018-05-29 |
Gas Cooled Substrate Support For Stabilized High Temperature Deposition
App 20180037987 - WEST; Brian ; et al. | 2018-02-08 |
Sputtering Target With Backside Cooling Grooves
App 20180019108 - WEST; Brian T. ; et al. | 2018-01-18 |
Locally Heated Multi-zone Substrate Support
App 20180019148 - COX; Michael S. | 2018-01-18 |
Apparatus for treating an exhaust gas in a foreline
Grant 9,867,238 - Cox , et al. January 9, 2 | 2018-01-09 |
Non-disappearing Anode For Use With Dielectric Deposition
App 20170316924 - COX; Michael S. ; et al. | 2017-11-02 |
Apparatus For Exhaust Cooling
App 20170301524 - COX; Michael S. ; et al. | 2017-10-19 |
Gas cooled substrate support for stabilized high temperature deposition
Grant 9,790,589 - West , et al. October 17, 2 | 2017-10-17 |
Sputtering target with backside cooling grooves
Grant 9,779,920 - West , et al. October 3, 2 | 2017-10-03 |
Electrostatic carrier for thin substrate handling
Grant 9,779,975 - Cox October 3, 2 | 2017-10-03 |
In-situ removable electrostatic chuck
Grant 9,773,692 - Cox , et al. September 26, 2 | 2017-09-26 |
Encapsulated magnetron
Grant 9,754,771 - West , et al. September 5, 2 | 2017-09-05 |
Locally heated multi-zone substrate support
Grant 9,735,037 - Cox August 15, 2 | 2017-08-15 |
Plasma Abatement Of Compounds Containing Heavy Atoms
App 20170216767 - COX; Michael S. ; et al. | 2017-08-03 |
End effector for transferring a substrate
Grant 9,721,820 - Cox , et al. August 1, 2 | 2017-08-01 |
Electrostatic chuck for high temperature process applications
Grant 9,711,386 - Cox , et al. July 18, 2 | 2017-07-18 |
Arcing Detection Apparatus For Plasma Processing
App 20170162370 - ZHANG; Lin ; et al. | 2017-06-08 |
Plasma abatement of compounds containing heavy atoms
Grant 9,649,592 - Cox , et al. May 16, 2 | 2017-05-16 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing System
App 20170133208 - COX; Michael S. ; et al. | 2017-05-11 |
In-situ Removable Electrostatic Chuck
App 20170062260 - COX; Michael S. ; et al. | 2017-03-02 |
Electrostatic Carrier For Thin Substrate Handling
App 20170062261 - COX; Michael S. | 2017-03-02 |
Deposition apparatus and methods to reduce deposition asymmetry
Grant 9,580,796 - Ritchie , et al. February 28, 2 | 2017-02-28 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20170029941 - ALLEN; Adolph Miller ; et al. | 2017-02-02 |
Locally Heated Multi-zone Substrate Support
App 20170032995 - COX; Michael S. | 2017-02-02 |
Method And Apparatus For Gas Abatement
App 20170027049 - WANG; Rongping ; et al. | 2017-01-26 |
Abatement system having a plasma source
Grant 9,552,967 - Cox , et al. January 24, 2 | 2017-01-24 |
Capacitively coupled plasma source for abating compounds produced in semiconductor processes
Grant 9,543,124 - Cox , et al. January 10, 2 | 2017-01-10 |
Electrostatic carrier for thin substrate handling
Grant 9,536,768 - Cox January 3, 2 | 2017-01-03 |
Method And Apparatus To Abate Pyrophoric Byproducts From Ion Implant Process
App 20160376710 - HO; Dustin W. ; et al. | 2016-12-29 |
Wafer Carrier For Smaller Wafers And Wafer Pieces
App 20160365269 - COX; Michael S. ; et al. | 2016-12-15 |
Transparent Electrostatic Carrier
App 20160358803 - LEE; Leung Kway ; et al. | 2016-12-08 |
In-situ removable electrostatic chuck
Grant 9,508,584 - Cox , et al. November 29, 2 | 2016-11-29 |
Locally heated multi-zone substrate support
Grant 9,472,434 - Cox October 18, 2 | 2016-10-18 |
Wafer carrier for smaller wafers and wafer pieces
Grant 9,460,950 - Cox , et al. October 4, 2 | 2016-10-04 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing
App 20160133442 - COX; Michael S. ; et al. | 2016-05-12 |
Hall Effect Enhanced Capacitively Coupled Plasma Source
App 20160118226 - Cox; Michael S. ; et al. | 2016-04-28 |
Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
Grant 9,240,308 - Cox , et al. January 19, 2 | 2016-01-19 |
Hall effect enhanced capacitively coupled plasma source
Grant 9,230,780 - Cox , et al. January 5, 2 | 2016-01-05 |
Smart Chamber And Smart Chamber Components
App 20150262798 - BINNS; Simon Nicholas ; et al. | 2015-09-17 |
Plasma Abatement Of Compounds Containing Heavy Atoms
App 20150251133 - COX; Michael S. ; et al. | 2015-09-10 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing System
App 20150255256 - COX; Michael S. ; et al. | 2015-09-10 |
Hall Effect Enhanced Capacitively Coupled Plasma Source
App 20150255251 - COX; Michael S. ; et al. | 2015-09-10 |
Gas Cooled Substrate Support For Stabilized High Temperature Deposition
App 20150232983 - WEST; Brian ; et al. | 2015-08-20 |
Wafer Carrier For Smaller Wafers And Wafer Pieces
App 20150162231 - COX; Michael S. ; et al. | 2015-06-11 |
Sputtering Target With Backside Cooling Grooves
App 20150047975 - WEST; Brian T. ; et al. | 2015-02-19 |
Encapsulated Magnetron
App 20150048735 - WEST; Brian T. ; et al. | 2015-02-19 |
Locally Heated Multi-zone Substrate Support
App 20150043123 - COX; Michael S. | 2015-02-12 |
Electrostatic Carrier For Thin Substrate Handling
App 20150036260 - COX; Michael S. | 2015-02-05 |
In-situ Removable Electrostatic Chuck
App 20150036259 - COX; Michael S. ; et al. | 2015-02-05 |
End Effector For Transferring A Substrate
App 20150022935 - COX; Michael S. ; et al. | 2015-01-22 |
Electrostatic Chuck For High Temperature Process Applications
App 20150022936 - COX; Michael S. ; et al. | 2015-01-22 |
Conveyor sprocket assembly
Grant 8,887,901 - Cox , et al. November 18, 2 | 2014-11-18 |
Apparatus for physical vapor deposition having centrally fed RF energy
Grant 8,795,488 - Rasheed , et al. August 5, 2 | 2014-08-05 |
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
Grant 8,753,989 - Balseanu , et al. June 17, 2 | 2014-06-17 |
Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of Use
App 20140127404 - Yudovsky; Joseph ; et al. | 2014-05-08 |
Conveyor Sprocket Assembly
App 20140027247 - Cox; Michael S. ; et al. | 2014-01-30 |
Hall Effect Plasma Source
App 20130333618 - COX; Michael S. | 2013-12-19 |
Apparatus For Treating An Exhaust Gas In A Foreline
App 20130284724 - Cox; Michael S. ; et al. | 2013-10-31 |
Static Deposition Profile Modulation For Linear Plasma Source
App 20130273262 - Vellaikal; Manoj ; et al. | 2013-10-17 |
Deposition apparatus and methods to reduce deposition asymmetry
Grant 8,486,242 - Cox July 16, 2 | 2013-07-16 |
Advanced Platform For Passivating Crystalline Silicon Solar Cells
App 20130171757 - PONNEKANTI; HARI K. ; et al. | 2013-07-04 |
Method For Balancing Gas Flow Supplying Multiple Cvd Reactors
App 20130104996 - OH; JEONGHOON ; et al. | 2013-05-02 |
Method And Apparatus For Gas Distribution And Plasma Application In A Linear Deposition Chamber
App 20130059092 - MUNGEKAR; HEMANT P. ; et al. | 2013-03-07 |
Method To Increase Tensile Stress Of Silicon Nitride Films Using A Post Pecvd Deposition Uv Cure
App 20120196452 - Balseanu; Mihaela ; et al. | 2012-08-02 |
Deposition Apparatus and Methods to Reduce Deposition Asymmetry
App 20120090990 - Cox; Michael S. | 2012-04-19 |
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
Grant 8,129,290 - Balseanu , et al. March 6, 2 | 2012-03-06 |
Deposition Apparatus And Methods To Reduce Deposition Asymmetry
App 20120000772 - Ritchie; Alan ; et al. | 2012-01-05 |
Apparatus For Physical Vapor Deposition Having Centrally Fed Rf Energy
App 20110240464 - RASHEED; MUHAMMAD ; et al. | 2011-10-06 |
Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit
App 20110209995 - Rasheed; Muhammad M. ; et al. | 2011-09-01 |
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process
App 20100252417 - Allen; Adolph Miller ; et al. | 2010-10-07 |
Ground shield with reentrant feature
Grant 7,718,045 - Tiller , et al. May 18, 2 | 2010-05-18 |
Chamber clean method using remote and in situ plasma cleaning systems
Grant 7,588,036 - Cui , et al. September 15, 2 | 2009-09-15 |
Sequential gas flow oxide deposition technique
Grant 7,399,388 - Moghadam , et al. July 15, 2 | 2008-07-15 |
Multi-core transformer plasma source
Grant 7,363,876 - Lai , et al. April 29, 2 | 2008-04-29 |
Method for plasma processing
App 20080008842 - Soo; Jyr Hong ; et al. | 2008-01-10 |
Ground Shield With Reentrant Feature
App 20070295602 - Tiller; Jennifer W. ; et al. | 2007-12-27 |
Low-k spacer integration into CMOS transistors
App 20070202640 - Al-Bayati; Amir ; et al. | 2007-08-30 |
Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications
Grant 7,189,639 - Krishnaraj , et al. March 13, 2 | 2007-03-13 |
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
App 20060269693 - Balseanu; Mihaela ; et al. | 2006-11-30 |
Deposition process for high aspect ratio trenches
Grant 7,097,886 - Moghadam , et al. August 29, 2 | 2006-08-29 |
Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications
App 20060178003 - Krishnaraj; Padmanabhan ; et al. | 2006-08-10 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
Grant 6,992,024 - Cui , et al. January 31, 2 | 2006-01-31 |
Non-intrusive plasma probe
Grant 6,894,474 - Cox , et al. May 17, 2 | 2005-05-17 |
Atmospheric substrate processing apparatus for depositing multiple layers on a substrate
App 20050098115 - Barnes, Michael ; et al. | 2005-05-12 |
HDP-CVD uniformity control
Grant 6,890,597 - Krishnaraj , et al. May 10, 2 | 2005-05-10 |
Multistep cure technique for spin-on-glass films
Grant 6,878,644 - Cui , et al. April 12, 2 | 2005-04-12 |
Sequential gas flow oxide deposition technique
App 20050019494 - Moghadam, Farhad K. ; et al. | 2005-01-27 |
Atmospheric substrate processing apparatus for depositing multiple layers on a substrate
Grant 6,841,006 - Barnes , et al. January 11, 2 | 2005-01-11 |
Multi-core transformer plasma source
App 20040226658 - Lai, Canfeng ; et al. | 2004-11-18 |
Multi-core transformer plasma source
App 20040226511 - Lai, Canfeng ; et al. | 2004-11-18 |
Multi-core transformer plasma source
App 20040226512 - Lai, Canfeng ; et al. | 2004-11-18 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
App 20040224496 - Cui, Zhenjiang ; et al. | 2004-11-11 |
Multistep cure technique for spin-on-glass films
App 20040224479 - Cui, Zhenjiang ; et al. | 2004-11-11 |
HDP-CVD uniformity control
App 20040224090 - Krishnaraj, Padmanabhan ; et al. | 2004-11-11 |
Multi-core transformer plasma source
App 20040182517 - Lai, Canfeng ; et al. | 2004-09-23 |
Multi-core transformer plasma source
App 20040185610 - Lai, Canfeng ; et al. | 2004-09-23 |
Multi-core transformer plasma source
Grant 6,755,150 - Lai , et al. June 29, 2 | 2004-06-29 |
Deposition process for high aspect ratio trenches
App 20040115898 - Moghadam, Farhad K. ; et al. | 2004-06-17 |
Toroidal plasma source for plasma processing
Grant 6,712,020 - Cox , et al. March 30, 2 | 2004-03-30 |
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
Grant 6,693,050 - Cui , et al. February 17, 2 | 2004-02-17 |
Chamber clean method using remote and in situ plasma cleaning systems
App 20040000321 - Cui, Zhenjiang ; et al. | 2004-01-01 |
Non-intrusive plasma probe
App 20030227283 - Cox, Michael S. ; et al. | 2003-12-11 |
Multi-core transformer plasma source
App 20030085205 - Lai, Canfeng ; et al. | 2003-05-08 |
Atmospheric substrate processing apparatus for depositing multiple layers on a substrate
App 20030039766 - Barnes, Michael ; et al. | 2003-02-27 |
Toroidal plasma source for plasma processing
App 20020157793 - Cox, Michael S. ; et al. | 2002-10-31 |
Toroidal plasma source for plasma processing
Grant 6,418,874 - Cox , et al. July 16, 2 | 2002-07-16 |
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