Cox; Henrikus Herman Marie

Patent Applications and Registrations

Patent applications and USPTO patent grants for Cox; Henrikus Herman Marie.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile

8.84.65

Cox; Henrikus Herman Marie - Eindhoven NL
Cox; Henrikus Herman Marie - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al.	2020-03-24
Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No	2019-11-05
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ; et al.	2019-09-26
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al.	2019-06-25
Lithographic apparatus and a device manufacturing method Grant 10,222,707 - Polet , et al.	2019-03-05
Lithographic apparatus and device manufacturing method Grant 10,114,300 - Cox , et al. October 30, 2	2018-10-30
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Lithographic apparatus and device manufacturing method Grant 9,977,341 - Cox May 22, 2	2018-05-22
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ; et al.	2018-02-15
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ; et al.	2017-12-14
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2	2017-10-24
Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2	2017-08-29
Positioning system, a lithographic apparatus and a method for positional control Grant 9,671,702 - Butler , et al. June 6, 2	2017-06-06
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-02
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2	2016-11-08
Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2	2016-10-25
Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ; et al.	2016-10-13
Lithographic Apparatus And A Device Manufacturing Method App 20160179015 - POLET; Theodorus Wilhelmus ; et al.	2016-06-23
Positioning System, A Lithographic Apparatus And A Method For Positional Control App 20160077450 - BUTLER; Hans ; et al.	2016-03-17
Lithographic apparatus and a device manufacturing method Grant 9,274,436 - Polet , et al. March 1, 2	2016-03-01
Lithographic Apparatus And Device Manufacturing Method App 20160004172 - COX; Henrikus Herman Marie	2016-01-07
Positioning system, a lithographic apparatus and a method for positional control Grant 9,229,339 - Butler , et al. January 5, 2	2016-01-05
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2	2015-08-04
Lithographic Apparatus And Device Manufacturing Method App 20150212435 - Cox; Henrikus Herman Marie ; et al.	2015-07-30
Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ; et al.	2015-06-18
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus Grant 8,982,327 - Cox , et al. March 17, 2	2015-03-17
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2	2015-02-24
Positioning device, lithographic apparatus, positioning method and device manufacturing method Grant 8,947,640 - Lafarre , et al. February 3, 2	2015-02-03
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ; et al.	2014-10-09
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method Grant 8,749,754 - Streefkerk , et al. June 10, 2	2014-06-10
Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2	2014-05-13
Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2	2014-05-13
Measurement system, method and lithographic apparatus Grant 8,681,316 - Cox , et al. March 25, 2	2014-03-25
Lithographic apparatus and device manufacturing method Grant 8,553,201 - Streefkerk , et al. October 8, 2	2013-10-08
Lithographic Apparatus And A Device Manufacturing Method App 20130149649 - POLET; Theodorus Wilhelmus ; et al.	2013-06-13
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2	2013-05-21
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2	2013-02-05
Positioning Device, Lithographic Apparatus, Positioning Method And Device Manufacturing Method App 20120327387 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2012-12-27
Stage system and lithographic apparatus comprising such stage system Grant 8,279,407 - Kamidi , et al. October 2, 2	2012-10-02
Positioning System, A Lithographic Apparatus And A Method For Positional Control App 20120127451 - Butler; Hans ; et al.	2012-05-24
Method For Positioning An Object By An Electromagnetic Motor, Stage Apparatus And Lithographic Apparatus App 20120092641 - COX; Henrikus Herman Marie ; et al.	2012-04-19
Lithographic apparatus with pre-formed flexible transportation line Grant 8,125,616 - Vermeulen , et al. February 28, 2	2012-02-28
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus Grant 8,102,513 - Cox , et al. January 24, 2	2012-01-24
Measurement System, Method And Litographic Apparatus App 20110317142 - Cox; Henrikus Herman Marie ; et al.	2011-12-29
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ; et al.	2011-12-22
Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ; et al.	2011-11-17
Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ; et al.	2011-11-10
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2	2011-10-04
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ; et al.	2011-07-28
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2	2011-05-03
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,859,644 - Van Der Toorn , et al. December 28, 2	2010-12-28
Stage system and lithographic apparatus comprising such stage system Grant 7,782,446 - Kamidi , et al. August 24, 2	2010-08-24
Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al.	2010-06-24
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ; et al.	2010-06-17
Lithographic apparatus and device manufacturing method Grant 7,710,540 - Loopstra , et al. May 4, 2	2010-05-04
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2	2010-04-20
Apparatus configured to position a workpiece Grant 7,679,720 - Dansberg , et al. March 16, 2	2010-03-16
Stage System and Lithographic Apparatus Comprising Such Stage System App 20090279067 - KAMIDI; Ramidin Izair ; et al.	2009-11-12
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Lithographic Apparatus with Pre-Formed Flexible Transportation Line App 20090169661 - VERMEULEN; Marcus Martinus Petrus Adrianus ; et al.	2009-07-02
Method For Positioning An Object By An Electromagnetic Motor, Stage Apparatus And Lithographic Apparatus App 20090097003 - COX; Henrikus Herman Marie ; et al.	2009-04-16
Lithographic apparatus and device manufacturing method Grant 7,492,440 - Zaal , et al. February 17, 2	2009-02-17
Lithographic Apparatus And Device Manufacturing Method App 20090033905 - STREEFKERK; Bob ; et al.	2009-02-05
Lithographic apparatus and device manufacturing method Grant 7,486,381 - Streefkerk , et al. February 3, 2	2009-02-03
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method Grant 7,483,120 - Luttikhuis , et al. January 27, 2	2009-01-27
Lithographic apparatus having a controlled motor, and motor control system and method Grant 7,468,589 - Cox , et al. December 23, 2	2008-12-23
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table Grant 7,456,935 - Cox , et al. November 25, 2	2008-11-25
Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ; et al.	2008-09-11
Stage system and lithographic apparatus comprising such stage system App 20080212054 - Kamidi; Ramidin Izair ; et al.	2008-09-04
Lithographic apparatus and device manufacturing method Grant 7,417,711 - Jacobs , et al. August 26, 2	2008-08-26
Apparatus configured to position a workpiece App 20080174750 - Dansberg; Michel Pieter ; et al.	2008-07-24
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20080123071 - Van Der Toorn; Jan-Gerard Cornelis ; et al.	2008-05-29
Lithographic apparatus and device manufacturing method Grant 7,359,032 - Dansberg , et al. April 15, 2	2008-04-15
Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2	2008-04-01
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,330,238 - Van Der Toorn , et al. February 12, 2	2008-02-12
Lithographic apparatus and device manufacturing method Grant 7,327,437 - Cox , et al. February 5, 2	2008-02-05
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method App 20070263197 - Luttikhuis; Bernardus Antonius Johannes ; et al.	2007-11-15
Lithographic apparatus and device manufacturing method Grant 7,295,283 - Cox , et al. November 13, 2	2007-11-13
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating Grant 7,292,317 - Cox , et al. November 6, 2	2007-11-06
Lithographic apparatus and device manufacturing method Grant 7,265,813 - Houkes , et al. September 4, 2	2007-09-04
Lithographic apparatus and device manufacturing method Grant 7,256,866 - Cox , et al. August 14, 2	2007-08-14
Lithographic apparatus having a controlled motor, and motor control system and method App 20070164697 - Cox; Henrikus Herman Marie ; et al.	2007-07-19
Lithographic apparatus and device manufacturing method Grant 7,245,047 - Vreugdewater , et al. July 17, 2	2007-07-17
Lithographic apparatus and device manufacturing method Grant 7,239,369 - Jacobs , et al. July 3, 2	2007-07-03
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method Grant 7,205,741 - Simons , et al. April 17, 2	2007-04-17
Lithographic apparatus with disturbance correction system and device manufacturing method Grant 7,193,722 - Boogaarts , et al. March 20, 2	2007-03-20
Lithographic apparatus and device manufacturing method App 20070052944 - Jacobs; Hernes ; et al.	2007-03-08
Lithographic apparatus, projection system, method of projecting and device manufacturing method Grant 7,170,580 - Leenders , et al. January 30, 2	2007-01-30
Lithographic apparatus immersion damage control Grant 7,170,583 - Van Der Meulen , et al. January 30, 2	2007-01-30
Actuator assembly and lithographic apparatus comprising such an actuator assembly Grant 7,167,234 - Cox , et al. January 23, 2	2007-01-23
Lithographic Apparatus Immersion Damage Control App 20070002294 - Meulen; Frits Van Der ; et al.	2007-01-04
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating App 20060279716 - Cox; Henrikus Herman Marie ; et al.	2006-12-14
Lithographic apparatus, Lorentz actuator, and device manufacturing method Grant 7,145,269 - Hol , et al. December 5, 2	2006-12-05
Lithographic apparatus and device manufacturing method Grant 7,126,671 - Cox , et al. October 24, 2	2006-10-24
Lithographic apparatus and device manufacturing method Grant 7,119,874 - Cox , et al. October 10, 2	2006-10-10
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table App 20060221323 - Cox; Henrikus Herman Marie ; et al.	2006-10-05
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20060215131 - Van Der Toorn; Jan-Gerard Cornelis ; et al.	2006-09-28
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,079,226 - Vreugdewater , et al. July 18, 2	2006-07-18
Lithographic apparatus and device manufacturing method Grant 7,072,025 - Cox , et al. July 4, 2	2006-07-04
Lithographic apparatus and device manufacturing method App 20060139613 - Houkes; Martijn ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060119829 - Cox; Henrikus Herman Marie ; et al.	2006-06-08
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ; et al.	2006-04-27
Actuator assembly and lithographic apparatus comprising such an actuator assembly App 20060082753 - Cox; Henrikus Herman Marie ; et al.	2006-04-20
Lithographic apparatus and device manufacturing method App 20060077364 - Cox; Henrikus Herman Marie ; et al.	2006-04-13
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,019,816 - Ottens , et al. March 28, 2	2006-03-28
Lithographic apparatus and device manufacturing method Grant 7,016,019 - Van Den Biggelaar , et al. March 21, 2	2006-03-21
Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed Grant 7,016,013 - Van Der Biggelaar , et al. March 21, 2	2006-03-21
Lithographic apparatus and device manufacturing method App 20060049698 - Maria Zaal; Koen Jacobus Johannes ; et al.	2006-03-09
Positioning system and positioning method Grant 7,005,823 - Houkes , et al. February 28, 2	2006-02-28
Planar motor initialization method, planar motro, lithographic apparatus and device manufacturing method App 20050285550 - Simons, Wilhelmus Franciscus Johannes ; et al.	2005-12-29
Lithographic apparatus and device manufacturing method App 20050259233 - Streefkerk, Bob ; et al.	2005-11-24
Lithographic apparatus and device manufacturing method App 20050219481 - Cox, Henrikus Herman Marie ; et al.	2005-10-06
Lithographic apparatus and device manufacturing method App 20050190351 - Cox, Henrikus Herman Marie ; et al.	2005-09-01
Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed App 20050151946 - Van Der Biggelaar, Petrus Marinus Christianus Maria ; et al.	2005-07-14
Lithographic apparatus and device manufacturing method App 20050139790 - Boogaarts, Martinus Godefridus Helena ; et al.	2005-06-30
Positioning system and positioning method App 20050140326 - Houkes, Martijn ; et al.	2005-06-30
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050134829 - Ottens, Joost Jeroen ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050128460 - Van Den Biggelaar, Petrus Marinus Christianus Maria ; et al.	2005-06-16
Lithographic apparatus and device manufacturing method Grant 6,906,786 - Cox , et al. June 14, 2	2005-06-14
Lithographic apparatus and device manufacturing method App 20050083496 - Dansberg, Michel Pieter ; et al.	2005-04-21
Lithographic apparatus and device manufacturing method App 20050018155 - Cox, Henrikus Herman Marie ; et al.	2005-01-27
Lithographic apparatus and device manufacturing method App 20040263000 - Vreugdewater, Patricia ; et al.	2004-12-30
Lithographic apparatus, projection system, method of projecting and device manufacturing method App 20040257549 - Leenders, Martinus Hendrikus Antonius ; et al.	2004-12-23
Lithographic apparatus and device manufacturing method App 20040227107 - Cox, Henrikus Herman Marie ; et al.	2004-11-18
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method App 20040218166 - Vreugdewater, Patricia ; et al.	2004-11-04
Lithographic apparatus and device manufacturing method App 20040160585 - Jacobs, Hernes ; et al.	2004-08-19
Lithographic apparatus and device manufacturing method App 20040008331 - Cox, Henrikus Herman Marie ; et al.	2004-01-15