| Patent | Date |
|---|
Multi-turn drive assembly and systems and methods of use thereof
Grant 11,413,744 - Hudgens , et al. August 16, 2 | 2022-08-16 |
Generating Electric Power For A Robotic End Effector
App 20220088803 - Berger; Alexander ; et al. | 2022-03-24 |
Substrate Processing System Carrier
App 20210292104 - Green; Aaron ; et al. | 2021-09-23 |
Calibration Of An Electronics Processing System
App 20210291375 - Bergantz; Nicholas Michael ; et al. | 2021-09-23 |
Calibration Of An Electronics Processing System
App 20210291374 - Bergantz; Nicholas Michael ; et al. | 2021-09-23 |
Multi-turn Drive Assembly And Systems And Methods Of Use Thereof
App 20210276180 - Hudgens; Jeff ; et al. | 2021-09-09 |
Ring removal from processing chamber
Grant 11,101,115 - Kopec , et al. August 24, 2 | 2021-08-24 |
Process Kit Ring Adaptor
App 20210217650 - Volfovski; Leon ; et al. | 2021-07-15 |
Long reach vacuum robot with dual wafer pockets
Grant 10,968,052 - Thanu , et al. April 6, 2 | 2021-04-06 |
Process kit ring adaptor
Grant 10,964,584 - Volfovski , et al. March 30, 2 | 2021-03-30 |
Sensor-based Correction Of Robot-held Object
App 20200411347 - Kopec; Nicholas Michael ; et al. | 2020-12-31 |
Long Reach Vacuum Robot With Dual Wafer Pockets
App 20200399077 - Thanu; Rajkumar ; et al. | 2020-12-24 |
Dual Robot Including Splayed End Effectors And Systems And Methods Including Same
App 20200384635 - Muthukamatchi; Karuppasamy ; et al. | 2020-12-10 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,850,390 - Muthukamatchi , et al. December 1, 2 | 2020-12-01 |
Process Kit Ring Adaptor
App 20200373194 - Volfovski; Leon ; et al. | 2020-11-26 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,814,475 - Muthukamatchi , et al. October 27, 2 | 2020-10-27 |
Ring Removal From Processing Chamber
App 20200335312 - KOPEC; Nicholas M. ; et al. | 2020-10-22 |
Long reach vacuum robot with dual wafer pockets
Grant 10,710,819 - Thanu , et al. | 2020-07-14 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20200061805 - Muthukamatchi; Karuppasamy ; et al. | 2020-02-27 |
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
Grant 10,500,719 - Muthukamatchi , et al. Dec | 2019-12-10 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20190270196 - Muthukamatchi; Karuppasamy ; et al. | 2019-09-05 |
Robot subassemblies, end effector assemblies, and methods with reduced cracking
Grant 10,090,188 - Thanu , et al. October 2, 2 | 2018-10-02 |
Dual Robot Including Spaced Upper Arms And Interleaved Wrists And Systems And Methods Including Same
App 20170368680 - Muthukamatchi; Karuppasamy ; et al. | 2017-12-28 |
Robot Subassemblies, End Effector Assemblies, And Methods With Reduced Cracking
App 20170323821 - Thanu; Raj kumar ; et al. | 2017-11-09 |
Automated substrate handling and film quality inspection in solar cell processing
Grant 8,318,512 - Shah , et al. November 27, 2 | 2012-11-27 |
Die-to-robot alignment for die-to-substrate bonding
Grant 8,123,881 - Cox , et al. February 28, 2 | 2012-02-28 |
Methods and apparatus for a robot wrist assembly
Grant 8,061,232 - Kroetz , et al. November 22, 2 | 2011-11-22 |
Advanced Platform For Processing Crystalline Silicon Solar Cells
App 20110245957 - PORTHOUSE; KEITH B. ; et al. | 2011-10-06 |
Automated Substrate Handling And Film Quality Inspection In Solar Cell Processing
App 20100279439 - SHAH; VINAY K. ; et al. | 2010-11-04 |
Die-to-robot Alignment For Die-to-substrate Bonding
App 20090126851 - Cox; Damon K. ; et al. | 2009-05-21 |
Three Dimensional Packaging With Wafer-level Bonding And Chip-level Repair
App 20090130821 - Cox; Damon K. ; et al. | 2009-05-21 |
Methods And Apparatus For A Robot Wrist Assembly
App 20080063504 - KROETZ; WHITNEY B. ; et al. | 2008-03-13 |
Integrated Vacuum Metrology For Cluster Tool
App 20070196011 - Cox; Damon K. ; et al. | 2007-08-23 |
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