loadpatents
Patent applications and USPTO patent grants for Cowley; Andy.The latest application filed is for "method and apparatus of stress relief in semiconductor structures".
Patent | Date |
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Method and apparatus of stress relief in semiconductor structures Grant 7,786,007 - Hoinkis , et al. August 31, 2 | 2010-08-31 |
Method and Apparatus of Stress Relief in Semiconductor Structures App 20080213993 - Hoinkis; Mark ;   et al. | 2008-09-04 |
Method and apparatus of stress relief in semiconductor structures Grant 7,368,804 - Hoinkis , et al. May 6, 2 | 2008-05-06 |
Bilayered metal hardmasks for use in dual damascene etch schemes Grant 7,241,681 - Kumar , et al. July 10, 2 | 2007-07-10 |
Dual damascene structure and method Grant 7,125,792 - Kumar , et al. October 24, 2 | 2006-10-24 |
Dual damascene structure and method Grant 7,091,612 - Kumar , et al. August 15, 2 | 2006-08-15 |
Reduction of the shear stress in copper via's in organic interlayer dielectric material Grant 7,060,619 - Cowley , et al. June 13, 2 | 2006-06-13 |
Bilayered metal hardmasks for use in dual damascene etch schemes App 20060113278 - Kumar; Kaushik ;   et al. | 2006-06-01 |
Bilayered metal hardmasks for use in Dual Damascene etch schemes Grant 7,052,621 - Kumar , et al. May 30, 2 | 2006-05-30 |
Composite intermetal dielectric structure including low-k dielectric material Grant 7,041,574 - Kim , et al. May 9, 2 | 2006-05-09 |
Method and apparatus of stress relief in semiconductor structures App 20050221610 - Hoinkis, Mark ;   et al. | 2005-10-06 |
Oxidized Tantalum Nitride As An Improved Hardmask In Dual-damascene Processing App 20050208742 - America, William G. ;   et al. | 2005-09-22 |
Dual damascene structure and method App 20050077628 - Kumar, Kaushik ;   et al. | 2005-04-14 |
Dual damascene structure and method App 20050079706 - Kumar, Kaushik ;   et al. | 2005-04-14 |
Reduced splattering of unpassivated laser fuses Grant 6,872,648 - Friese , et al. March 29, 2 | 2005-03-29 |
Via density rules Grant 6,864,171 - Hoinkis , et al. March 8, 2 | 2005-03-08 |
Composite intermetal dielectric structure including low-k dielectric material App 20040259273 - Kim, Sun-Oo ;   et al. | 2004-12-23 |
Bilayered metal hardmasks for use in dual damascene etch schemes App 20040251234 - Kumar, Kaushik ;   et al. | 2004-12-16 |
Composite low-k dielectric structure App 20040248400 - Kim, Sun-Oo ;   et al. | 2004-12-09 |
Method and apparatus of stress relief in semiconductor structures App 20040227214 - Hoinkis, Mark ;   et al. | 2004-11-18 |
Robust via structure and method Grant 6,806,579 - Cowley , et al. October 19, 2 | 2004-10-19 |
Reduction of the shear stress in copper via's in organic interlayer dielectric material App 20040175921 - Cowley, Andy ;   et al. | 2004-09-09 |
Simultaneous native oxide removal and metal neutral deposition method Grant 6,784,105 - Yang , et al. August 31, 2 | 2004-08-31 |
Robust Via Structure And Method App 20040157442 - Cowley, Andy ;   et al. | 2004-08-12 |
Plasma RIE polymer removal Grant 6,758,223 - Cowley , et al. July 6, 2 | 2004-07-06 |
Reduced splattering of unpassivated laser fuses App 20040056322 - Friese, Gerald R. ;   et al. | 2004-03-25 |
Dual hardmask single damascene integration scheme in an organic low k ILD Grant 6,638,851 - Cowley , et al. October 28, 2 | 2003-10-28 |
Dual hardmask single damascene integration scheme in an organic low k ILD App 20020164870 - Cowley, Andy ;   et al. | 2002-11-07 |
Zero mask MIMcap process for a low k BEOL App 20020155676 - Stetter, Michael ;   et al. | 2002-10-24 |
Plasma RIE polymer removal App 20020088476 - Cowley, Andy ;   et al. | 2002-07-11 |
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