Cowen; Allen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cowen; Allen.The latest application filed is for "methods of fabricating in-plane mems thermal actuators".
- Cowen; Allen - Cary NC
- Cowen; Allen - Morrisville NC
| Patent | Date |
|---|---|
| Methods of fabricating in-plane MEMS thermal actuators Grant 6,410,361 - Dhuler , et al. June 25, 2 | 2002-06-25 |
| Microelectromechanical actuators including sinuous beam structures Grant 6,367,252 - Hill , et al. April 9, 2 | 2002-04-09 |
| Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams Grant 6,333,583 - Mahadevan , et al. December 25, 2 | 2001-12-25 |
| Methods of fabricating in-plane MEMS thermal actuators App 20010008357 - Dhuler, Vijayakumar R. ; et al. | 2001-07-19 |
| In-plane MEMS thermal actuator and associated fabrication methods Grant 6,211,598 - Dhuler , et al. April 3, 2 | 2001-04-03 |
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