Cowans; William W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cowans; William W..The latest application filed is for "method and apparatus for thermal exchange with two-phase media".
- Cowans; William W. - Fullerton CA
- Cowans; William W. - Fullterton CA US
| Patent | Date |
|---|---|
| Temperature control system and method TDSF plus Grant 11,154,073 - Cowans , et al. October 26, 2 | 2021-10-26 |
| Method and apparatus for thermal exchange with two-phase media Grant 10,386,101 - Cowans , et al. A | 2019-08-20 |
| Temperature control system and method TDSF plus Grant 10,342,241 - Cowans , et al. July 9, 2 | 2019-07-09 |
| Method And Apparatus For Thermal Exchange With Two-phase Media App 20160282024 - Cowans; Kenneth W. ; et al. | 2016-09-29 |
| Temperature Control System And Method Tdsf Plus App 20160262419 - Cowans; Kenneth W. ; et al. | 2016-09-15 |
| Method and apparatus for thermal exchange with two-phase media Grant 9,372,020 - Cowans , et al. June 21, 2 | 2016-06-21 |
| Temperature control system and method TDSF plus Grant 9,360,243 - Cowans , et al. June 7, 2 | 2016-06-07 |
| Plasma reactor with a multiple zone thermal control feed forward control apparatus Grant 8,980,044 - Brillhart , et al. March 17, 2 | 2015-03-17 |
| Method And Apparatus For Thermal Exchange With Two-phase Media App 20150040586 - Cowans; Kenneth W. ; et al. | 2015-02-12 |
| Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor Grant 8,801,893 - Brillhart , et al. August 12, 2 | 2014-08-12 |
| Thermal control system and method Grant 8,689,575 - Cowans , et al. April 8, 2 | 2014-04-08 |
| Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control Grant 8,546,267 - Brillhart , et al. October 1, 2 | 2013-10-01 |
| Method and apparatus for thermal exchange with two-phase media Grant 8,532,832 - Cowans , et al. September 10, 2 | 2013-09-10 |
| System and method for thermal control of different heat loads from a single source of saturated fluids Grant 8,453,468 - Cowans , et al. June 4, 2 | 2013-06-04 |
| Thermal Control System And Method App 20130036753 - COWANS; William W. ; et al. | 2013-02-14 |
| Capacitively coupled plasma reactor having very agile wafer temperature control Grant 8,337,660 - Buchberger, Jr. , et al. December 25, 2 | 2012-12-25 |
| Method of processing a workpiece in a plasma reactor using feed forward thermal control Grant 8,329,586 - Buchberger, Jr. , et al. December 11, 2 | 2012-12-11 |
| Thermal control system and method Grant 8,291,719 - Cowans , et al. October 23, 2 | 2012-10-23 |
| Thermal control system and method Grant 8,240,160 - Cowans , et al. August 14, 2 | 2012-08-14 |
| Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops Grant 8,221,580 - Buchberger, Jr. , et al. July 17, 2 | 2012-07-17 |
| Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Grant 8,092,639 - Buchberger, Jr. , et al. January 10, 2 | 2012-01-10 |
| Method of operating a capacitively coupled plasma reactor with dual temperature control loops Grant 7,988,872 - Brillhart , et al. August 2, 2 | 2011-08-02 |
| Thermal control system and method Grant 7,765,820 - Cowans , et al. August 3, 2 | 2010-08-03 |
| Method And Apparatus For Thermal Exchange With Two-phase Media App 20100076611 - Cowans; Kenneth W. ; et al. | 2010-03-25 |
| Heat exchangers for fluid media Grant 7,661,460 - Cowans , et al. February 16, 2 | 2010-02-16 |
| Thermal Control System And Method App 20090248212 - Cowans; Kenneth W. ; et al. | 2009-10-01 |
| Thermal control system and method App 20090105889 - Cowans; William W. ; et al. | 2009-04-23 |
| Thermal control system and method App 20080319587 - Cowans; Kenneth W. ; et al. | 2008-12-25 |
| Thermal control system and method Grant 7,415,835 - Cowans , et al. August 26, 2 | 2008-08-26 |
| Thermal control system and method App 20070169491 - Cowans; Kenneth W. ; et al. | 2007-07-26 |
| Heat exchanger and temperature control unit Grant 7,243,500 - Cowans , et al. July 17, 2 | 2007-07-17 |
| Thermal control system and method App 20070095097 - Cowans; Kenneth W. ; et al. | 2007-05-03 |
| Thermal control system and method Grant 7,178,353 - Cowans , et al. February 20, 2 | 2007-02-20 |
| Heat exchanger and temperature control unit App 20050269067 - Cowans, Kenneth W. ; et al. | 2005-12-08 |
| Thermal control system and method App 20050183432 - Cowans, Kenneth W. ; et al. | 2005-08-25 |
| Efficient cooling system and method Grant 6,446,446 - Cowans September 10, 2 | 2002-09-10 |
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