Cowan; Patrick M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Cowan; Patrick M..The latest application filed is for "fault detection and control methodologies for ion implantation processes, and system for performing same".
- Cowan; Patrick M. - Pflugerville TX
| Patent | Date |
|---|---|
| Fault detection and control methodologies for ion implantation processes, and system for performing same Grant 6,960,774 - Coss, Jr. , et al. November 1, 2 | 2005-11-01 |
| Process control based on an estimated process result Grant 6,925,347 - Miller , et al. August 2, 2 | 2005-08-02 |
| Fault detection and control methodologies for ion implantation processes, and system for performing same App 20050092939 - Coss, Elfido JR. ; et al. | 2005-05-05 |
| Determination of a process flow based upon fault detection analysis Grant 6,740,534 - Adams, III , et al. May 25, 2 | 2004-05-25 |
| Method and apparatus for monitoring tool health Grant 6,594,589 - Coss, Jr. , et al. July 15, 2 | 2003-07-15 |
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