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Patent applications and USPTO patent grants for Coutu; Roger R..The latest application filed is for "plasma atomic layer deposition system and method".
Patent | Date |
---|---|
Atomic layer deposition head Grant 9,783,888 - Sershen , et al. October 10, 2 | 2017-10-10 |
ALD systems and methods Grant 9,777,371 - Coutu , et al. October 3, 2 | 2017-10-03 |
Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range Grant 9,567,670 - Sershen , et al. February 14, 2 | 2017-02-14 |
Plasma Atomic Layer Deposition System And Method App 20170016114 - Becker; Jill S ;   et al. | 2017-01-19 |
System and method for thin film deposition Grant 9,328,417 - Becker , et al. May 3, 2 | 2016-05-03 |
Atomic Layer Deposition Head App 20160115596 - Sershen; Michael J. ;   et al. | 2016-04-28 |
Reaction Chamber With Removable Liner App 20160002781 - Coutu; Roger R. ;   et al. | 2016-01-07 |
Reaction chamber with removable liner Grant 9,175,388 - Coutu , et al. November 3, 2 | 2015-11-03 |
Method For High-velocity And Atmospheric-pressure Atomic Layer Deposition With Substrate And Coating Head Separation Distance In The Millimeter Range App 20150275363 - Sershen; Michael J. ;   et al. | 2015-10-01 |
Ald Coating System App 20120141676 - Sershen; Michael J. ;   et al. | 2012-06-07 |
Ald Systems And Methods App 20120064245 - Coutu; Roger R. ;   et al. | 2012-03-15 |
Reaction Chamber With Removable Liner App 20100247763 - Coutu; Roger R. ;   et al. | 2010-09-30 |
Plasma Atomic Layer Deposition System And Method App 20100183825 - Becker; Jill S. ;   et al. | 2010-07-22 |
System And Method For Thin Film Deposition App 20100166955 - Becker; Jill S. ;   et al. | 2010-07-01 |
Apparatus for isolating and containing reactive medium Grant 5,738,335 - Coutu April 14, 1 | 1998-04-14 |
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