| Patent | Date |
|---|
Adaptive Control For A Power Generator
App 20210311448 - COUMOU; David J. ; et al. | 2021-10-07 |
Adaptive control for a power generator
Grant 11,042,140 - Coumou , et al. June 22, 2 | 2021-06-22 |
Adaptive control for a power generator
Grant 11,009,843 - Coumou , et al. May 18, 2 | 2021-05-18 |
Method for ion mass separation and ion energy control in process plasmas
Grant 10,998,170 - Yoshida , et al. May 4, 2 | 2021-05-04 |
Impedance matching network model based correction scheme and performance repeatability
Grant 10,910,197 - Coumou February 2, 2 | 2021-02-02 |
Pulse synchronization by monitoring power in another frequency band
Grant 10,821,542 - Nelson , et al. November 3, 2 | 2020-11-03 |
Feedback control by RF waveform tailoring for ion energy distribution
Grant 10,692,698 - Coumou , et al. | 2020-06-23 |
Supervisory control of radio frequency (RF) impedance tuning operation
Grant 10,666,206 - Coumou , et al. | 2020-05-26 |
Impedance Matching Network Model Based Correction Scheme and Performance Repeatability
App 20200126761 - COUMOU; David J. | 2020-04-23 |
Balancing RF circuit and control for a cross-coupled SIMO distribution network
Grant 10,536,130 - Coumou , et al. Ja | 2020-01-14 |
Adaptive Control For A Power Generator
App 20190391547 - COUMOU; David J. ; et al. | 2019-12-26 |
Feedback Control By RF Waveform Tailoring For Ion Energy Distribution
App 20190333738 - COUMOU; David J. ; et al. | 2019-10-31 |
Method for Ion Mass Separation and Ion Energy Control in Process Plasmas
App 20190318916 - Yoshida; Yusuke ; et al. | 2019-10-17 |
Apparatus and Method for Controlling Ion Energy Distribution in Process Plasmas
App 20190318913 - Yoshida; Yusuke ; et al. | 2019-10-17 |
Feedback control by RF waveform tailoring for ion energy distribution
Grant 10,395,895 - Coumou , et al. A | 2019-08-27 |
Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systems
Grant 10,304,669 - Coumou , et al. | 2019-05-28 |
Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systems
Grant 10269546 - | 2019-04-23 |
Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
Grant 10,229,816 - Coumou , et al. | 2019-03-12 |
Balancing RF Circuit And Control For A Cross-Coupled SIMO Distribution Network
App 20190068158 - COUMOU; David J. ; et al. | 2019-02-28 |
Supervisory Control of Radio Frequency (RF) Impedance Tuning Operation
App 20180109230 - COUMOU; David J. ; et al. | 2018-04-19 |
Supervisory control of radio frequency (RF) impedance tuning operation
Grant 9,876,476 - Coumou , et al. January 23, 2 | 2018-01-23 |
Solid-state Impedance Matching Systems Including A Hybrid Tuning Network With A Switchable Coarse Tuning Network And A Varactor Fine Tuning Network
App 20170345620 - Coumou; David J. ; et al. | 2017-11-30 |
Unified RF power delivery single input, multiple output control for continuous and pulse mode operation
Grant 9,721,758 - Coumou , et al. August 1, 2 | 2017-08-01 |
Feedback Control By RF Waveform Tailoring for Ion Energy Distribution
App 20170062186 - COUMOU; David J. ; et al. | 2017-03-02 |
Supervisory Control Of Radio Frequency (RF) Impedance Tuning Operation
App 20170054418 - COUMOU; David J. ; et al. | 2017-02-23 |
Unified RF Power Delivery Single Input, Multiple Output Control For Continuous And Pulse Mode Operation
App 20170018926 - COUMOU; David J. ; et al. | 2017-01-19 |
Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing
Grant 9,509,266 - Coumou , et al. November 29, 2 | 2016-11-29 |
Multiple radio frequency power supply control of frequency and phase
Grant 9,336,995 - Coumou , et al. May 10, 2 | 2016-05-10 |
Frequency interference detection and correction
Grant 9,294,136 - Coumou March 22, 2 | 2016-03-22 |
On the enhancements of planar based RF sensor technology
Grant 9,291,649 - Brown , et al. March 22, 2 | 2016-03-22 |
High reliability RF generator architecture
Grant 9,214,909 - Radomski , et al. December 15, 2 | 2015-12-15 |
Synchronization of RF pulsing with RF metrology, processing, and control
Grant 9,136,093 - Coumou , et al. September 15, 2 | 2015-09-15 |
Phase and frequency control of a radio frequency generator from an external source
Grant 9,041,292 - Coumou May 26, 2 | 2015-05-26 |
Power distortion-based servo control systems for frequency tuning RF power sources
Grant 9,041,471 - Coumou May 26, 2 | 2015-05-26 |
Multiple Radio Frequency Power Supply Control of Frequency and Phase
App 20140320013 - COUMOU; David J. ; et al. | 2014-10-30 |
Feedback Control And Coherency Of Multiple Power Supplies In Radio Frequency Power Delivery Systems For Pulsed Mode Schemes In Thin Film Processing
App 20140306754 - COUMOU; David J. ; et al. | 2014-10-16 |
Pulse Synchronization By Monitoring Power In Another Frequency Band
App 20140263199 - NELSON; Nicholas ; et al. | 2014-09-18 |
Synchronization of RF Pulsing With RF Metrology, Processing, and Control
App 20140218076 - COUMOU; David J. ; et al. | 2014-08-07 |
Distortion Correction Based Feedforward Control Systems and Methods For Radio Frequency Power Sources
App 20140220913 - COUMOU; David J. ; et al. | 2014-08-07 |
Distortion correction based feedforward control systems and methods for radio frequency power sources
Grant 8,781,415 - Coumou , et al. July 15, 2 | 2014-07-15 |
Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing
Grant 8,773,019 - Coumou , et al. July 8, 2 | 2014-07-08 |
Phase And Frequency Control Of A Radio Frequency Generator From An External Source
App 20140055034 - COUMOU; David J. | 2014-02-27 |
On The Enhancements of Planar Based RF Sensor Technology
App 20140049250 - BROWN; Dennis M. ; et al. | 2014-02-20 |
Power Distortion-Based Servo Control Systems for Frequency Tuning RF Power Sources
App 20140028389 - COUMOU; David J. | 2014-01-30 |
Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
Grant 8,581,597 - Coumou November 12, 2 | 2013-11-12 |
Power distortion-based servo control systems for frequency tuning RF power sources
Grant 8,576,013 - Coumou November 5, 2 | 2013-11-05 |
Feedback Control And Coherency Of Multiple Power Supplies In Radio Frequency Power Delivery Systems For Pulsed Mode Schemes in Thin Film Processing
App 20130222055 - Coumou; David J. ; et al. | 2013-08-29 |
Power Distortion-Based Servo Control Systems For Frequency Tuning RF Power Sources
App 20130169359 - Coumou; David J. | 2013-07-04 |
Application Of Wideband Sampling For Arc Detection With A Probabilistic Model For Quantitatively Measuring Arc Events
App 20130073241 - COUMOU; David J. | 2013-03-21 |
Phase and frequency control of a radio frequency generator from an external source
Grant 8,395,322 - Coumou March 12, 2 | 2013-03-12 |
Arc detection
Grant 8,334,700 - Coumou , et al. December 18, 2 | 2012-12-18 |
Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
Grant 8,289,029 - Coumou October 16, 2 | 2012-10-16 |
Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
Grant 8,264,237 - Coumou September 11, 2 | 2012-09-11 |
Multipoint voltage and current probe system
Grant 8,190,380 - Choueiry , et al. May 29, 2 | 2012-05-29 |
Frequency Interference Detection And Correction
App 20120099684 - Coumou; David J. | 2012-04-26 |
Phase and frequency control of a radio frequency generator from an external source
Grant 8,110,991 - Coumou February 7, 2 | 2012-02-07 |
Frequency interference detection and correction
Grant 8,102,954 - Coumou January 24, 2 | 2012-01-24 |
Phase And Frequency Control Of A Radio Frequency Generator From An External Source
App 20120013253 - Coumou; David J. | 2012-01-19 |
Multipoint Voltage And Current Probe System
App 20120013352 - Choueiry; Ray ; et al. | 2012-01-19 |
Multipoint voltage and current probe system
Grant 8,055,203 - Choueiry , et al. November 8, 2 | 2011-11-08 |
Orthogonal radio frequency voltage/current sensor with high dynamic range
Grant 8,040,141 - Heckleman , et al. October 18, 2 | 2011-10-18 |
Radio frequency power control system
Grant 8,040,068 - Coumou , et al. October 18, 2 | 2011-10-18 |
Arc Detection
App 20100201370 - Coumou; David J. ; et al. | 2010-08-12 |
Radio Frequency Power Control System
App 20100194195 - Coumou; David J. ; et al. | 2010-08-05 |
Phase And Frequency Control Of A Radio Frequency Generator From An External Source
App 20090315463 - Coumou; David J. | 2009-12-24 |
Orthogonal Radio Frequency Voltage/current Sensor With High Dynamic Range
App 20090256580 - Heckleman; Todd E. ; et al. | 2009-10-15 |
Phase and frequency control of a radio frequency generator from an external source
Grant 7,602,127 - Coumou October 13, 2 | 2009-10-13 |
Application Of Wideband Sampling For Arc Detection With A Probabilistic Model For Quantitatively Measuring Arc Events
App 20090207537 - Coumou; David J. | 2009-08-20 |
Application Of Wideband Sampling For Arc Detection With A Probabilistic Model For Quantitatively Measuring Arc Events
App 20090206822 - Coumou; David J. | 2009-08-20 |
Multipoint Voltage and Current Probe System
App 20080227420 - Choueiry; Ray ; et al. | 2008-09-18 |
Watermark Synchronization System and Method for Embedding in Features Tolerant to Errors in Feature Estimates at Receiver
App 20070217626 - Sharma; Gaurav ; et al. | 2007-09-20 |
High Reliability Rf Generator Architecture
App 20070024362 - Radomski; Aaron T. ; et al. | 2007-02-01 |
Frequency interference detection and correction
App 20060239389 - Coumou; David J. | 2006-10-26 |
Phase and frequency control of a radio frequency generator from an external source
App 20060232471 - Coumou; David J. | 2006-10-19 |
RF metrology characterization for field installation and serviceability for the plasma processing industry
Grant 6,983,215 - Coumou , et al. January 3, 2 | 2006-01-03 |
RF metrology characterization for field installation and serviceability for the plasma processing industry
App 20050119864 - Coumou, David J. ; et al. | 2005-06-02 |
Multirate processing for metrology of plasma RF source
Grant 6,707,255 - Coumou , et al. March 16, 2 | 2004-03-16 |
Multirate Processing For Metrology Of Plasma Rf Source
App 20040007984 - Coumou, David J. ; et al. | 2004-01-15 |
Adaptive plasma characterization system
Grant 6,627,464 - Coumou September 30, 2 | 2003-09-30 |
Method And Apparatus For Radio Frequency (rf) Metrology
App 20030160567 - Coumou, David J. | 2003-08-28 |
Method and apparatus for radio frequency (RF) metrology
Grant 6,608,446 - Coumou August 19, 2 | 2003-08-19 |
Broadband design of a probe analysis system
Grant 6,522,121 - Coumou February 18, 2 | 2003-02-18 |
RF power probe head with a thermally conductive bushing
App 20020180450 - Coumou, David J. | 2002-12-05 |
Broadband design of a probe analysis system
App 20020135378 - Coumou, David J. | 2002-09-26 |
Adaptive plasma characterization system
App 20020132479 - Coumou, David J. | 2002-09-19 |
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